IT201600106928A1 - Giroscopio triassiale mems a modulazione di frequenza - Google Patents
Giroscopio triassiale mems a modulazione di frequenzaInfo
- Publication number
- IT201600106928A1 IT201600106928A1 IT102016000106928A IT201600106928A IT201600106928A1 IT 201600106928 A1 IT201600106928 A1 IT 201600106928A1 IT 102016000106928 A IT102016000106928 A IT 102016000106928A IT 201600106928 A IT201600106928 A IT 201600106928A IT 201600106928 A1 IT201600106928 A1 IT 201600106928A1
- Authority
- IT
- Italy
- Prior art keywords
- triassial
- giroscope
- mems
- frequency modulation
- modulation
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
- G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
- G01C19/5649—Signal processing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5769—Manufacturing; Mounting; Housings
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Manufacturing & Machinery (AREA)
- Signal Processing (AREA)
- Gyroscopes (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT102016000106928A IT201600106928A1 (it) | 2016-10-24 | 2016-10-24 | Giroscopio triassiale mems a modulazione di frequenza |
| CN201710443570.1A CN107976180B (zh) | 2016-10-24 | 2017-06-13 | 频率调制mems三轴陀螺仪 |
| CN201720686289.6U CN207816283U (zh) | 2016-10-24 | 2017-06-13 | 频率调制mems三轴陀螺仪及电子系统 |
| EP17177405.2A EP3312559B1 (en) | 2016-10-24 | 2017-06-22 | Frequency modulation mems triaxial gyroscope |
| US15/639,608 US10520315B2 (en) | 2016-10-24 | 2017-06-30 | Frequency modulation MEMS triaxial gyroscope |
| US16/697,092 US11448507B2 (en) | 2016-10-24 | 2019-11-26 | Frequency modulation MEMS triaxial gyroscope |
| US17/821,724 US12038283B2 (en) | 2016-10-24 | 2022-08-23 | Frequency modulation MEMS triaxial gyroscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| IT102016000106928A IT201600106928A1 (it) | 2016-10-24 | 2016-10-24 | Giroscopio triassiale mems a modulazione di frequenza |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| IT201600106928A1 true IT201600106928A1 (it) | 2018-04-24 |
Family
ID=57960762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| IT102016000106928A IT201600106928A1 (it) | 2016-10-24 | 2016-10-24 | Giroscopio triassiale mems a modulazione di frequenza |
Country Status (4)
| Country | Link |
|---|---|
| US (3) | US10520315B2 (it) |
| EP (1) | EP3312559B1 (it) |
| CN (2) | CN207816283U (it) |
| IT (1) | IT201600106928A1 (it) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT201600106928A1 (it) * | 2016-10-24 | 2018-04-24 | St Microelectronics Srl | Giroscopio triassiale mems a modulazione di frequenza |
| IT201600110354A1 (it) | 2016-11-03 | 2018-05-03 | St Microelectronics Srl | Accelerometro triassiale mems con configurazione perfezionata |
| CN110637208B (zh) | 2017-02-17 | 2022-04-05 | 应美盛股份有限公司 | 用于对锚定件移动不敏感的传感器的锚定结构 |
| US10551191B2 (en) | 2017-02-17 | 2020-02-04 | Invensense, Inc. | Deformation rejection mechanism for offset minimization of out-of-plane sensing MEMS device |
| WO2019209659A1 (en) * | 2018-04-26 | 2019-10-31 | Invensense, Inc. | Deformation rejection mechanism for offset minimization of out-of-plane sensing mems device |
| US10760909B2 (en) * | 2018-06-18 | 2020-09-01 | Nxp Usa, Inc. | Angular rate sensor with in-phase drive and sense motion suppression |
| DE102018210491A1 (de) * | 2018-06-27 | 2020-01-02 | Robert Bosch Gmbh | Mikroelektromechanischer Sensor |
| FI130145B (en) | 2019-04-15 | 2023-03-13 | Tikitin Oy | Microelectromechanical resonator |
| IT201900017546A1 (it) * | 2019-09-30 | 2021-03-30 | St Microelectronics Srl | Dispositivo a pulsante mems resistente all'acqua, dispositivo di ingresso comprendente il dispositivo a pulsante mems e apparecchio elettronico |
| US11519726B2 (en) | 2020-06-19 | 2022-12-06 | Analog Devices, Inc. | Mechanism for selective coupling in microelectromechanical systems inertial sensors |
| US11460301B2 (en) | 2021-03-02 | 2022-10-04 | Nxp Usa, Inc. | Angular rate sensor based on frequency modulation and drive strategy for same |
