HK1095968A1

HK1095968A1 - Nozzle arrangement and method for processing a material for processing with a processing medium

Info

Publication number: HK1095968A1
Application number: HK07103098.8A
Authority: HK
Inventors: 亨利．孔策; 费迪南德．维纳
Original assignee: 埃托特克德国有限公司
Priority date: 2004-01-16
Filing date: 2005-01-13
Publication date: 2007-05-18
Also published as: ES2281069T3; DE502005000528D1; TW200529928A; EP1704759A1; JP2007517649A; ATE358410T1; DE102004002421A1; CN1910972A; KR20060130174A; KR101203458B1; WO2005069704A1; JP5005353B2; CN1910972B; TWI304753B; EP1704759B1; PL1704759T3; BRPI0506905A

Abstract

A nozzle arrangement is disclosed, for particular application as flushing nozzles in galvanising units with horizontal flow of a material (10) for processing, in the form of circuit boards. The material (10) for processing may thus be transported in a transport direction (18) from an entry region (15) to an exit region (16) of the nozzle arrangement. The nozzle arrangement comprises at least one nozzle opening (8), embodied such that a flow of a material (10) for processing runs at an inclined given angle to a transport plane of the material (10) for processing, such that the flow of the processing medium is diverted in the transport direction (18) of the material (10) for processing.

Description

Nozzle arrangement and method for treating a material to be treated with a treatment medium

Technical Field

The invention relates to a nozzle device and a method for treating a material to be treated with a treatment medium. In particular, the invention relates to a surge nozzle device, which can be used, for example, in a traveling system for the wet-chemical treatment of very thin printed circuit films or printed circuit boards.

Background

Nozzle devices in the form of surge nozzles are used, for example, in traveling systems for wet-chemical treatment of printed circuit boards, so that the fastest and most uniform treatment of the material to be treated in the form of printed circuit boards or printed circuit films traveling through the system can be carried out. In this case, the nozzle device extends transversely to the material to be treated over substantially its entire width by arranging several surge nozzles above and/or below the plane of travel of the material to be treated. By the surging nozzle, the treatment liquid is sprayed on or sucked from the surface of the material to be treated to thereby achieve a constant and uniform exchange of the treatment liquid on the surface of the material to be treated.

In this respect, a large number of different nozzle arrangements are proposed in EP 1187515 a 2. In this case, circular tubes having different nozzle shapes are basically used in each case. These nozzle shapes may be, for example, slot nozzles arranged obliquely, round nozzles arranged one behind the other in a plurality of rows, or slot nozzles of different widths arranged one behind the other in rows. The nozzle arrangement described therein relates in particular to a pivoting nozzle by means of which a periodic change of the direction of the stream of treatment liquid can be achieved while the material to be treated travels through.

In DE 3708529 a1, it is proposed to use slot nozzles, whereby the flow rate and the injection pressure of the individual treatment liquids can be adjusted because the slot width of the respective nozzle is variable.

In DE 3528575 a1, nozzles are used for cleaning, activating and/or metallizing drilled holes during horizontal travel of printed circuit boards, which nozzles are arranged below the conveying plane and perpendicular to the conveying direction, from which nozzles liquid treatment medium in the form of standing waves is conveyed onto the underside of the respective printed circuit board travelling through the system. The nozzle is arranged in an upper part of a nozzle housing, which is formed by a preliminary chamber with a suction opening, whereby the preliminary chamber is separated from an upper part of the inner space of the nozzle by means of an escutcheon. By means of the escutcheon, a flow distribution of the liquid treatment medium towards the nozzle is achieved. The inner space of the nozzle, which is located in the form of a trough in front of the actual nozzle opening, serves as a preparatory chamber for the formation of a uniform surge of liquid treatment medium.

A nozzle arrangement for cleaning or chemically treating workpieces, in particular printed circuit boards, with a suitable treatment liquid is known from EP 0280078B 1. The nozzle device includes a lower inlet box and a housing box, whereby the process liquid is introduced into the interior of the housing box through the lower inlet box, through a hole in the bottom of the housing box. The housing box has a central dividing wall which incorporates two perforation levels and slots located on the two perforation levels, so that the process liquid flows to the two slots and forms thereon two uniform sinusoidal surge profiles which flow through the workpiece, in particular through the drilled holes of the printed circuit board. This ensures a dense exchange of material by the Venturi effect (Venturi effect).

With the above-described surging nozzle device, since the maximum amount of the treatment liquid occurs at the region connected to the inlet of the treatment liquid, the flow velocity is maximized in this region. Since in each case a portion of the treatment liquid flows out via the individual nozzle openings of the surge nozzle device, the flow speed decreases with increasing distance from the connection region. As a result, in addition to the static pressure, an impact or total pressure and an unstable flow velocity are generated at the nozzle opening. This results in a difference in the amount of the treatment liquid discharged.

During the wet-chemical treatment of very thin and/or sensitive material to be treated, there is also the risk that in the inlet region of the nozzle device the material to be treated can be deflected out of the movement path or transport path by a surge of liquid generated on one edge of the material to be treated. This can lead to the situation that the material to be treated is scraped or completely caught along the nozzle device, which can lead to wastage of the material to be treated or to blockages within the respective treatment system. In this case of a blockage, the production must be interrupted in order to clear the blockage, which in turn leads to losses in other processing stations, in most cases due to the longer processing times.

The present invention is therefore based on the object of providing a nozzle device and a method for treating a material to be treated with a treatment liquid, in particular a very thin plate-shaped material to be treated, which solve the above-mentioned problems and, in particular, which avoid a deflection of the material to be treated out of the transport path in the region of the inlet opening of the nozzle device due to the flow of the treatment liquid or other treatment medium. This means that in the region of the inlet of the nozzle device, the forces perpendicular to the plane of the material to be treated must be as small as possible.

Disclosure of Invention

According to the invention, the above object is achieved by a nozzle arrangement having the features of independent claim 1 and by a method having the features of independent claim 27. In each case the independent claims define preferred or advantageous embodiments of the invention.

The basic principle on which the method and the nozzle device according to the invention are based consists of conveying or removing the treatment medium by means of a partial flow in the conveying direction of the material to be treated. The treatment medium is thereby drawn in the region around the inlet region of the nozzle device or the treatment channel, thereby supporting the transport of the material to be treated in the treatment channel.

The nozzle device according to the invention is used for treating a material to be treated, such as in the form of a printed circuit board or a printed circuit film, as a plate or head-to-tail material, with a treatment liquid or, more generally, with a treatment medium, whereby the material to be treated can be transported in a transport direction in a transport plane from an inlet region to an outlet region of the nozzle device. The treatment medium can also be, for example, a gaseous treatment medium in addition to the treatment liquid. In this case, the nozzle device comprises at least one nozzle opening which is designed in such a way that a flow of the treatment liquid or a flow of the treatment medium flows through the nozzle opening at an inclination at a predetermined angle relative to the transport plane of the material to be treated. The angle is predetermined in such a way that the flow of the treatment liquid or the flow of the treatment medium is deflected into the transport direction of the material to be treated or out of the nozzle opening which has been moved in this direction.

As a result, the treatment liquid or the treatment medium flows substantially from the at least one nozzle opening in the direction of the outlet area of the nozzle device and not in the direction of the inlet area of the nozzle device. As a result, a negative pressure is generated in the treatment channel of the nozzle device, which negative pressure is formed by the nozzle device and the material to be treated, as a result of which the circulating treatment medium is drawn in the region of the inlet opening of the nozzle device, while the risk of the material to be treated deflecting out of the conveying plane or out of the desired conveying path is avoided.

