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IN2015KN00588A - - Google Patents

Info

Publication number
IN2015KN00588A
IN2015KN00588A IN588KON2015A IN2015KN00588A IN 2015KN00588 A IN2015KN00588 A IN 2015KN00588A IN 588KON2015 A IN588KON2015 A IN 588KON2015A IN 2015KN00588 A IN2015KN00588 A IN 2015KN00588A
Authority
IN
India
Prior art keywords
layer
coating
tlc
pvd
metal free
Prior art date
Application number
Inventor
Yuriy Ivanov
Marcus Kennedy
Original Assignee
Federal Mogul Burscheid Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Federal Mogul Burscheid Gmbh filed Critical Federal Mogul Burscheid Gmbh
Publication of IN2015KN00588A publication Critical patent/IN2015KN00588A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/046—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/341—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one carbide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/343—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one DLC or an amorphous carbon based layer, the layer being doped or not
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/347—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with layers adapted for cutting tools or wear applications
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16J—PISTONS; CYLINDERS; SEALINGS
    • F16J9/00—Piston-rings, e.g. non-metallic piston-rings, seats therefor; Ring sealings of similar construction
    • F16J9/26—Piston-rings, e.g. non-metallic piston-rings, seats therefor; Ring sealings of similar construction characterised by the use of particular materials

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Pistons, Piston Rings, And Cylinders (AREA)
  • Chemical Vapour Deposition (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

The present application relates to a sliding element, in particular a piston ring, having a coating (10) on a substrate (12), which forms at least one sliding surface of the sliding element. The coating (10) has, from the inside outwards, a carbide or nitride layer (16), then a carbide containing (preferably PVD ) TLC layer (17), then a metal free PVD TLC layer (22) and then a metal free PACVD TLC layer (18).
IN588KON2015 2012-08-10 2013-07-30 IN2015KN00588A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012214284.3A DE102012214284B4 (en) 2012-08-10 2012-08-10 Sliding element, in particular piston ring, with a resistant coating
PCT/EP2013/065993 WO2014023615A1 (en) 2012-08-10 2013-07-30 Sliding element, in particular piston ring, having resistant coating

Publications (1)

Publication Number Publication Date
IN2015KN00588A true IN2015KN00588A (en) 2015-07-17

Family

ID=48917519

Family Applications (1)

Application Number Title Priority Date Filing Date
IN588KON2015 IN2015KN00588A (en) 2012-08-10 2013-07-30

Country Status (10)

Country Link
US (1) US9476504B2 (en)
EP (1) EP2882886B1 (en)
JP (1) JP6261582B2 (en)
KR (1) KR102093530B1 (en)
CN (1) CN105102680B (en)
BR (1) BR112015002898B1 (en)
DE (1) DE102012214284B4 (en)
IN (1) IN2015KN00588A (en)
RU (1) RU2634811C2 (en)
WO (1) WO2014023615A1 (en)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5564099B2 (en) * 2012-12-28 2014-07-30 株式会社リケン Combination of cylinder and piston ring
DE102014213822A1 (en) * 2014-07-16 2016-01-21 Federal-Mogul Burscheid Gmbh Sliding element, in particular piston ring, and method for producing the same
DE102014217040A1 (en) * 2014-08-27 2016-03-03 Bayerische Motoren Werke Aktiengesellschaft Coating for metal components, method for coating a metal component, pistons for internal combustion engines and motor vehicles
US10036472B2 (en) * 2016-03-04 2018-07-31 Kabushiki Kaisha Riken Sliding member and piston ring
DE102016107874A1 (en) * 2016-04-28 2017-11-16 Federal-Mogul Burscheid Gmbh Sliding element, in particular piston ring
CN106011855A (en) * 2016-07-18 2016-10-12 大连维钛克科技股份有限公司 Carbon-based coating applied to sliding part
BR102016017735B1 (en) * 2016-07-29 2021-05-18 Mahle Metal Leve S.A. sliding element for internal combustion engines
BR102017007599B1 (en) * 2017-04-12 2022-07-26 Mahle Metal Leve S.A. PISTON RING FOR INTERNAL COMBUSTION ENGINES
US11047478B2 (en) * 2017-06-02 2021-06-29 Mahle International Gmbh Piston ring and method of manufacture
US11162586B2 (en) 2017-06-02 2021-11-02 Mahle International Gmbh Piston ring and method of manufacture
US20190120291A1 (en) * 2017-10-24 2019-04-25 Hamilton Sundstrand Corporation Air bearing
PL239495B1 (en) * 2018-03-26 2021-12-06 Politechnika Lodzka Method for producing carbon coating doped with titanium and oxygen
CN109372651B (en) * 2018-09-25 2021-06-08 安庆帝伯格茨活塞环有限公司 Diamond-like coating piston ring and preparation method thereof
EP3650583A1 (en) * 2018-11-08 2020-05-13 Nanofilm Technologies International Pte Ltd Ta-c based coatings with improved hardness
DE102019206420A1 (en) * 2019-05-03 2020-11-05 Robert Bosch Gmbh Process for coating a mechanically highly stressed surface of a component as well as the coated component itself
DE102019214934A1 (en) * 2019-09-27 2021-04-01 Robert Bosch Gmbh Wear-resistant coated metallic component
CN113551034B (en) * 2021-07-28 2024-07-23 安庆帝伯格茨活塞环有限公司 Double transition layer diamond-like coating piston ring
CN114875361A (en) * 2022-05-27 2022-08-09 重庆中光学建设镀膜科技有限公司 A kind of high-adhesion metal coating and preparation process thereof
CN117987773B (en) * 2024-02-01 2024-08-09 仪征亚新科双环活塞环有限公司 Wear-resistant low-friction coating piston ring and preparation method thereof

