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GB2339800B - A vacuum process for depositing zinc sulphide and other coatings on flexible moving web - Google Patents

A vacuum process for depositing zinc sulphide and other coatings on flexible moving web

Info

Publication number
GB2339800B
GB2339800B GB9816211A GB9816211A GB2339800B GB 2339800 B GB2339800 B GB 2339800B GB 9816211 A GB9816211 A GB 9816211A GB 9816211 A GB9816211 A GB 9816211A GB 2339800 B GB2339800 B GB 2339800B
Authority
GB
United Kingdom
Prior art keywords
coatings
moving web
zinc sulphide
vacuum process
flexible moving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB9816211A
Other versions
GB2339800A (en
GB9816211D0 (en
Inventor
Nadir Abdul Ghaffor Ahmed
David Christopher Giddings
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Vacuum Equipment Ltd
Original Assignee
General Vacuum Equipment Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Vacuum Equipment Ltd filed Critical General Vacuum Equipment Ltd
Priority to GB9816211A priority Critical patent/GB2339800B/en
Publication of GB9816211D0 publication Critical patent/GB9816211D0/en
Publication of GB2339800A publication Critical patent/GB2339800A/en
Application granted granted Critical
Publication of GB2339800B publication Critical patent/GB2339800B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24Vacuum evaporation
    • C23C14/243Crucibles for source material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54Controlling or regulating the coating process
    • C23C14/542Controlling the film thickness or evaporation rate
    • C23C14/545Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB9816211A 1998-07-24 1998-07-24 A vacuum process for depositing zinc sulphide and other coatings on flexible moving web Expired - Fee Related GB2339800B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB9816211A GB2339800B (en) 1998-07-24 1998-07-24 A vacuum process for depositing zinc sulphide and other coatings on flexible moving web

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB9816211A GB2339800B (en) 1998-07-24 1998-07-24 A vacuum process for depositing zinc sulphide and other coatings on flexible moving web

Publications (3)

Publication Number Publication Date
GB9816211D0 GB9816211D0 (en) 1998-09-23
GB2339800A GB2339800A (en) 2000-02-09
GB2339800B true GB2339800B (en) 2003-04-09

Family

ID=10836156

Family Applications (1)

Application Number Title Priority Date Filing Date
GB9816211A Expired - Fee Related GB2339800B (en) 1998-07-24 1998-07-24 A vacuum process for depositing zinc sulphide and other coatings on flexible moving web

Country Status (1)

Country Link
GB (1) GB2339800B (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001031081A1 (en) * 1999-10-22 2001-05-03 Kurt J. Lesker Company Method and apparatus for coating a substrate in a vacuum
EP1460642B1 (en) 2003-03-20 2009-03-04 Agfa HealthCare NV Manufacturing method of phosphor or scintillator sheets and panels suitable for use in a scanning apparatus
US7501155B2 (en) 2003-03-20 2009-03-10 Agfa Healthcare Manufacturing method of phosphor or scintillator sheets and panels suitable for use in a scanning apparatus
CA2618148A1 (en) 2005-08-12 2007-02-22 Dunwilco (1198) Limited Process for producing metal flakes

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD160748A3 (en) * 1981-04-16 1984-02-29 Karl Steinfelder EXPANSION DEVICE
US4959524A (en) * 1986-09-20 1990-09-25 Rudnay Andre De Apparatus and evaporator for metallizing foils
US5239611A (en) * 1991-02-14 1993-08-24 Hilmar Weinert Series evaporator
US5302208A (en) * 1992-02-08 1994-04-12 Leybold Aktiengesellschaft Vacuum coating installation
JPH0718442A (en) * 1993-06-30 1995-01-20 Matsushita Electric Ind Co Ltd Vacuum deposition equipment
DE4442733A1 (en) * 1994-12-01 1996-06-05 Ardenne Anlagentech Gmbh Evaporator for vacuum vapour coating strip e.g. with zinc@
US5614273A (en) * 1993-10-27 1997-03-25 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung, E.V. Process and apparatus for plasma-activated electron beam vaporization
US5616362A (en) * 1993-06-02 1997-04-01 Andritz-Patentverwaltungs-Gesellschaft M.B.H. Process and apparatus for the coating of metal
GB2306512A (en) * 1995-10-27 1997-05-07 Leybold Ag Electron beam vacuum coating plant having a crucible of high melting material
EP0784102A1 (en) * 1996-01-10 1997-07-16 Alusuisse Technology & Management AG Process and apparatus for coating a substrate surface
EP0794266A1 (en) * 1996-03-06 1997-09-10 Alusuisse Technology & Management AG Apparatus for coating a substrate surface
US5679410A (en) * 1994-06-06 1997-10-21 Matsushita Electric Industrial Co., Ltd. Continuous fabrication of thin film magnetic recording medium with vacuum deposition

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DD160748A3 (en) * 1981-04-16 1984-02-29 Karl Steinfelder EXPANSION DEVICE
US4959524A (en) * 1986-09-20 1990-09-25 Rudnay Andre De Apparatus and evaporator for metallizing foils
US5239611A (en) * 1991-02-14 1993-08-24 Hilmar Weinert Series evaporator
US5302208A (en) * 1992-02-08 1994-04-12 Leybold Aktiengesellschaft Vacuum coating installation
US5616362A (en) * 1993-06-02 1997-04-01 Andritz-Patentverwaltungs-Gesellschaft M.B.H. Process and apparatus for the coating of metal
JPH0718442A (en) * 1993-06-30 1995-01-20 Matsushita Electric Ind Co Ltd Vacuum deposition equipment
US5614273A (en) * 1993-10-27 1997-03-25 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung, E.V. Process and apparatus for plasma-activated electron beam vaporization
US5679410A (en) * 1994-06-06 1997-10-21 Matsushita Electric Industrial Co., Ltd. Continuous fabrication of thin film magnetic recording medium with vacuum deposition
DE4442733A1 (en) * 1994-12-01 1996-06-05 Ardenne Anlagentech Gmbh Evaporator for vacuum vapour coating strip e.g. with zinc@
GB2306512A (en) * 1995-10-27 1997-05-07 Leybold Ag Electron beam vacuum coating plant having a crucible of high melting material
EP0784102A1 (en) * 1996-01-10 1997-07-16 Alusuisse Technology & Management AG Process and apparatus for coating a substrate surface
EP0794266A1 (en) * 1996-03-06 1997-09-10 Alusuisse Technology & Management AG Apparatus for coating a substrate surface

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
WPI Accession no 95-094233 & JP 07 018 442 A *

Also Published As

Publication number Publication date
GB2339800A (en) 2000-02-09
GB9816211D0 (en) 1998-09-23

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20060724