The deflection of the liquid or treatment medium flow is preferably effected by at least one nozzle opening formed by at least one nozzle opening channel which extends at an acute angle relative to the transport plane of the material to be treated. In this case, the angle is preferably at most 80 degrees. However, it has been verified that an angle between 0 and 60 degrees or more preferably between 10 and 30 degrees is particularly advantageous.

The nozzle device according to the invention can be designed for spraying a treatment medium onto the material to be treated or for sucking up the treatment medium. In the first case, i.e. if at least one nozzle opening is designed for the transport of the treatment medium, the angle opens out in the transport direction of the material to be treated, so that the flow of the treatment medium is deflected into the transport direction of the material to be treated. In this case, it is particularly advantageous if the at least one nozzle opening is arranged in a housing wall of the nozzle device which extends substantially along the conveying plane in such a way that the distance from the at least one nozzle opening to the inlet area is smaller than the distance from the at least one nozzle opening to the outlet area.

In the second case, i.e. if at least one nozzle opening is designed for receiving or sucking in the treatment medium, the angle opens in the transport direction of the material to be treated, so that a situation arises in which the flow of the treatment medium is deflected into the transport direction of the material to be treated. In this case, it is particularly advantageous if the at least one nozzle opening is arranged in a housing wall extending substantially along the conveying plane in such a way that the distance from the at least one nozzle opening to the outlet area is smaller than the distance from the at least one nozzle opening to the inlet area.

Because of the asymmetrical configuration of the nozzle device, it is ensured that an extended treatment channel is formed between the nozzle device and the material to be treated, in which treatment channel the treatment medium flows in the conveying direction of the material to be treated. This ensures a more efficient treatment of the material to be treated with the treatment medium. However, it is not mandatory to arrange the nozzle openings in the vicinity of the inlet or outlet area.

Preferably, the nozzle device is designed such that the distance between a housing wall of the nozzle device (preferably the housing wall in which the at least one nozzle opening is arranged) and the conveying plane decreases in the conveying direction of the material to be treated in a section between the inlet area and the at least one nozzle opening. In this section, a channel which opens in the direction of the inlet region in a wedge shape is thus formed between the housing wall and the conveying plane. Preferably, the nozzle device is further designed to: the distance between the housing wall of the nozzle device and the conveying plane increases in the conveying direction of the material to be treated in the section between the at least one nozzle opening and the outlet region, whereby a channel tapering in the direction of the outlet region is formed in this section between the housing wall and the conveying plane.

Preferably, the wedge-shaped channels formed on both sides of the material to be treated, in particular in combination with the wedge-shaped channels mentioned up to this point, generate an additional underpressure in the inlet region of the nozzle device by means of the so-called venturi effect. Since the nozzle device is preferably arranged in the treatment medium, the treatment medium is simultaneously drawn from the surrounding area of the inlet area. As a result of the drawing of the treatment medium, a buffer is thereby formed in the inlet region toward the housing wall of the nozzle device, so that any contact between the material to be treated and the housing wall of the nozzle device is reliably avoided.

Preferably, the front edge of the nozzle arrangement in the inlet region of the nozzle arrangement is chamfered or rounded to prevent the formation of vortices which could cause the material to be treated to deviate from the path.

The at least one nozzle opening is preferably designed to extend along the conveying plane over the entire width in a width direction perpendicular to the conveying direction. In this case, the width is selected as a function of the respective width of the material to be treated, thereby ensuring a uniform surface treatment of the material to be treated. In particular, the nozzle device can be designed in the form of a trough or a row of openings arranged next to one another at a distance from one another, whereby a uniform treatment can be ensured over the entire width of the material to be treated. In this direction, the nozzle openings are preferably arranged parallel to the conveying plane.

Because of the desired inlet suction effect of the nozzle device, if the liquid distribution is uneven in the width direction of the movement path, there is a risk that the material to be treated is pulled to one side and thereby gets out of the conveyance path from one side or is caught by the outer periphery of the side portion of the conveyance path.

For better distribution of the treatment medium, it is preferred if the nozzle device comprises a medium channel or a liquid channel for conveying the treatment medium, which extends along the at least one nozzle opening. Preferably, the media channel is connected to the at least one nozzle opening by dispensing openings arranged spaced apart from each other along the at least one nozzle opening. The distribution openings form a flow resistance and thus improve the distribution of the treatment medium over the entire width of the nozzle opening. Preferably, the dispensing openings have the same diameter and the same length, but different distances. However, other configurations may be possible.

According to one embodiment, the nozzle device comprises an insert member arranged in the medium channel, the displacement of which increases with increasing distance from a connecting opening provided for introducing or removing the treatment medium. In this way, it is ensured that the passage cross section of the medium channel, i.e. the cross-sectional area available for the passage of the treatment medium, decreases with increasing distance from the connection opening. In this case, the insertion member may be designed such that the passage cross-section decreases continuously or stepwise with increasing distance intervals from the connection opening. For example, a continuous reduction in the passage cross section can be achieved by a correspondingly shaped insert or a correspondingly increased wall thickness of the housing of the media channel. For example, the progressive reduction in cross-section may be achieved by an insert consisting of individual segments or portions. These parts may be simple displacements or perforating bodies, whereby the passage cross-section is determined, for example, by the size of the hole. The various parts may be assembled by adhesive bonding, welding, tension rods or struts. In this case, the stepwise reduction in the cross section can be designed in particular in such a way that each stage is arranged in the form of a respective distribution opening, whereby the flow of the treatment medium is adapted through the respective distribution opening, preferably at a specific stage, by the reduction in the cross section. The passage cross section of the medium channel can thus be adapted to the amount of process medium flowing through the medium channel in a specific time unit, so that an even distribution of flow rate and pressure can be achieved. The progressive integration of the insert member from the individual parts also contributes to providing extremely low manufacturing costs.

In this connection, it is also possible to provide the distribution openings connecting the medium channel with the nozzle openings with different lengths, i.e. as bores in the housing wall with different step thicknesses. Likewise, if the at least one nozzle opening comprises a large number of openings arranged in the width direction, it is possible to design the individual openings to form channels or holes of different lengths. Due to the different opening length configurations of the distribution openings or of the one-by-one arrangement of the at least one nozzle opening, different values of flow resistance can be generated, which further contribute to the homogenization of the flow rate. It is also possible to have the same pore size and different spacing of the pores.

The dispensing openings mentioned up to this point can all have the same diameter. However, in terms of adjusting the flow rate, it is advantageous to design the dispensing openings with different diameters. This means that the diameter of the dispensing opening can be adapted to the flow rate and the associated pressure ratio in the medium channel. Furthermore, by having valve openings with different diameters, the ends of the dispensing opening may also be provided with counterbores having the same diameter. Thereby, a further homogenization of the flow velocity, in particular of the flow velocity through the distribution opening in an emergency situation, is achieved.

The dispensing aperture described so far may be formed in the form of a corresponding hole in the insert member or housing wall. The insert element can be designed with a U-shaped cross section in its longitudinal direction, i.e. in the direction of movement, thereby creating a supporting overall shape which can be held by clamping in the housing of the nozzle device.

In the case of slot-like nozzle openings, it is particularly advantageous if they are formed by the housing wall and the opposite insertion strip. In this case, the insert strip can be removed for cleaning the nozzle device, and the cleaning tool can thus easily pass through the nozzle opening which is narrow in itself.

