[go: up one dir, main page]

GB2393321B - Plasma generation - Google Patents

Plasma generation

Info

Publication number
GB2393321B
GB2393321B GB0208007A GB0208007A GB2393321B GB 2393321 B GB2393321 B GB 2393321B GB 0208007 A GB0208007 A GB 0208007A GB 0208007 A GB0208007 A GB 0208007A GB 2393321 B GB2393321 B GB 2393321B
Authority
GB
United Kingdom
Prior art keywords
plasma generation
plasma
generation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
GB0208007A
Other versions
GB0208007D0 (en
GB2393321A (en
Inventor
Victor Bellido-Gonzalez
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gencoa Ltd
Original Assignee
Gencoa Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gencoa Ltd filed Critical Gencoa Ltd
Priority to GB0208007A priority Critical patent/GB2393321B/en
Publication of GB0208007D0 publication Critical patent/GB0208007D0/en
Publication of GB2393321A publication Critical patent/GB2393321A/en
Application granted granted Critical
Publication of GB2393321B publication Critical patent/GB2393321B/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • H01J37/3405—Magnetron sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/345—Magnet arrangements in particular for cathodic sputtering apparatus
    • H01J37/3452—Magnet distribution
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3411—Constructional aspects of the reactor
    • H01J37/345—Magnet arrangements in particular for cathodic sputtering apparatus
    • H01J37/3455—Movable magnets

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
GB0208007A 2002-04-06 2002-04-06 Plasma generation Expired - Fee Related GB2393321B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB0208007A GB2393321B (en) 2002-04-06 2002-04-06 Plasma generation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0208007A GB2393321B (en) 2002-04-06 2002-04-06 Plasma generation

Publications (3)

Publication Number Publication Date
GB0208007D0 GB0208007D0 (en) 2002-05-15
GB2393321A GB2393321A (en) 2004-03-24
GB2393321B true GB2393321B (en) 2005-06-29

Family

ID=9934401

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0208007A Expired - Fee Related GB2393321B (en) 2002-04-06 2002-04-06 Plasma generation

Country Status (1)

Country Link
GB (1) GB2393321B (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004027897A1 (en) * 2004-06-09 2006-01-05 Leybold Optics Gmbh Apparatus and method for atomization with a movable planar target
GB0423032D0 (en) * 2004-10-16 2004-11-17 Trikon Technologies Ltd Methods and apparatus for sputtering
JP5147000B2 (en) * 2005-10-07 2013-02-20 国立大学法人東北大学 Magnetron sputtering equipment
WO2007071719A1 (en) * 2005-12-22 2007-06-28 Oc Oerlikon Balzers Ag Method of manufacturing at least one sputter-coated substrate and sputter source
EP1873809A1 (en) * 2006-06-26 2008-01-02 M2 Engineering AB (publ) Sputtering device
KR101140195B1 (en) * 2007-03-16 2012-05-02 도쿄엘렉트론가부시키가이샤 Magnetron sputtering apparatus
EP2778253B1 (en) * 2013-02-26 2018-10-24 Oerlikon Surface Solutions AG, Pfäffikon Cylindrical evaporation source

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5399253A (en) * 1992-12-23 1995-03-21 Balzers Aktiengesellschaft Plasma generating device
US5944968A (en) * 1996-09-18 1999-08-31 Anelva Corporation Sputtering apparatus
US5980707A (en) * 1998-12-18 1999-11-09 Sierra Applied Sciences, Inc. Apparatus and method for a magnetron cathode with moving magnet assembly

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5399253A (en) * 1992-12-23 1995-03-21 Balzers Aktiengesellschaft Plasma generating device
US5944968A (en) * 1996-09-18 1999-08-31 Anelva Corporation Sputtering apparatus
US5980707A (en) * 1998-12-18 1999-11-09 Sierra Applied Sciences, Inc. Apparatus and method for a magnetron cathode with moving magnet assembly

Also Published As

Publication number Publication date
GB0208007D0 (en) 2002-05-15
GB2393321A (en) 2004-03-24

Similar Documents

Publication Publication Date Title
AU2003205831A1 (en) Schematic generation
AU2003303538A8 (en) Low power plasma generator
AU2003286894A1 (en) Hydrogen generator
PL370076A1 (en) Gas generator
IL164970A0 (en) Gas pregeater
AU2003203127A1 (en) Vacuum plasma generator
EP1541429A4 (en) Gas generator
GB0216482D0 (en) Power generation
AU2003269638A1 (en) Hydrogen generator
GB0402245D0 (en) Cross-reference generation
AU2002328534A1 (en) Ion generator
PL371117A1 (en) Gas generator
GB0302265D0 (en) Plasma generating electrode assembly
GB0215034D0 (en) Architecture generation method
GB2393321B (en) Plasma generation
GB0225855D0 (en) Power generation
AU2003264743A1 (en) Non-thermal plasma reactor
AU2003229987A8 (en) Hydrogen generation
AU2003235178A1 (en) Gas generator
AU2003208746A8 (en) Gas fractionator-purifier
AU2003258237A8 (en) Reduced volume plasma reactor
AU2002359084A1 (en) Plasma electricity generator
TW587870U (en) Generator
GB0227466D0 (en) Schematic generation
GB0217801D0 (en) Hydrogen

Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20070406

S28 Restoration of ceased patents (sect. 28/pat. act 1977)

Free format text: APPLICATION FILED

S28 Restoration of ceased patents (sect. 28/pat. act 1977)

Free format text: RESTORATION ALLOWED

Effective date: 20100721

PCNP Patent ceased through non-payment of renewal fee

Effective date: 20150406