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GB911416A - Apparatus for securing a rod of semi-conductor material in equipment for crucible-free zone-by-zone melting - Google Patents

Apparatus for securing a rod of semi-conductor material in equipment for crucible-free zone-by-zone melting

Info

Publication number
GB911416A
GB911416A GB144/61A GB14461A GB911416A GB 911416 A GB911416 A GB 911416A GB 144/61 A GB144/61 A GB 144/61A GB 14461 A GB14461 A GB 14461A GB 911416 A GB911416 A GB 911416A
Authority
GB
United Kingdom
Prior art keywords
rod
pins
carrier member
semi
zone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB144/61A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens Schuckertwerke AG
Siemens Corp
Original Assignee
Siemens Schuckertwerke AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Schuckertwerke AG, Siemens Corp filed Critical Siemens Schuckertwerke AG
Publication of GB911416A publication Critical patent/GB911416A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • C30B13/285—Crystal holders, e.g. chucks
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/28—Controlling or regulating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10S117/911—Seed or rod holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00—Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10—Apparatus
    • Y10T117/1024—Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076—Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/17—Socket type
    • Y10T279/17213—Transversely oscillating jaws
    • Y10T279/17222—Screw actuated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/18—Pivoted jaw
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T279/00—Chucks or sockets
    • Y10T279/26—Chucks or sockets with centering means

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Furnace Details (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Crucibles And Fluidized-Bed Furnaces (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)

Abstract

<PICT:0911416/III/1> <PICT:0911416/III/2> Apparatus for securing a rod of semi-conductor material in equipment for crucible-free zone-by-zone melting comprises six pins 4 of a material which has a high melting point and which does not diffuse into the semi-conductor material, the pins being arranged in two sets of three and pivotally mounted in a hollow carrier member 2 which in the use of the apparatus is to have the rod 5 co-axially within it, means 6 being provided to hold the pins against the semi-conductor rod, the arrangement being such that in the use of the apparatus the pins bear resiliently against the rod one set of pins touching the rod at three contact points in one plane which are equally spaced around the periphery of the rod and the other set of pins touching the rod at three contact points in another plane which are equally spaced around the periphery said planes being perpendicular to the axis of the carrier member. As shown the pins 4 are rigidly secured to pivoted arms 3 and the means 6 are screws which are threaded into the carrier member 2. The pins are made of molybdenum and the remainder of the apparatus is made of a high alloy steel containing about 90% chromium and about 9% nickel to give low thermal conductivity. Recesses 7 are provided in the carrier member to introduce additional thermal resistance between the rods and the device 9 upon which the carrier member 2 is mounted. The carrier member is clamped to the device 9 by a jaw 10 which is urged into contact with a pin 8 of a screw 11.
GB144/61A 1959-12-31 1961-01-02 Apparatus for securing a rod of semi-conductor material in equipment for crucible-free zone-by-zone melting Expired GB911416A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES66491A DE1114171B (en) 1959-12-31 1959-12-31 Holder for rod-shaped semiconductor material in devices for crucible-free zone melting

Publications (1)

Publication Number Publication Date
GB911416A true GB911416A (en) 1962-11-28

Family

ID=7498855

Family Applications (1)

Application Number Title Priority Date Filing Date
GB144/61A Expired GB911416A (en) 1959-12-31 1961-01-02 Apparatus for securing a rod of semi-conductor material in equipment for crucible-free zone-by-zone melting

Country Status (4)

Country Link
US (1) US3191924A (en)
CH (1) CH380960A (en)
DE (1) DE1114171B (en)
GB (1) GB911416A (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1265708B (en) * 1965-11-30 1968-04-11 Siemens Ag Device for crucible-free zone melting
US3494742A (en) * 1968-12-23 1970-02-10 Western Electric Co Apparatus for float zone melting fusible material
DE2322969C3 (en) * 1973-05-07 1980-10-16 Siemens Ag, 1000 Berlin Und 8000 Muenchen Device for holding the rod ends during crucible-free zone melting
DE2529366A1 (en) * 1975-07-01 1977-01-20 Wacker Chemitronic DEVICE FOR SUPPORTING A CRYSTALLINE ROD
US4589667A (en) * 1984-10-16 1986-05-20 Hewlett-Packard Company Vacuum compatible colleting spindle
JP2617258B2 (en) * 1991-11-28 1997-06-04 信越半導体株式会社 Silicon polycrystalline rod weight holder
JP3402038B2 (en) * 1995-12-25 2003-04-28 信越半導体株式会社 Single crystal pulling device
JP3874883B2 (en) * 1997-03-26 2007-01-31 コマツ電子金属株式会社 Single crystal pulling apparatus and pulling method
US8840723B2 (en) * 2009-03-10 2014-09-23 Mitsubishi Materials Corporation Manufacturing apparatus of polycrystalline silicon
DE202010002486U1 (en) * 2009-03-31 2010-06-10 Centrotherm Sitec Gmbh Clamping and contacting device for silicon thin rods
RU2434082C2 (en) * 2009-12-28 2011-11-20 Федеральное Государственное Унитарное Предприятие "Всероссийский научно-исследовательский институт токов высокой частоты им. В.П. Вологдина" (ФГУП ВНИИТВЧ им. В.П. Вологдина) Unit for fastening heated element on rod in pressure tight chamber
DE102014213628B3 (en) * 2014-07-14 2015-10-22 Wacker Chemie Ag Holder for seed crystals and silicon rods and method for producing a monocrystalline silicon rod

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BE471438A (en) * 1946-04-04
US2667356A (en) * 1952-03-29 1954-01-26 Cons Machine Tool Corp Hydraulic chuck
BE525102A (en) * 1952-12-17 1900-01-01
DE1061527B (en) * 1953-02-14 1959-07-16 Siemens Ag Process for zone-wise remelting of rods and other elongated workpieces
US2972525A (en) * 1953-02-26 1961-02-21 Siemens Ag Crucible-free zone melting method and apparatus for producing and processing a rod-shaped body of crystalline substance, particularly semiconductor substance
US2750715A (en) * 1953-04-21 1956-06-19 Roy A Farnam Steady rest and indicator gauge assembly for shaft grinder

Also Published As

Publication number Publication date
US3191924A (en) 1965-06-29
DE1114171B (en) 1961-09-28
CH380960A (en) 1964-08-15

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