According to a preferred embodiment of the invention, the cross-section of the treatment channel can be varied by suitable shaping to suit the desired flow rate, parallel to the plane of the material to be treated. This is preferably achieved by the insert strip being designed to be replaceable, whereby the nozzle arrangement can be easily changed according to the needs of the specific material to be treated.

By shaping the process channel, a negative pressure can also be generated in the defined area. Again, this is preferably achieved by at least one replaceable insert strip. Due to the underpressure in the defined region, the treatment medium can be arranged such that it flows into blind holes or through holes of the material to be treated.

Thus, according to the invention, the cross section of the process channel is acted on in a specific manner to thereby adjust the flow rate or increase the underpressure in the defined region. This is preferably achieved by narrowing the treatment channel at one or more locations in the conveying direction within the channel to be treated.

According to a preferred embodiment, the outlet cross section of the slot-like nozzle aperture can be adjusted by means of a nozzle track. For this purpose, a nozzle rail, for example made of metal or plastic, can be located in an adjustable manner at the housing of the nozzle device. It is particularly preferred that the nozzle rail is designed in an alternative manner to accommodate different geometries of the selected nozzle openings. In this way, the nozzle device can be changed in a precise and flexible manner to accommodate different processing requirements and different types of material to be processed.

Preferably, if the at least one nozzle opening is formed by at least one nozzle opening channel extending at an acute angle to the conveying plane of the material to be treated or extending substantially parallel to this plane, the dispensing opening is also formed by a dispensing channel or a dispensing bore which is arranged at an angle to the conveying plane of the material to be treated which is greater than the angle of the nozzle opening channel to the conveying plane. Furthermore, the dispensing opening or the dispensing channel or the dispensing hole may be offset in the conveying direction with respect to the at least one nozzle opening. By these arrangements, a plurality of deflections of the treatment medium flow can take place. In particular, this risk can be eliminated in that, due to dynamic forces in the flow of the treatment medium, higher flow velocities of this medium do not occur at the nozzle openings in the direction of the nozzle opening slots.

The nozzle device according to the invention can be designed as a single nozzle device with a nozzle opening on one side of the material to be treated or as a nozzle device with one nozzle opening on both the lower and upper sides of the material to be treated.

It is particularly advantageous if the nozzle device comprises at least one further nozzle opening which is arranged on the conveying plane side of the material to be treated which is located opposite the at least one nozzle opening. Thereby, the material to be treated can be treated from both sides, i.e. from the upper and lower side, while travelling through the nozzle device. This is advantageous for materials to be treated which require treatment on both sides, such as printed circuit boards or films to be printed on both sides. Specifically, this can save processing steps and reduce the overall processing time, thereby resulting in lower overall consumption and cost. In this case, it is particularly advantageous to design the nozzle device mirror-symmetrically with respect to the plane of movement of the material to be treated, so that the advantages of the nozzle device described so far can be achieved on both sides of the material to be treated.

For treating blind or through-holes in the material to be treated, it is furthermore advantageous to provide at least one or more additional nozzle openings which convey the treatment medium substantially perpendicularly to the surface of the material to be treated. These additional nozzle openings may be arranged on the upstream side or the downstream side with respect to the above-mentioned nozzle openings, which have the effect of a flow division in the conveying direction. When the nozzle openings are provided on both sides of the plane of the material to be treated, the additional nozzle openings arranged on different sides of the material to be treated can be directly opposite each other or offset from each other. The treatment medium may be supplied to the additional nozzle openings in an adjustable or non-adjustable manner. This can be done via the same media channel that is used to supply the partial flow to the nozzle openings in the direction of movement described above. It is particularly advantageous if the through-hole in the material to be treated is treated by the additional nozzle opening because of the positive pressure at the additional nozzle opening while at the same time there is a negative pressure in the treatment channel, for example on the side opposite to the material to be treated. Alternatively, a separate supply may also be provided. In the latter case, a separate transport device or pump may also be provided for transporting the treatment medium.

It has been found that the transport of the material to be treated through the treatment channel of the nozzle device can be improved by specifically reducing the partial flow in the outlet region of the nozzle device perpendicular to the plane of the material to be treated or in the transport direction. In addition to the measures described above, this is preferably achieved by widening the cross section of the treatment channel in the outlet region of the nozzle device. By shaping the nozzle device or the treatment channel, it is thereby possible to obtain the result that the flow rate of the treatment medium is continuously increased on the inlet region side in the direction of movement and is continuously reduced on the outlet region side. Furthermore, the outlet area may be provided with a flow influencing element. It has proved advantageous if, as flow-influencing elements, projections, baffles or webs formed in or on the surface of the nozzle arrangement. Due to such flow influencing elements, eddy currents are avoided, whereby the partial flows perpendicular to the plane of the material to be treated and in the direction of movement are minimized. Furthermore, the flow-influencing element can ensure an additional guiding function for the material to be treated.

The invention effectively supports the movement of the material to be treated through the treatment channel of the nozzle device by arranging the flow of the treatment medium to be specifically induced in the direction of movement of the material to be treated, thereby drawing the treatment medium from the inlet region of the nozzle device. In this way, it is possible to achieve a transfer of, for example, very thin material to be treated (which can be obtained as so-called "end-to-end" material), even without the need for additional drive means such as rollers, wheels, clamps, etc. Furthermore, the introduction of the treatment medium from the surrounding area of the inlet area ensures an efficient circulation of the treatment medium. The flow rate obtained by sucking in the treatment medium in the inlet region is substantially greater than the flow rate generated by the nozzle openings alone. Furthermore, the nozzle device according to the invention allows a contactless conveyance of the material to be treated.

As part of a corresponding device or system, the nozzle device is particularly suitable for the wet-chemical treatment of printed circuit boards or printed circuit films as the material to be treated. Because of the specifically designed flow conditions, the nozzle arrangement helps to keep the material to be treated from deflecting out of its desired delivery path. This applies in particular to the inlet region of the nozzle device. The nozzle arrangement also makes it possible to homogenize the flow and velocity of the treatment medium in the width direction of the nozzle arrangement, whereby a more uniform treatment result can be obtained. Furthermore, a uniform spray or surge geometry is provided, in particular a uniform alignment of the treatment medium flow with respect to the nozzle opening. Last but not least, the nozzle arrangement is well compatible with compactness and manufacturability due to the small number of components, whereby space requirements as well as manufacturing costs in the respective arrangement or system can be reduced.

Drawings

The invention is described in more detail below on the basis of preferred embodiments, with reference to the attached drawings.

FIG. 1A shows a side view of an embodiment of a nozzle arrangement according to the invention, wherein two nozzles are in partial cross-section taken along the section line C-C' shown in FIG. 2;

FIG. 1B shows an enlarged cross-section of one of the nozzles shown in FIG. 1A;

FIG. 2 shows the cross-section of FIG. 1A in a partial cross-section taken along section line A-A' in FIG. 1A

A cross-sectional view of an embodiment;

FIG. 3 shows a cross-sectional view of the embodiment of FIG. 1A in partial cross-section taken along section line B-B' in FIG. 1A;

FIG. 4 shows a cross-sectional view of another embodiment of a nozzle arrangement according to the invention taken along section line C-C' in FIG. 5;

FIG. 5 shows a cross-sectional view of the embodiment of FIG. 4 in partial cross-section taken along section line B-B' in FIG. 4;

FIG. 6 shows a cross-sectional view of the embodiment of FIG. 4 in partial cross-section taken along section line A-A' in FIG. 4;

fig. 7 shows a cross-sectional view of another embodiment of a nozzle device according to the invention with an adjustable nozzle track.

