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GB2440341B - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
GB2440341B
GB2440341B GB0614616A GB0614616A GB2440341B GB 2440341 B GB2440341 B GB 2440341B GB 0614616 A GB0614616 A GB 0614616A GB 0614616 A GB0614616 A GB 0614616A GB 2440341 B GB2440341 B GB 2440341B
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
GB0614616A
Other versions
GB2440341A (en
GB0614616D0 (en
Inventor
David Paul Manson
Tristan Richard Ghislain Davenne
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
BOC Group Ltd
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd, Edwards Ltd filed Critical BOC Group Ltd
Priority to GB0614616A priority Critical patent/GB2440341B/en
Publication of GB0614616D0 publication Critical patent/GB0614616D0/en
Publication of GB2440341A publication Critical patent/GB2440341A/en
Application granted granted Critical
Publication of GB2440341B publication Critical patent/GB2440341B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/12—Fluid auxiliary
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2210/00—Fluid
    • F04C2210/22—Fluid gaseous, i.e. compressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/20—Manufacture essentially without removing material
    • F04C2230/21—Manufacture essentially without removing material by casting
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2270/00—Control; Monitoring or safety arrangements
    • F04C2270/70—Safety, emergency conditions or requirements
    • F04C2270/701—Cold start
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
GB0614616A 2006-07-24 2006-07-24 Vacuum pump Active GB2440341B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0614616A GB2440341B (en) 2006-07-24 2006-07-24 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0614616A GB2440341B (en) 2006-07-24 2006-07-24 Vacuum pump

Publications (3)

Publication Number Publication Date
GB0614616D0 GB0614616D0 (en) 2006-08-30
GB2440341A GB2440341A (en) 2008-01-30
GB2440341B true GB2440341B (en) 2011-09-21

Family

ID=36998575

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0614616A Active GB2440341B (en) 2006-07-24 2006-07-24 Vacuum pump

Country Status (1)

Country Link
GB (1) GB2440341B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116428185A (en) * 2023-04-12 2023-07-14 北京通嘉宏瑞科技有限公司 Vacuum pump and gas supply system

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3092879B1 (en) * 2019-02-14 2021-02-19 Pfeiffer Vacuum Dry type primary vacuum pump
GB2597051A (en) * 2020-06-09 2022-01-19 Edwards Ltd Vacuum system apparatus and method
GB2628803B (en) * 2023-04-05 2025-03-26 Edwards Ltd Stator for a vacuum pump

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0365695A1 (en) * 1988-10-24 1990-05-02 Leybold Aktiengesellschaft Positive displacement twin-shaft vacuum pump
US5356275A (en) * 1991-03-04 1994-10-18 Leybold Aktiengesellschaft Device for supplying a multi-stage dry-running vacuum pump with inert gas
JP2004293466A (en) * 2003-03-27 2004-10-21 Aisin Seiki Co Ltd Vacuum pump
US20050092475A1 (en) * 2002-03-20 2005-05-05 Behr Gmbh & Co. Kg Heat exchanger and cooling system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0365695A1 (en) * 1988-10-24 1990-05-02 Leybold Aktiengesellschaft Positive displacement twin-shaft vacuum pump
US5356275A (en) * 1991-03-04 1994-10-18 Leybold Aktiengesellschaft Device for supplying a multi-stage dry-running vacuum pump with inert gas
US20050092475A1 (en) * 2002-03-20 2005-05-05 Behr Gmbh & Co. Kg Heat exchanger and cooling system
JP2004293466A (en) * 2003-03-27 2004-10-21 Aisin Seiki Co Ltd Vacuum pump

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116428185A (en) * 2023-04-12 2023-07-14 北京通嘉宏瑞科技有限公司 Vacuum pump and gas supply system

Also Published As

Publication number Publication date
GB2440341A (en) 2008-01-30
GB0614616D0 (en) 2006-08-30

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Legal Events

Date Code Title Description
COOA Change in applicant's name or ownership of the application

Owner name: EDWARDS LIMITED

Free format text: FORMER APPLICANT(S): BOC GROUP, THE PLC