GB2109545B - Surface profile interferometer - Google Patents

Surface profile interferometer

Info

Publication number: GB2109545B
Authority: GB; United Kingdom
Prior art keywords: surface profile; interferometer; profile interferometer; profile
Prior art date: 1981-10-30
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

GB08229353A

Other versions

GB2109545A (en

Inventor

Michael John Downs

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Individual

Original Assignee

Individual

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1981-10-30

Filing date

1982-10-14

Publication date

1985-07-24

1982-10-14 Application filed by Individual filed Critical Individual

1982-10-14 Priority to GB08229353A priority Critical patent/GB2109545B/en

1983-06-02 Publication of GB2109545A publication Critical patent/GB2109545A/en

1985-07-24 Application granted granted Critical

1985-07-24 Publication of GB2109545B publication Critical patent/GB2109545B/en

Status Expired legal-status Critical Current

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Investigating Or Analysing Materials By Optical Means (AREA)

GB08229353A 1981-10-30 1982-10-14 Surface profile interferometer Expired GB2109545B (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
GB08229353A GB2109545B (en)	1981-10-30	1982-10-14	Surface profile interferometer

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
GB8132745		1981-10-30
GB08229353A GB2109545B (en)	1981-10-30	1982-10-14	Surface profile interferometer

Publications (2)

Publication Number	Publication Date
GB2109545A GB2109545A (en)	1983-06-02
GB2109545B true GB2109545B (en)	1985-07-24

Family

ID=26281126

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
GB08229353A Expired GB2109545B (en)	1981-10-30	1982-10-14	Surface profile interferometer

Country Status (1)

Country	Link
GB (1)	GB2109545B (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS5975108A (en) *	1982-10-22	1984-04-27	Hitachi Ltd	Optical measurement method and measurement device for minute gaps
US4848908A (en) *	1983-10-24	1989-07-18	Lockheed Missiles & Space Company, Inc.	Optical heterodyne roughness measurement system
EP0162973A1 (en) *	1984-05-30	1985-12-04	Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO	Distance measuring device
US4639139A (en) *	1985-09-27	1987-01-27	Wyko Corporation	Optical profiler using improved phase shifting interferometry
EP0226658B1 (en) *	1985-12-23	1989-11-15	Ibm Deutschland Gmbh	Method and arrangement for optically determining surface profiles
US5042949A (en) *	1989-03-17	1991-08-27	Greenberg Jeffrey S	Optical profiler for films and substrates
US5017012A (en) *	1989-08-04	1991-05-21	Chapman Instruments, Inc.	Viewing system for surface profiler
US5546184A (en) *	1991-11-08	1996-08-13	British Technology Group Ltd.	Single-frequency bidirectional fringe-counting interferometer
GB2356931B (en) *	1999-12-03	2003-05-28	Aea Technology Plc	Optical ultrasonic measurement
SG98388A1 (en) *	2000-05-13	2003-09-19	Univ Nanyang	Testing of aspheric surfaces with a magneto-optic active compensator

1982
- 1982-10-14 GB GB08229353A patent/GB2109545B/en not_active Expired

Also Published As

Publication number	Publication date
GB2109545A (en)	1983-06-02

Publication	Publication Date	Title
GB2089051B (en)	1985-09-25	Surface restivimeter
GB2107482B (en)	1985-07-31	Polariscope
IL66295A (en)	1987-12-20	Interferometer system for measuring surface contours
ATA396180A (en)	1981-05-15	Interferometer arrangement
DE3476583D1 (en)	1989-03-09	Interferometer
AU86929S (en)	1982-11-26	Roller
GB2102535B (en)	1984-09-12	Rollers
GB2109329B (en)	1985-07-10	Roller fair-lead
GB2162924B (en)	1986-08-20	Rollers
JPS57142501A (en)	1982-09-03	Gauge
JPS57167915A (en)	1982-10-16	Osteopathic remedy
EP0171836A3 (en)	1987-09-16	Interferometer interferometer
GB2094470B (en)	1984-09-26	Examining surface profile
GB8323179D0 (en)	1983-09-28	Interferometer
GB2109545B (en)	1985-07-24	Surface profile interferometer
DE3273648D1 (en)	1986-11-13	Extensometers
GB2113272B (en)	1985-11-06	Railing
GB2111018B (en)	1985-08-21	Jack
GB2106241B (en)	1985-06-12	Measuring surface roughness
BR8203712A (en)	1983-06-21	SURFACE MIXTURES
GB8512962D0 (en)	1985-06-26	Interferometers
GB2103128B (en)	1986-03-19	Surface finishing
GB2091636B (en)	1985-06-19	Support surfaces
DE3279074D1 (en)	1988-11-03	Loose-lay flooring
AU82979S (en)	1982-03-25	hand shower

Legal Events

Date	Code	Title	Description
1985-09-11	732	Registration of transactions, instruments or events in the register (sect. 32/1977)
1992-04-29	732	Registration of transactions, instruments or events in the register (sect. 32/1977)
1997-06-04	PCNP	Patent ceased through non-payment of renewal fee	Effective date: 19961014