Fig. 8 shows a further embodiment of a nozzle arrangement according to the invention with an additional nozzle opening.

Fig. 9 shows another embodiment of a nozzle device according to the invention, the parts of the nozzle device that are arranged on both sides of the conveying plane having a different design.

Detailed Description

Fig. 1A shows a nozzle arrangement according to one embodiment of the invention, which is particularly suitable as a surge nozzle for electroplating systems having a horizontal travel path (run-through) for printed circuit boards or printed circuit films. The nozzle arrangement comprises two nozzles extending along a transport plane in which the material to be treated moves along a transport path from an inlet region 15 to an outlet region 16. The two nozzles are arranged directly opposite each other and are mirror-symmetrical with respect to the conveying plane. Between the two nozzles there is arranged a treatment channel through which the material to be treated can pass.

In each case, the nozzle comprises a housing 2, in which housing 2 a nozzle opening 8 is provided in the side facing the conveying plane. A treatment medium in the form of a treatment liquid for treating a material to be treated is supplied to the nozzle through a connection opening 1, which connection opening 1 is arranged on the front side of the nozzle. The treatment liquid passes from the connection opening 1 into a medium channel in the form of a liquid channel 6, which is connected to the nozzle opening via a distribution opening 7. The flow of the treatment liquid is indicated by arrows 11 and 11' in fig. 1.

In each case, the housing 2 of the nozzle comprises a side wall on the side of the inlet region 15 and a side wall on the side of the outlet region 16. The housing 2 of the nozzle is closed by a housing cover 13, so that the housing 2 together with the housing cover 13 encloses the liquid channel 6. An insert member 3 having a U-shaped cross-section is arranged in the liquid channel 6. In this case, the aperture side of the insert member 3 is arranged on the side of the nozzle aperture 8 in the housing 2 in such a way that the dispensing aperture 7 is freely accessible from the liquid channel 6. The insert member is preferably made of plastic and stabilizes the nozzle and the housing 2 by providing a U-shaped support member 4 on its outer side. The U-shaped support member 4 is preferably constructed of a metal that is resistant to the chemicals used, such as stainless steel, titanium, niobium, and the like.

The material 10 to be treated travels through the nozzle arrangement in a horizontal conveyance plane in a conveyance direction indicated by arrow 18. In this case, the treatment liquid is conducted obliquely from the nozzle opening 8 onto the material to be treated 10. Thereby, a suction effect acts on the inlet area 15 side of the nozzle device. The nozzle arrangement is arranged in a fluid medium, which may be, for example, a treatment liquid, whereby, due to a suction effect, additional liquid, for example, as indicated by arrow 11', is introduced into the treatment channel.

FIG. 1B shows an enlarged partial view of one of the nozzles of FIG. 1A. In this figure it can be seen in particular that the nozzle openings 8 are formed by nozzle opening channels which form an acute angle 17 with respect to the conveying plane of the material 10 to be treated. The angle 17 opens against the conveying direction 18, so that the treatment liquid is deflected through the nozzle-opening channel into the conveying direction 18. The dispensing opening 7 is formed in each case by a dispensing channel in the form of a hole in the housing 2, which is arranged at an angle relative to the conveying plane, which is greater than the angle 17 of the nozzle opening channel. The flow is thus deflected several times, as indicated by the arrow 11, into the transport direction 18 of the material 10 to be treated.

Fig. 2 shows a sectional view of the nozzle device of fig. 1A and 1B in partial cross-section taken along section line a-a' in fig. 1A (i.e. in the width direction of the nozzle device). As shown in fig. 2, the connection opening 1 is designed in the form of a connection nozzle with a sealing ring 14, through which the treatment liquid enters the liquid channel 6. In particular, it can be seen that the insert element 3 is designed in a wedge-shaped manner, whereby the passage cross-section of the liquid channel decreases as its distance from the connection opening 1 increases. It can further be seen that the dispensing apertures 7 are formed as holes in the wall of the housing 2 arranged equidistantly from each other. The thickness of the wall is substantially constant along the width of the nozzle, thereby providing a dispensing opening 7 of substantially the same length.

As shown in fig. 2, the nozzle opening 8 is designed as a groove extending in the width direction of the nozzle.

FIG. 3 shows a cross-sectional view of the nozzle arrangement of FIGS. 1A, 1B and 2 in partial cross-section taken along section line B-B' in FIG. 1A. As shown in fig. 3, the dispensing apertures 7 are holes with a circular cross-section arranged equidistant from each other. In particular, the dispensing apertures 7 are arranged one after the other in a row, which is located on the side of the nozzle turned towards the inlet area 15.

The liquid flow indicated by the arrows 11 in fig. 1A and 1B is thus guided from the wedge-shaped liquid channel 6 through the distribution openings 7 in the form of distribution holes with a circular cross section, through the nozzle openings 8 designed as uniformly wide slots, and onto the material to be treated 10. The liquid flow is transformed between the dispensing opening and the nozzle opening 8 into a flat jet which extends substantially over the entire width of the material to be treated.

Because of the wedge-shaped insert member 3 it is ensured that the flow rate is equally large at various points of the liquid channel 6. Since all the distribution openings 7 have the same dimensions, a very uniform spray pattern, i.e. a uniform spray or surge geometry, is obtained, and also a uniform flow direction.

The uniform flow geometry is particularly important for the suction effect to occur due to the so-called venturi effect, since the material to be treated can be drawn obliquely by the suction which is not uniform in the width direction, and in this case the material can be caught by the lateral periphery of the transport path.

To avoid this, the device of multiple nozzles and a single nozzle according to the illustrated embodiment has the following features:

A) the nozzle opening 8 is not arranged centrally but at the lateral longitudinal edge of the nozzle in the vicinity of the inlet area 15.

B) The nozzle openings 8 are designed in the form of nozzle opening channels, which are arranged at an acute angle 17 with respect to the conveying plane of the material 10 to be treated, as shown in fig. 1B.

C) In the section between the nozzle bore 8 and the outlet region 16, the thickness of the housing wall facing the conveying plane is reduced, whereby in this section the process channel widens in a wedge-like manner in the conveying direction 18.

D) The edges of the nozzles in the inlet region 15 and the outlet region 16 are rounded to avoid the formation of vortices in the process liquid.

E) In the section between the inlet region 15 and the nozzle bore 8, the thickness of the housing wall facing the conveying plane increases, whereby in this section the process channel narrows in a wedge-like manner in the conveying direction 18.

Specifically, this means that: with the mirror symmetric nozzle arrangement shown in fig. 1A, both the inlet and outlet regions assume a funnel shape.

Because of the special shape of the nozzle geometry, which is turned towards the material to be treated, a negative pressure is generated in the inlet region 15 of the nozzle device, as indicated by the arrow 11' in fig. 1A, which leads to the introduction of liquid and material to be treated from the region surrounding the nozzle device into the treatment channel. The flow velocity towards the nozzle opening 8 is increased, in particular due to the wedge-like shape or funnel shape of the process channel in the inlet area 15. Due to the flow and the rounded edges of the nozzle, it is ensured that thin material to be treated does not collide with the side walls of the nozzle. Due to the suction effect of the nozzle arrangement in the inlet area 15, more treatment liquid is drawn through the treatment channel than out through the nozzle openings 8. This not only prevents damage to the material to be treated, but also speeds up the treatment, whereby shorter treatment times can be achieved compared to using conventional nozzle arrangements. For example, the suction of air present in the blind holes or gases formed as a result of the treatment can be achieved by means of the underpressure, so that the wetting of the surface by the treatment liquid can be improved.