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DE19513614C1 (en) 1995-04-10 1996-10-02 Fraunhofer Ges Forschung Bipolar pulsed plasma CVD of carbon@ layer on parts with complicated geometry
JP4331292B2 (en) 1998-10-30 2009-09-16 株式会社リケン Composite diamond-like carbon coating with low wear and excellent adhesion
DE10018143C5 (en) * 2000-04-12 2012-09-06 Oerlikon Trading Ag, Trübbach DLC layer system and method and apparatus for producing such a layer system
DE10203730B4 (en) 2002-01-30 2010-09-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for depositing metal-free carbon layers
JP4085699B2 (en) * 2002-06-04 2008-05-14 トヨタ自動車株式会社 Sliding member and manufacturing method thereof
DE102004041234A1 (en) * 2004-08-26 2006-03-02 Ina-Schaeffler Kg Wear resistant coating and method of making same
JP2006097871A (en) * 2004-09-30 2006-04-13 Nsk Ltd Rolling sliding member and rolling device
EP1883717A1 (en) * 2005-05-26 2008-02-06 NV Bekaert SA Piston ring having hard multi-layer coating
WO2007020139A1 (en) * 2005-08-18 2007-02-22 Nv Bekaert Sa Substrate coated with a layered structure comprising a tetrahedral carbon layer and a softer outer layer
JP2007070667A (en) * 2005-09-05 2007-03-22 Kobe Steel Ltd Formed article with hard multilayer film of diamond-like carbon, and production method therefor
DE502006005651D1 (en) * 2005-09-10 2010-01-28 Ixetic Hueckeswagen Gmbh Wear resistant coating and method of making same
JP2007162099A (en) * 2005-12-15 2007-06-28 Toyota Motor Corp Hard carbon film, method for producing the same, and sliding member
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JP2009167512A (en) 2008-01-21 2009-07-30 Kobe Steel Ltd Diamond-like carbon film for sliding component and method for manufacturing the same
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JP2012047603A (en) * 2010-08-26 2012-03-08 Tokai Kiyouhan Kk Measurement head for air micrometer

Also Published As

Publication number Publication date
EP2882886B1 (en) 2018-03-21
DE102012214284B4 (en) 2014-03-13
CN105102680B (en) 2018-07-31
US9476504B2 (en) 2016-10-25
RU2015108068A (en) 2016-09-27
BR112015002898A2 (en) 2018-05-22
KR20150060691A (en) 2015-06-03
US20150240944A1 (en) 2015-08-27
KR102093530B1 (en) 2020-03-25
JP6261582B2 (en) 2018-01-17
BR112015002898B1 (en) 2021-06-15
JP2015525861A (en) 2015-09-07
CN105102680A (en) 2015-11-25
EP2882886A1 (en) 2015-06-17
WO2014023615A1 (en) 2014-02-13
RU2634811C2 (en) 2017-11-03
DE102012214284A1 (en) 2014-02-13

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