GB9506676D0 - Plasma sources - Google Patents

Plasma sources

Info

Publication number: GB9506676D0
Authority: GB; United Kingdom
Prior art keywords: plasma sources; plasma; sources
Prior art date: 1995-03-31
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Pending

Application number

GBGB9506676.7A

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Applied Vision Ltd

Original Assignee

Applied Vision Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1995-03-31

Filing date

1995-03-31

Publication date

1995-05-24

1995-03-31 Application filed by Applied Vision Ltd filed Critical Applied Vision Ltd

1995-03-31 Priority to GBGB9506676.7A priority Critical patent/GB9506676D0/en

1995-05-24 Publication of GB9506676D0 publication Critical patent/GB9506676D0/en

1996-03-14 Priority to PCT/GB1996/000576 priority patent/WO1996030928A1/en

1996-03-14 Priority to AU50091/96A priority patent/AU5009196A/en

1996-03-14 Priority to EP96906828A priority patent/EP0818053A1/en

Status Pending legal-status Critical Current

Links

GBGB9506676.7A 1995-03-31 1995-03-31 Plasma sources Pending GB9506676D0 (en)

Priority Applications (4)

Application Number	Priority Date	Filing Date	Title
GBGB9506676.7A GB9506676D0 (en)	1995-03-31	1995-03-31	Plasma sources
PCT/GB1996/000576 WO1996030928A1 (en)	1995-03-31	1996-03-14	Plasma source
AU50091/96A AU5009196A (en)	1995-03-31	1996-03-14	Plasma source
EP96906828A EP0818053A1 (en)	1995-03-31	1996-03-14	Plasma source

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
GBGB9506676.7A GB9506676D0 (en)	1995-03-31	1995-03-31	Plasma sources

Publications (1)

Publication Number	Publication Date
GB9506676D0 true GB9506676D0 (en)	1995-05-24

Family

ID=10772261

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
GBGB9506676.7A Pending GB9506676D0 (en)	1995-03-31	1995-03-31	Plasma sources

Country Status (4)

Country	Link
EP (1)	EP0818053A1 (en)
AU (1)	AU5009196A (en)
GB (1)	GB9506676D0 (en)
WO (1)	WO1996030928A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
US6710524B2 (en)	2000-04-11	2004-03-23	Satis Vacuum Industries Vertrieb Ag	Plasma source

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB8622820D0 (en) *	1986-09-23	1986-10-29	Nordiko Ltd	Electrode assembly & apparatus
JPS6444019A (en) *	1987-08-12	1989-02-16	Hitachi Ltd	Dry etching apparatus
JPH01188678A (en) *	1988-01-22	1989-07-27	Mitsubishi Electric Corp	Plasma vapor phase growth equipment
GB8905075D0 (en) *	1989-03-06	1989-04-19	Nordiko Ltd	Electrode assembly and apparatus
DE4017112A1 (en) *	1990-05-28	1991-12-05	Hauzer Holding	Control method for plasma discharge coating - uses unbalanced magnetron cathode and discharge voltage regulation by field coil current
DE4136655C2 (en) *	1990-12-31	2001-05-17	Leybold Ag	Device for reactive coating of a substrate
US5203977A (en) *	1991-03-11	1993-04-20	Regents Of The University Of California	Magnetron sputtered boron films and TI/B multilayer structures
JPH0720282A (en) *	1993-07-06	1995-01-24	Ishikawajima Harima Heavy Ind Co Ltd	Anticorrosion method for metal container and corrosion resistant container

1995
- 1995-03-31 GB GBGB9506676.7A patent/GB9506676D0/en active Pending
1996
- 1996-03-14 WO PCT/GB1996/000576 patent/WO1996030928A1/en not_active Ceased
- 1996-03-14 AU AU50091/96A patent/AU5009196A/en not_active Abandoned
- 1996-03-14 EP EP96906828A patent/EP0818053A1/en not_active Withdrawn

Also Published As

Publication number	Publication date
WO1996030928A1 (en)	1996-10-03
EP0818053A1 (en)	1998-01-14
AU5009196A (en)	1996-10-16

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