At the outlet region of the nozzle arrangement, the flow rate decreases as the width of the treatment channel increases.

On both sides of the inlet area 15 side and the outlet area 16 side, conveyor rollers may be arranged adjacent to the nozzle arrangement. The conveyor rollers ensure reliable movement of the material to be treated from (or to) the adjacent treatment station.

Fig. 4 shows a cross-sectional view of a nozzle arrangement according to another particularly preferred embodiment of the invention. Fig. 4 is a partial cross-section taken along line C-C' in fig. 5. Features and components similar to those of the nozzle arrangement in the embodiment shown in fig. 1-3 are given the same reference numerals and will not be described further below.

In contrast to the exemplary embodiment described on the basis of fig. 1 to 3, the nozzle arrangement of fig. 4 has an insert element 3a arranged on the side of the nozzle opening 8 in the treatment bath channel. A first distribution hole 9 is provided in the insert member 3a, through which the process liquid is guided from the liquid channel 6 into the deflection channel 5. The deflection channel 5 is formed by a corresponding deepening of the insert member 3 a. From there, the treatment liquid passes through the second distribution openings 7 to the nozzle openings 8, which second distribution openings 7 substantially correspond to the distribution openings of the embodiment in fig. 1-3. In the conveying direction 18, the first dispensing openings 9 are arranged offset to the second dispensing openings 7 and the nozzle openings 8. Thereby, a first deflection of the liquid flow of about 90 degrees is generated from the first distribution opening 9 into the deflection channel 5 and a second deflection of about 90 degrees is generated from the deflection channel 5 into the second distribution opening 7. A third deflection occurs when the process liquid is directed from the second distribution openings 7 into the nozzle opening channels. Thereby, a desired flow direction oblique to the transport plane of the material 10 to be treated can be ensured even at higher flow rates of the treatment liquid.

With the nozzle arrangement shown in fig. 4, the surface of the nozzle facing the material 10 to be treated is formed by an insert strip 12. The insertion strip 12 has a dovetail-shaped guide which is inserted into the housing 2 of the nozzle, likewise designed as a dovetail on the housing 2 side. The nozzle opening 8 is formed on one side by the edge of the insert strip 12 and on the other side by the opposite edge of the housing 2, thereby producing a slot-shaped nozzle opening 8 arranged along the width of the nozzle. The side of the insert member facing the conveying plane of the material 10 to be treated has substantially the same shape as the corresponding housing wall of the nozzle device of fig. 1-3 already described herein. Thereby, the same advantageous flow effect can be ensured.

For cleaning the nozzle, the insert strip 12 can be removed so that the second dispensing opening 7 is freely accessible.

Fig. 5 shows a side view of the nozzle arrangement of fig. 4 in partial section taken along section line B-B' in fig. 4. As can be seen in particular from fig. 5, the first dispensing apertures 9 in the insert member 3a are arranged equidistant from each other in the width direction of the nozzle device. Due to the wedge-like shape of the insert element 3a, the length of the dispensing opening is different in each case for each first dispensing opening 9. The wedge-like shape of the insert member 3a in this case is designed such that the passage cross-section of the liquid channel 6 decreases with increasing distance from the connecting opening 1. This means that the further away from the connecting opening 1, the longer the dispensing hole, whereby a larger pressure drop over the dispensing hole is also created. In particular towards the end of the nozzle opening 8 opposite the connection opening 1, which produces a balancing effect. Furthermore, the wedge-like shape of the insertion member 3a is arranged such that the remaining height of the liquid channel at this end is not zero, but has a final value of preferably 2-8mm at the point furthest from the connection opening 1.

Fig. 6 shows a side view of the nozzle device of fig. 4 and 5 in partial section taken along section line a-a' in fig. 4. As can be seen from fig. 6, the first distribution apertures 9 are arranged in a row formed centrally in the nozzle, with respect to the conveying direction 18. As already described on the basis of the embodiment of fig. 1-3, however, the second dispensing apertures 7 are arranged offset to the direction of the inlet area. Thereby, as described above, an advantageous multiple deflection of the liquid flow is created. As shown in fig. 6, the second dispensing opening 7 and the first dispensing opening 9 are dispensing apertures having a circular cross-section. In this embodiment the second dispensing opening 7 has the same diameter as the first dispensing opening 9. It is also advantageous to design the second dispensing opening 7 with a different diameter than the diameter of the first dispensing opening 9. It is also advantageous if the first dispensing openings 9 and the second dispensing openings 7 have in each case a different diameter or a different distance separation from one another.

Very good results were obtained in several tests with conductive films of different thickness by the latter embodiment of the nozzle arrangement. It has been found that once the printed circuit film is picked up by suction, the transport speed of the conductive film is significantly increased by the negative pressure. No damage is caused to the printed circuit film regardless of the high transfer speed. By the additional use of conveyor rollers, it has been found that even bent printed circuit films can be stretched into the nozzle arrangement by the suction effect and travel through the nozzle arrangement on a predetermined conveying path without being damaged or blocked.

It is to be noted that by implementing only a part of the measures described so far or a part of the features of the nozzle device, a sufficiently uniform supply and suction effect of the treatment liquid for this particular application can already be achieved, so that the material to be treated can be reliably guided through the nozzle device during the chemical treatment.

It is of course also conceivable to couple the figures without departing from the basic principle of the invention

Various modifications of the embodiments.

Thereby, for example, the connection opening 1 may be arranged in the center of the housing 2 with respect to the width direction of the nozzle device, whereby the supply of the treatment liquid is performed in the center. In this variant, the passage section of the liquid passage 6 in the interior of the housing 2 will decrease from the middle of the connecting aperture 1 towards both ends (i.e. both sides) of the nozzle device, and the thickness of the insert member 3 or insert member 3a will increase from the middle of the connecting aperture 1 towards both ends, whereby the length of the dispensing aperture 9 in the insert member 3a increases in the direction towards both sides.

Furthermore, in the embodiment shown, a continuous reduction of the passage cross section of the liquid channel 6 is achieved by a separate increase of the respective height of the insert element 3 or of the insert element 3 a. It is of course also conceivable that several side walls of the liquid channel 6 have a wall thickness which increases in the width direction of the nozzle. Furthermore, the deflecting channel 5 for further pressure distribution can also be dispensed with for less demanding situations.

In order to improve the uniformity of the flow rate, the slot-shaped nozzle opening 8 can also be provided with a variable width, whereby the width, starting from the connecting opening 1, can decrease in particular in the width direction of the nozzle.

As already described, the dispensing opening 7 or 9 can also be designed with different diameters, whereby, in particular, for achieving a continuously increasing flow resistance, it is conceivable to reduce the diameter of the dispensing opening 7 or 9 accordingly.

These openings can also be provided with countersinks having a larger diameter at the side of the dispensing opening 7 or 9, respectively, which delimits the liquid channel 6. In order to obtain a continuously increasing flow resistance in the width direction of the nozzle, these countersinks may be provided with different depths, in particular with a continuously increasing depth in the width direction of the nozzle.

It is also possible to vary the distance separation between the dispensing openings in such a way that the dispensing openings close to the connecting opening 1 have a smaller distance separation than those dispensing opening connecting openings remote from the connecting opening 1.

