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IL130045A0 - Micromachined displacement sensors and actuators - Google Patents

Micromachined displacement sensors and actuators

Info

Publication number
IL130045A0
IL130045A0 IL13004599A IL13004599A IL130045A0 IL 130045 A0 IL130045 A0 IL 130045A0 IL 13004599 A IL13004599 A IL 13004599A IL 13004599 A IL13004599 A IL 13004599A IL 130045 A0 IL130045 A0 IL 130045A0
Authority
IL
Israel
Prior art keywords
micromachined
actuators
displacement sensors
sensors
displacement
Prior art date
Application number
IL13004599A
Other languages
English (en)
Original Assignee
Univ Ramot
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Ramot filed Critical Univ Ramot
Priority to IL13004599A priority Critical patent/IL130045A0/xx
Publication of IL130045A0 publication Critical patent/IL130045A0/xx
Priority to PCT/IL2000/000268 priority patent/WO2000071981A1/en
Priority to AU44278/00A priority patent/AU4427800A/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
    • G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
    • G01H9/004—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means using fibre optic sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)
IL13004599A 1999-05-19 1999-05-19 Micromachined displacement sensors and actuators IL130045A0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
IL13004599A IL130045A0 (en) 1999-05-19 1999-05-19 Micromachined displacement sensors and actuators
PCT/IL2000/000268 WO2000071981A1 (en) 1999-05-19 2000-05-10 Micromachined displacement sensors and actuators
AU44278/00A AU4427800A (en) 1999-05-19 2000-05-10 Micromachined displacement sensors and actuators

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
IL13004599A IL130045A0 (en) 1999-05-19 1999-05-19 Micromachined displacement sensors and actuators

Publications (1)

Publication Number Publication Date
IL130045A0 true IL130045A0 (en) 2000-02-29

Family

ID=11072825

Family Applications (1)

Application Number Title Priority Date Filing Date
IL13004599A IL130045A0 (en) 1999-05-19 1999-05-19 Micromachined displacement sensors and actuators

Country Status (3)

Country Link
AU (1) AU4427800A (xx)
IL (1) IL130045A0 (xx)
WO (1) WO2000071981A1 (xx)

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US7554578B2 (en) 2000-07-11 2009-06-30 Phase One A/S Digital camera with integrated accelerometers
US6630871B2 (en) 2001-09-28 2003-10-07 Intel Corporation Center-mass-reduced microbridge structures for ultra-high frequency MEM resonator
US8945912B2 (en) 2008-09-29 2015-02-03 The Board Of Trustees Of The University Of Illinois DNA sequencing and amplification systems using nanoscale field effect sensor arrays
CN101726752B (zh) * 2008-10-23 2012-06-20 鸿富锦精密工业（深圳）有限公司 地震监测系统
WO2010138717A1 (en) 2009-05-27 2010-12-02 King Abdullah University Of Science And Technology Mems mass spring damper systems using an out-of-plane suspension scheme
US8300999B2 (en) 2009-12-23 2012-10-30 Kotura, Inc. Reducing optical loss in reflective optical gratings
US8463093B2 (en) 2010-05-18 2013-06-11 Kotura, Inc. Extension of steps in reflective optical gratings
US9250113B2 (en) 2010-06-21 2016-02-02 The Board Of Trustees Of The University Of Illinois Cell mass measurement and apparatus
US9778042B2 (en) 2013-12-13 2017-10-03 Intel Corporation Opto-mechanical inertial sensor
US9285391B2 (en) 2013-12-13 2016-03-15 Intel Corporation Optomechanical inertial sensor
EP3111412A4 (en) * 2014-02-28 2017-11-01 Russell Brands, LLC Data processing inside gaming device
US11262376B2 (en) * 2016-06-02 2022-03-01 Weifang Goertek Microelectronics Co., Ltd. MEMS device and electronic apparatus
US11420777B1 (en) * 2019-02-15 2022-08-23 Lockheed Martin Corporation Spherical mobility system
US11119116B2 (en) 2019-04-01 2021-09-14 Honeywell International Inc. Accelerometer for determining an acceleration based on modulated optical signals
US11079227B2 (en) 2019-04-01 2021-08-03 Honeywell International Inc. Accelerometer system enclosing gas
US10956768B2 (en) 2019-04-22 2021-03-23 Honeywell International Inc. Feedback cooling and detection for optomechanical devices
US10705112B1 (en) 2019-04-22 2020-07-07 Honeywell International Inc. Noise rejection for optomechanical devices
US11408911B2 (en) 2019-07-17 2022-08-09 Honeywell International Inc. Optomechanical structure with corrugated edge
US11119114B2 (en) 2019-07-17 2021-09-14 Honeywell International Inc. Anchor structure for securing optomechanical structure
US11372019B2 (en) 2019-08-13 2022-06-28 Honeywell International Inc. Optomechanical resonator stabilization for optomechanical devices
US11408912B2 (en) 2019-08-13 2022-08-09 Honeywell International Inc. Feedthrough rejection for optomechanical devices
US11150264B2 (en) 2019-08-13 2021-10-19 Honeywell International Inc. Feedthrough rejection for optomechanical devices using elements
CN113126279B (zh) * 2019-12-31 2022-10-18 成都理想境界科技有限公司 一种光纤扫描器及近眼显示系统
CN111366987B (zh) * 2020-04-21 2024-08-02 中油奥博(成都)科技有限公司 地面地震微重力联合测量系统及数据采集处理方法
CN112013951A (zh) * 2020-09-09 2020-12-01 中国电子科技集团公司第三研究所 一种热温差式质点振速传感器
CN112613207B (zh) * 2020-12-16 2024-06-21 西安稀有金属材料研究院有限公司 定量表征金属表面硬质薄膜断裂韧性的方法
CN113340289B (zh) * 2021-06-04 2023-01-24 西北工业大学 一种芯片级圆盘式声光驻波陀螺
CN113624992B (zh) * 2021-07-27 2024-06-21 南京邮电大学 一种电泵加速度传感器及其制备方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4136510A1 (de) * 1991-11-06 1993-05-13 Battelle Institut E V Beschleunigungssensor
US5420688A (en) * 1992-12-14 1995-05-30 Farah; John Interferometric fiber optic displacement sensor
US5747808A (en) * 1994-02-14 1998-05-05 Engelhard Sensor Technologies NDIR gas sensor
US5721612A (en) * 1996-08-08 1998-02-24 Motorola, Inc. Optical pressure sensor and method therefor
US5990473A (en) * 1998-02-04 1999-11-23 Sandia Corporation Apparatus and method for sensing motion in a microelectro-mechanical system

Also Published As

Publication number Publication date
AU4427800A (en) 2000-12-12
WO2000071981A1 (en) 2000-11-30

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Legal Events

Date Code Title Description
HC Change of name of proprietor(s)

Owner name: RAMOT AT TEL-AVIV UNIVERSITY LTD.

Free format text: FORMER NAMES:RAMOT UNIVERSITY AUTHORITY FOR APPLIED RESEARCH AND INDUSTRIAL;DEVELOPMENT LTD.