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GB2498768B - Gas transfer vacuum pump - Google Patents

Gas transfer vacuum pump

Info

Publication number
GB2498768B
GB2498768B GB1201380.1A GB201201380A GB2498768B GB 2498768 B GB2498768 B GB 2498768B GB 201201380 A GB201201380 A GB 201201380A GB 2498768 B GB2498768 B GB 2498768B
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
gas transfer
transfer vacuum
gas
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB1201380.1A
Other versions
GB2498768A (en
GB201201380D0 (en
Inventor
Paul Schofield Nigel
David Stones Ian
Dowdeswell Stephen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1201380.1A priority Critical patent/GB2498768B/en
Priority to GB1202698.5A priority patent/GB2498816A/en
Publication of GB201201380D0 publication Critical patent/GB201201380D0/en
Priority to EP13702095.4A priority patent/EP2807377B1/en
Priority to PCT/GB2013/050149 priority patent/WO2013110936A2/en
Priority to CN201380006640.7A priority patent/CN104066999B/en
Priority to KR1020147020868A priority patent/KR102098412B1/en
Priority to JP2014553801A priority patent/JP6354105B2/en
Priority to US14/374,106 priority patent/US10337517B2/en
Publication of GB2498768A publication Critical patent/GB2498768A/en
Application granted granted Critical
Publication of GB2498768B publication Critical patent/GB2498768B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/38—Blades
    • F04D29/384—Blades characterised by form
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2250/00—Geometry
    • F05D2250/70—Shape

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
GB1201380.1A 2012-01-27 2012-01-27 Gas transfer vacuum pump Active GB2498768B (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
GB1201380.1A GB2498768B (en) 2012-01-27 2012-01-27 Gas transfer vacuum pump
GB1202698.5A GB2498816A (en) 2012-01-27 2012-02-16 Vacuum pump
CN201380006640.7A CN104066999B (en) 2012-01-27 2013-01-24 gas transfer vacuum pump
PCT/GB2013/050149 WO2013110936A2 (en) 2012-01-27 2013-01-24 Gas transfer vacuum pump
EP13702095.4A EP2807377B1 (en) 2012-01-27 2013-01-24 Gas transfer vacuum pump
KR1020147020868A KR102098412B1 (en) 2012-01-27 2013-01-24 Gas transfer vacuum pump
JP2014553801A JP6354105B2 (en) 2012-01-27 2013-01-24 Gas transport vacuum pump
US14/374,106 US10337517B2 (en) 2012-01-27 2013-01-24 Gas transfer vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1201380.1A GB2498768B (en) 2012-01-27 2012-01-27 Gas transfer vacuum pump

Publications (3)

Publication Number Publication Date
GB201201380D0 GB201201380D0 (en) 2012-03-14
GB2498768A GB2498768A (en) 2013-07-31
GB2498768B true GB2498768B (en) 2016-07-27

Family

ID=45876171

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1201380.1A Active GB2498768B (en) 2012-01-27 2012-01-27 Gas transfer vacuum pump

Country Status (1)

Country Link
GB (1) GB2498768B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2568066A (en) * 2017-11-02 2019-05-08 Edwards Ltd Stator blade unit for a turbomolecular pump
GB2590955B (en) * 2020-01-09 2022-06-15 Edwards Ltd Vacuum pump

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB811858A (en) * 1956-02-02 1959-04-15 Pfeiffer Arthur Improvements in or relating to molecular pumps
GB885954A (en) * 1960-03-08 1962-01-03 Arthur Pfeiffer G M B H Improvements in or relating to molecular pumps
EP0568069A2 (en) * 1992-04-29 1993-11-03 Varian Associates, Inc. Turbomolecular vacuum pumps
RU2016256C1 (en) * 1991-06-28 1994-07-15 Товарищество с ограниченной ответственностью фирмы "Томирис" Molecular pump stage
EP0967395A2 (en) * 1998-06-23 1999-12-29 Seiko Seiki Kabushiki Kaisha Turbomolecular pump
US6126391A (en) * 1999-04-01 2000-10-03 Atraghji; Edward Fluid flow machine
US20070243059A1 (en) * 2002-12-19 2007-10-18 Forced Physics Llc Techniques for movement through gas or liquid or liquid without a velocity boundary layer
WO2009109020A1 (en) * 2008-03-06 2009-09-11 Heraldo Da Silva Couto Hybrid tesla-pelton wheel disc turbine

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB811858A (en) * 1956-02-02 1959-04-15 Pfeiffer Arthur Improvements in or relating to molecular pumps
GB885954A (en) * 1960-03-08 1962-01-03 Arthur Pfeiffer G M B H Improvements in or relating to molecular pumps
RU2016256C1 (en) * 1991-06-28 1994-07-15 Товарищество с ограниченной ответственностью фирмы "Томирис" Molecular pump stage
EP0568069A2 (en) * 1992-04-29 1993-11-03 Varian Associates, Inc. Turbomolecular vacuum pumps
EP0967395A2 (en) * 1998-06-23 1999-12-29 Seiko Seiki Kabushiki Kaisha Turbomolecular pump
US6126391A (en) * 1999-04-01 2000-10-03 Atraghji; Edward Fluid flow machine
US20070243059A1 (en) * 2002-12-19 2007-10-18 Forced Physics Llc Techniques for movement through gas or liquid or liquid without a velocity boundary layer
WO2009109020A1 (en) * 2008-03-06 2009-09-11 Heraldo Da Silva Couto Hybrid tesla-pelton wheel disc turbine

Also Published As

Publication number Publication date
GB2498768A (en) 2013-07-31
GB201201380D0 (en) 2012-03-14

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