For example, the support member 4 shown in the figures may also be omitted if not, for example by using a thicker housing wall. It is likewise conceivable for the insert element 3 or the insert element 3a and the housing 2 to be designed in one piece. Finally, in the embodiment shown, it is necessary to take into account the fact that only one slot-shaped nozzle opening 8 is actually provided so as to extend in the width direction of the nozzle, but it is also possible to use several slots arranged in the width direction of the nozzle, for example at uniform distance intervals from one another. Round openings arranged one after the other can also be used if appropriate.

By the oblique arrangement of the nozzles and the correspondingly modified respective opposing surfaces, a treatment channel with a wedge-shaped arrangement can be created between the nozzles and the material 10 to be treated or a funnel-shaped course of the treatment channel can be created between two nozzles, respectively. In particular, in this case, an asymmetrical arrangement of the upper and lower nozzles is also advantageous.

Fig. 7 shows a further exemplary embodiment of a nozzle arrangement according to the invention, which substantially corresponds to the exemplary embodiment described with reference to fig. 1A. Similar components are given the same reference numerals. But unlike fig. 1A, the nozzle opening 8 is designed in an adjustable manner. The distribution opening 7 extends obliquely with respect to the conveying direction 18 from the liquid channel 6 in the direction of the inlet region 15 of the nozzle device. The dispensing apertures 7 have a distance spacing which varies in the width direction of the nozzle arrangement, the greater the width the further away from the connecting aperture 1.

The nozzle rail 20 is arranged in an adjustable manner on the front housing wall of the housing 2. The nozzle rail 20 extends along the front housing wall initially in a direction perpendicular to the plane of movement of the material 10 to be treated, in order then to transition to a front edge region turned in the conveying direction. The inner surface of the front edge region of the nozzle rail 20 is opposite to the dispensing opening 7, while the outer surface of the front edge region forms the front edge of the inlet region 15 of the nozzle device and faces the material to be treated 10. The nozzle opening 8 is thereby delimited by the nozzle rail 20 and the housing wall.

The nozzle rail 20 is adjustably attached to the housing wall. In particular, the nozzle rail 20 can be displaced in a direction perpendicular to the conveying plane by means of an adjusting screw 21. The adjustable device can be ensured, for example, by a longitudinal bore in the nozzle rail 20, through which a setting screw 21 is introduced. In this way, the nozzle rail 20 can be fixed in a new position by releasing the adjusting screw 21, moving the nozzle rail 20 and subsequently by tightening the adjusting screw, whereby on the one hand the cross section of the nozzle opening 8 and on the other hand the distance between the outer surface of the front edge region and the conveying plane of the material to be treated 10 can be changed. Accordingly, by means of the nozzle rail 20, the cross-section of the nozzle opening 8 and the cross-section of the treatment channel in the inlet region 15 can be adjusted. Other embodiments of adjustable attachment of the nozzle rail 20 are of course also conceivable. For example, the housing wall on which the nozzle rail 20 is located may extend obliquely with respect to the conveying plane.

Furthermore, the nozzle rail 20 may also be shaped differently. This relates in particular to the front edge region turning in the conveying direction 18 of the material 10 to be treated. Accordingly, different curvatures may be provided for the leading edge region. By the inclined arrangement of the nozzle rail 20, a substantially unbent shape of the nozzle rail 20 is also conceivable.

Preferably, different types of nozzle rail 20 are provided for different types of material to be treated and different treatment requirements, which can be fitted in an exchangeable manner on the housing 2 of the nozzle device. In this way, the accuracy and flexibility of the adjustment of the nozzle device with respect to the respective requirements is increased.

As in fig. 1A, the nozzle devices are arranged on both sides with respect to the conveying plane of the material to be treated. In particular, this means that one nozzle is arranged above the conveying plane and one nozzle is arranged below the conveying plane. However, according to fig. 1B, the nozzle arrangement may comprise only one nozzle arranged on one side of the material to be treated. Furthermore, the nozzle device in fig. 7 may also be provided with an insert strip as described on the basis of fig. 4. In this case, the nozzle opening 8 is delimited by the edge of the nozzle rail 20 and the insert strip 12.

If the nozzle device is arranged on only one side of the conveying plane, the material to be treated can additionally be supported on the opposite side, for example by means of rollers, wheels, or guide rails or the like. The underpressure on the side of the material to be treated makes it possible to perform a good flushing even through the smallest through-hole in the material to be treated.

Fig. 8 shows a nozzle arrangement according to another embodiment of the invention. Components corresponding to those in fig. 1-7 are given the same reference numerals. The nozzle arrangement in fig. 8 corresponds to the embodiment described on the basis of fig. 7, but in this case the nozzles all have an additional nozzle opening 22 which is designed to eject the treatment liquid in a direction substantially perpendicular to the transport plane of the material 10 to be treated. The additional nozzle openings 22 enhance the flow of the treatment liquid through the holes (e.g. through holes or blind holes) in the material to be treated. In this way, more efficient processing of the material 10 to be processed can be achieved in the region of the holes formed therein.

In fig. 8, additional nozzle openings 22 are arranged in the upper and lower nozzles opposite to each other. Such a configuration is advantageous, for example, for the processing of blind holes. Alternatively, however, the additional nozzle openings 22 can also be arranged offset from one another, which is advantageous if a continuous flow through the through-holes in the material 10 to be treated is intended to be produced.

With the nozzle arrangement shown in fig. 8, the treatment liquid is supplied via the liquid channel 6 to the additional nozzle opening 22, which also serves to supply the treatment liquid to the nozzle opening 8. Alternatively, separate treatment liquid delivery may be provided for additional nozzle openings 22. For this purpose, the liquid channel 6 can be divided into two separate grooves, for example, by a partition wall (not shown here). Furthermore, other means may be provided for adjusting or controlling the flow of the treatment liquid through the additional nozzle openings 22 independently of the flow of the treatment liquid through the nozzle openings 8. For the separate supply of the treatment liquid to the additional nozzle openings 22, in particular separate supply devices or supply pumps can also be provided.

The nozzle arrangement in fig. 8 has a symmetrical configuration such that the nozzles are located below and below the conveying plane of the material 10 to be treated, whereby the nozzles are designed mirror-symmetrically with respect to the conveying plane. However, as already described, it is not absolutely necessary to design the nozzle device symmetrically with respect to the conveying plane. For example, as in the case of the embodiment of fig. 9.

Fig. 9 shows a nozzle arrangement consisting of two nozzles arranged on both sides with respect to the conveying plane of the material 10 to be treated and having a different configuration. Components corresponding to those in fig. 1-8 are again given the same reference numerals. The nozzles arranged below the conveying plane correspond to the configuration thereof represented in fig. 7. However, the nozzles arranged above the conveying plane of the material 10 to be treated have a different structure. In particular, it differs from nozzles arranged below the conveying plane in that: it is provided with only one nozzle opening 23, which nozzle opening 23 sprays the treatment liquid substantially perpendicularly to the conveying plane of the material 10 to be treated. Therefore, a negative pressure can be generated on the side of the conveying plane where the processing liquid appears substantially vertically. In particular for thin materials to be treated, additional guide elements or support wheels, which are not shown in the figures, can be positioned on the conveying plane side by means of underpressure. Thus, the transport of the material to be treated 10 can be supported effectively, while the design of the nozzle openings 23 of the nozzles arranged above the transport plane is also more flexible and it can be adjusted to suit the specific requirements in the surface against which the material to be treated 10 is to be treated. Thus, overall, a higher degree of flexibility is obtained for the design of the nozzle device according to the invention.