| CN113295155B (zh) * | 2021-05-24 | 2025-04-04 | 美新半导体(天津)有限公司 | 一种三轴陀螺仪 |
| CN217155417U (zh) * | 2022-02-22 | 2022-08-09 | 瑞声开泰科技(武汉)有限公司 | 一种三轴检测的mems陀螺 |
| US12146742B2 (en) * | 2022-06-13 | 2024-11-19 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | Inertial navigation sensor with reduced footprint |
| US20240060778A1 (en) * | 2022-08-16 | 2024-02-22 | AAC Kaitai Technologies (Wuhan) CO., LTD | Three-axis gyroscope |
| EP4382861B1 (en) * | 2022-12-08 | 2025-08-20 | Commissariat à l'Energie Atomique et aux Energies Alternatives | Inertial sensor architecture with balanced sense mode and improved immunity to quadrature effects |
| CN116358509A (zh) * | 2023-03-31 | 2023-06-30 | 瑞声开泰科技(武汉)有限公司 | 一种微机械陀螺仪及电子产品 |
| WO2025017969A1 (ja) * | 2023-07-14 | 2025-01-23 | パナソニックＩｐマネジメント株式会社 | 慣性センサ |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014093727A1 (en) * | 2012-12-12 | 2014-06-19 | The Regents Of The University Of California | Frequency readout gyroscope |
| US20150330783A1 (en) * | 2014-05-15 | 2015-11-19 | Maxim Integrated Products, Inc. | Systems and methods for mems gyroscope shock robustness |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69413792T2 (de) * | 1994-01-25 | 1999-03-04 | The Charles Stark Draper Laboratory, Inc., Cambridge, Mass. | Mikromechanischer Stimmgabelumdrehungsmesser mit kammförmigen Antriebselemente |
| CN100487376C (zh) * | 2007-10-15 | 2009-05-13 | 北京航空航天大学 | 一种双质量块调谐输出式硅mems陀螺仪 |
| DE102008054749A1 (de) * | 2008-12-16 | 2010-06-17 | Robert Bosch Gmbh | Drehratensensor und Verfahren zum Betrieb eines Drehratensensors |
| DE102009046506B4 (de) * | 2009-11-06 | 2024-01-18 | Robert Bosch Gmbh | Drehratensensor |
| ITTO20091042A1 (it) * | 2009-12-24 | 2011-06-25 | St Microelectronics Srl | Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento |
| WO2012037540A2 (en) * | 2010-09-18 | 2012-03-22 | Fairchild Semiconductor Corporation | Micromachined monolithic 3-axis gyroscope with single drive |
| US9759563B2 (en) * | 2012-01-31 | 2017-09-12 | Nxp Usa, Inc. | Vibration robust x-axis ring gyro transducer |
| DE102013212112A1 (de) * | 2013-06-25 | 2015-01-08 | Robert Bosch Gmbh | Drehratensensor mit drei sensitiven Achsen und Verfahren zur Herstellung eines Drehratensensors |
| FR3022996B1 (fr) * | 2014-06-27 | 2017-12-01 | Thales Sa | Capteur inertiel angulaire mems fonctionnant en mode diapason |
| JP6481293B2 (ja) * | 2014-09-05 | 2019-03-13 | セイコーエプソン株式会社 | 物理量センサー素子、物理量センサー、電子機器および移動体 |
| CN204679079U (zh) * | 2015-06-29 | 2015-09-30 | 歌尔声学股份有限公司 | 一种mems三轴陀螺仪 |
| IT201600106928A1 (it) * | 2016-10-24 | 2018-04-24 | St Microelectronics Srl | Giroscopio triassiale mems a modulazione di frequenza |
-
2016
- 2016-10-24 IT IT102016000106928A patent/IT201600106928A1/it unknown
-
2017
- 2017-06-13 CN CN201720686289.6U patent/CN207816283U/zh not_active Withdrawn - After Issue
- 2017-06-13 CN CN201710443570.1A patent/CN107976180B/zh active Active
- 2017-06-22 EP EP17177405.2A patent/EP3312559B1/en active Active
- 2017-06-30 US US15/639,608 patent/US10520315B2/en active Active
-
2019
- 2019-11-26 US US16/697,092 patent/US11448507B2/en active Active
-
2022
- 2022-08-23 US US17/821,724 patent/US12038283B2/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014093727A1 (en) * | 2012-12-12 | 2014-06-19 | The Regents Of The University Of California | Frequency readout gyroscope |
| US20150330783A1 (en) * | 2014-05-15 | 2015-11-19 | Maxim Integrated Products, Inc. | Systems and methods for mems gyroscope shock robustness |
Also Published As
| Publication number | Publication date |
|---|---|
| US11448507B2 (en) | 2022-09-20 |
| EP3312559A1 (en) | 2018-04-25 |
| US10520315B2 (en) | 2019-12-31 |
| US12038283B2 (en) | 2024-07-16 |
| CN107976180A (zh) | 2018-05-01 |
| US20220404150A1 (en) | 2022-12-22 |
| CN207816283U (zh) | 2018-09-04 |
| CN107976180B (zh) | 2022-06-07 |
| EP3312559B1 (en) | 2021-08-18 |
| US20180112981A1 (en) | 2018-04-26 |
| US20200096339A1 (en) | 2020-03-26 |
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