Furthermore, it is also possible to arrange a guide element for the inlet region or the outlet region of the nozzle device in fig. 1 to 9, which guide element on the one hand serves to reduce or avoid turbulence in the treatment liquid and on the other hand it can also provide a guide function for the material 10 to be treated. The guide elements can be designed, for example, in the form of webs or projections on the surface of the nozzle housing facing the material 10 to be treated. The webs may be aligned parallel to the direction of movement 18, but may also be offset from this direction to ensure proper guidance of the flow of the treatment liquid. In particular, in the outlet region 16, where the treatment channel is normally expanded, it is advantageous to design the guiding element in such a way that it defines a transfer channel (which) with a cross-section that is smaller than the cross-section of the treatment channel. Accordingly, the movement of the material to be treated is limited to a relatively small area perpendicular to the conveying plane, while providing additional space for the flow of treatment liquid between the guide elements. Due to the arrangement of the guiding elements, an improved guidance of the material 10 to be treated can be achieved in particular in the outlet region 16 of the nozzle device. The guide member may also comprise a wheel or roller.

The guide elements can also be combined with rollers or wheels, whereby the guide elements can be designed comb-like and the wheels are arranged between the connecting plates of the comb-like structure. Furthermore, it is also possible to provide the wheels or rollers with indentations to protrude at the ends between the connecting plates of the comb-like structure. These measures are well suited to improve the guidance of the material to be treated 10 in the inlet region 15 and in particular in the outlet region 16. This is particularly advantageous if the material to be treated 10 is a thin film material that is easily deflected out of its plane of conveyance.

The nozzle arrangements described on the basis of fig. 1 to 9 involve in each case the transport of the treatment liquid from the nozzle arrangement onto the material 10 to be treated. However, if the conveying direction of the material to be treated 10 or the arrangement of the nozzles is reversed, the nozzle device is used in a similar manner for removing the treatment liquid from the material to be treated 10 into the nozzle device by suction. In particular, it is advantageous if during the treatment, decomposition products are produced or solids are carried over. By sucking the treatment liquid into the nozzle arrangement, the decomposition products or solids are brought in the fastest way, for example to a regeneration unit or filter where the solids are removed. Thus, damage to the treatment results due to these substances can be almost completely eliminated.

Further, although the embodiments described herein relate to a nozzle device that treats a material to be treated with a treatment liquid, the present invention is not limited thereto. Rather, the nozzle arrangement according to the invention is also well suited for use with gaseous treatment media or mixtures of liquid and gaseous treatment media. Thus, for example, hot air may be used to dry a thin and flexible material to be treated, or a gas-liquid mixture as a treatment medium for humidification (for protection from spot or stain formation). Furthermore, the nozzle device according to the invention is also well suited for treatment with other gases which play a chemical role on the surface of the material to be treated, because of the uniform distribution of the treatment medium.

By means of the nozzle device described, it is possible to convey the treatment medium not only horizontally, but also vertically. In this case, in order to achieve a uniform control of the convection, the measured pressure difference at the vertically positioned nozzles has to be taken care of for the flow distribution through the distribution apertures and the adjustable nozzle tracks. It is therefore also possible to use a conventional "vertical system" in which the plates are lowered individually into different treatment tanks or mounted one after the other in a rack. In this case, the suction effect in the region of the inlet and other advantages of the nozzle can be utilized.

In the case of a gaseous treatment medium, it is advantageous to arrange the nozzle device in the gaseous medium (e.g. gaseous treatment medium).

It is of course also possible to combine the nozzle arrangements described herein on the basis of fig. 1-9 with each other. In particular, several nozzle devices may be arranged in series along the transport path of the material to be treated. These nozzle arrangements preferably define complementary treatment zones.

For example, a treatment zone may be designed for suction removal of dust particles from nozzle arrangements on one or both sides. The other process zone may be designed to draw the stripping gas from blind holes on one or both sides by the negative pressure caused by the flow. A further treatment zone may be designed for flushing through holes, i.e. as described above, a positive pressure may be generated on one side of the material to be treated and a negative pressure on the other side of the material to be treated.

It is of course also possible to form several treatment zones in one nozzle device.

It is also preferable for the flow of the treatment medium that the amount of treatment medium delivered to the nozzle opening or nozzle arrangement per time unit and the pressure of the treatment medium can be controlled or adjusted as a function of the properties of the material to be treated. In this case, in particular, the thickness of the material to be treated, the presence of blind or through holes or bores and the degree of dust contamination can also all be taken into account.

In this case, the flow and/or pressure of the treatment medium of several nozzle rows in the nozzle device is controlled or adjusted individually in such a way that the transverse direction of the material to be treated is prevented from deflecting from the transport path.

List of reference numerals

1 connecting opening

2 casing

3, 3a insert member

4 support

5 deflecting channel

6 liquid channel

7 dispensing orifice

8 nozzle opening

9 dispensing opening

10 materials to be treated

11, 11' liquid path

12 insert strip

13 casing cover

14 sealing ring

15 inlet area

16 outlet area

17 angle

18 direction of conveyance

19 liquid path

20 nozzle rail

21 adjusting screw

22 additional nozzle openings

Claims

1. A nozzle device for treating a material to be treated with a treatment medium, wherein the material (10) to be treated can be transported in a transport direction (18) within a treatment channel in a transport plane from an inlet region (15) to an outlet region (16) of the nozzle device,

providing at least one nozzle opening (8) which is designed in such a way that a flow of treatment medium through the nozzle opening (8) runs obliquely at a predetermined angle relative to a conveying plane of the material to be treated (10) in order to deflect the flow of treatment medium into a conveying direction (18) of the material to be treated (10),

wherein the nozzle device is designed for the treatment of a thin-film type material to be treated, and

wherein the cross-section of the treatment channel widens in the delivery direction (18) in the outlet region (16) of the nozzle device, or the outlet region (16) is provided with a guide element for improving the guidance of a film-type material (10) to be treated, or the at least one nozzle opening (8) is designed in the form of a groove.

2. A nozzle arrangement as claimed in claim 1, wherein

The at least one nozzle opening (8) is formed by at least one nozzle opening channel extending at an acute angle (17) relative to the transport plane of the material to be treated (10).

3. A nozzle arrangement as claimed in claim 2, wherein

The angle (17) is at most 80 degrees.

4. A nozzle arrangement as claimed in claim 2, wherein

The at least one nozzle opening (8) is designed to eject the treatment medium, and the angle (17) opens in a conveying direction (18) of the material to be treated (10).

5. A nozzle arrangement as claimed in claim 4, wherein

The at least one nozzle aperture (8) is arranged in a housing wall extending substantially along the conveying plane in such a way that a distance between the at least one nozzle aperture (8) and the inlet area (15) is smaller than a distance between the at least one nozzle aperture (8) and the outlet area (16).

6. A nozzle arrangement as claimed in claim 2, wherein

The at least one nozzle opening (8) is designed to receive the treatment medium, and the angle (17) opens in a conveying direction (18) of the material (10) to be treated.

7. A nozzle arrangement as claimed in claim 6, wherein

The at least one nozzle aperture (8) is arranged in a housing wall extending substantially along the conveying plane in such a way that a distance between the at least one nozzle aperture (8) and the outlet area (16) is smaller than a distance between the at least one nozzle aperture (8) and the inlet area (15).

8. A nozzle arrangement as claimed in claim 1, wherein

The nozzle device is designed such that the distance between the housing wall of the nozzle device and the conveying plane decreases in the conveying direction of the material to be treated (10) in a section between the inlet area (15) and the at least one nozzle bore (8), so that a channel which opens in the direction of the inlet area (15) in a wedge-shaped manner in this section is formed between the housing wall and the conveying plane.

9. A nozzle arrangement as claimed in claim 1, wherein

The nozzle device is designed such that the distance between a housing wall of the nozzle device and the conveying plane increases in the conveying direction (18) of the material to be treated (10) in a section between the at least one nozzle opening (8) and the outlet region, so that a channel which opens in the direction of the outlet region (16) in the section in the shape of a wedge is formed between the housing wall and the conveying plane.

10. A nozzle arrangement as claimed in any preceding claim, wherein

The at least one nozzle opening (8) extends along the conveying plane over a width in a direction perpendicular to the conveying direction (18).

11. A nozzle arrangement as claimed in claim 1, wherein

The slot is formed by a housing wall of the nozzle arrangement and a removable strip (12).

12. A nozzle arrangement as claimed in claim 11, wherein

The slot is delimited on at least one side by a nozzle rail (20) which is adjustably located on a housing wall of the nozzle device.

13. A nozzle arrangement as claimed in claim 12, wherein

The nozzle rail (20) is exchangeable in order to be able to select different nozzle opening geometries.

14. A nozzle arrangement as claimed in claim 12, wherein

The nozzle track (20) defines a front edge of the nozzle arrangement at the inlet region (15).

15. A nozzle arrangement as claimed in claim 10, wherein

The at least one nozzle opening (8) comprises a number of openings arranged at a distance from each other perpendicular to the conveying direction (18) and parallel to the conveying plane.

16. A nozzle arrangement as claimed in claim 10, wherein

The nozzle arrangement comprises a medium channel (6) extending along the at least one nozzle opening (8) for the transport of the treatment medium, which medium channel is connected to the at least one nozzle opening (8) by means of distribution openings (7, 9), which distribution openings (7, 9) are arranged spaced apart from each other along the at least one nozzle opening (8).

17. A nozzle arrangement as claimed in claim 16, wherein

The media channel (6) is designed in such a way that the passage cross section of the media channel (6) decreases with increasing distance from a connecting opening (1), which connecting opening (1) is provided for the corresponding transport or removal of the treatment medium.

18. A nozzle arrangement as claimed in claim 17, wherein

The nozzle arrangement comprises an insert element (3, 3a) arranged in the medium channel (6), the amount of displacement of which increases with increasing distance separation from the connection opening (1).

19. A nozzle arrangement as claimed in claim 16, wherein

The at least one nozzle opening (8) is formed by at least one nozzle opening channel which extends at an acute angle (17) relative to the conveying plane of the material (10) to be treated and

the dispensing opening (7) is formed by a dispensing channel arranged at an angle relative to the conveying plane of the material to be treated (10) which is larger than the angle (17) of the nozzle opening channel relative to the conveying plane.

20. A nozzle arrangement as claimed in claim 16, wherein

The dispensing opening (9) is offset in relation to the at least one nozzle opening (8) in a conveying direction (18) of the material to be treated (10).

21. A nozzle arrangement as claimed in claim 1, wherein

The nozzle arrangement comprises at least one further nozzle opening (8) arranged on a side of the conveying plane of the material to be treated (10) opposite to the at least one nozzle opening (8).

22. A nozzle arrangement as claimed in claim 21, wherein

The nozzle device is designed to be substantially mirror-symmetrical with respect to the conveying plane of the material (10) to be treated.

23. A nozzle arrangement as claimed in claim 1, wherein

The nozzle arrangement comprises additional nozzle openings (22, 23) which are designed to eject the treatment medium substantially perpendicularly to the conveying plane of the material (10) to be treated.

24. A nozzle arrangement as claimed in claim 1, wherein

The nozzle device is designed for use in a device for the wet-chemical treatment of printed circuit boards or printed circuit films as material (10) to be treated.

25. A nozzle arrangement as claimed in claim 1, wherein

The process channel has a shape such that a negative pressure is generated in a defined area of the process channel.

26. A nozzle arrangement as claimed in claim 1, wherein

The nozzle device is designed to produce a suction effect in the conveying direction (18) at the inlet area (15).

27. A nozzle arrangement as claimed in claim 1, wherein

The treatment channel is formed between a wall of the housing (2) on which the at least one nozzle opening (8) is arranged and the material (10) to be treated.

28. A nozzle arrangement as claimed in claim 1, wherein

In the inlet region (15), the front edge of the nozzle device is chamfered or rounded.

29. A nozzle arrangement as claimed in claim 1, wherein

The treatment channel is designed to generate a negative pressure in a defined area of the treatment channel.

30. An apparatus for the wet-chemical treatment of printed circuit boards or printed circuit films,

wherein the material (10) to be treated can be transported in a transport plane in a transport direction (18) within the treatment channel from an inlet region (15) to an outlet region (16) of the nozzle device,

wherein at least one nozzle opening (8) is provided, which is designed in such a way that a flow of a treatment medium through the nozzle opening (8) runs obliquely at a predetermined angle relative to a transport plane of the material to be treated (10) in order to deflect the flow of the treatment medium into a transport direction (18) of the material to be treated (10),

31. A method for treating a material to be treated with a treatment medium, wherein the material (10) to be treated is moved in a conveying direction (18) within a treatment channel in a conveying plane from an inlet region (15) to an outlet region (16) of a nozzle device,

wherein the flow of the treatment medium is deflected into a conveying direction (18) of the material (10) to be treated, wherein the flow of the treatment medium is ejected or received by a nozzle opening (8) of the nozzle device, and

wherein the material to be treated is a thin film type material to be treated,

wherein the cross-section of the treatment channel widens in the outlet region (16) of the nozzle device in the conveying direction (18), or the outlet region (16) is provided with a guide element for improving the guidance of a film-type material (10) to be treated, or the at least one nozzle opening (8) is designed in the form of a groove.

32. The method of claim 31, wherein

Ejecting or receiving the treatment medium at a predetermined acute angle of 1 to 30 degrees with respect to a conveyance plane of the material (10) to be treated.

33. The method of claim 32, wherein

The angle (17) is at most 80 degrees.

34. The method of claim 31, wherein

The method comprises the following steps:

changing the shape of the nozzle device to specifically create a negative pressure within at least one defined region of a process channel of the nozzle device.

35. The method of claim 34, wherein

The negative pressure is generated in an inlet region (15) of the nozzle device to suck the treatment medium from around the inlet region (15).

36. The method of claim 31, wherein

The method comprises the following steps:

changing the shape of the nozzle arrangement to adjust the flow rate of the treatment medium.

37. The method of claim 31, wherein

The method comprises the following steps:

the shape of the nozzle device and the position of the nozzle opening (8) and of at least one additional nozzle opening (22; 23) are changed in such a way that a negative pressure is generated on one side of the material to be treated and a positive pressure is generated on the opposite side in a specific region of the nozzle device.

38. The method of claim 31, wherein

The method comprises the following steps:

controlling the flow of treatment medium supplied to the nozzle arrangement.

39. The method of claim 31, wherein

The method comprises the following steps:

controlling the pressure of the treatment medium supplied to the nozzle arrangement.

40. The method of claim 31, wherein

The method comprises the following steps:

a suction effect is generated at the inlet area (15) in the conveying direction (18).

41. The method of claim 31, wherein

The treatment channel is formed between a wall of a housing (2) and the material to be treated, wherein the nozzle opening (8) is arranged in the wall of the housing.

42. The method of claim 31, wherein