GB2186000A - A method of processing a metal surface - Google Patents
A method of processing a metal surface Download PDFInfo
- Publication number
- GB2186000A GB2186000A GB08612374A GB8612374A GB2186000A GB 2186000 A GB2186000 A GB 2186000A GB 08612374 A GB08612374 A GB 08612374A GB 8612374 A GB8612374 A GB 8612374A GB 2186000 A GB2186000 A GB 2186000A
- Authority
- GB
- United Kingdom
- Prior art keywords
- metal
- ion
- coating
- plating
- inert gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 43
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 42
- 239000002184 metal Substances 0.000 title claims abstract description 42
- 238000000576 coating method Methods 0.000 claims abstract description 71
- 239000011248 coating agent Substances 0.000 claims abstract description 67
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims abstract description 36
- 238000007733 ion plating Methods 0.000 claims abstract description 35
- 239000011261 inert gas Substances 0.000 claims abstract description 24
- 239000007769 metal material Substances 0.000 claims abstract description 21
- 229910052786 argon Inorganic materials 0.000 claims abstract description 20
- 239000007789 gas Substances 0.000 claims abstract description 16
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 15
- 239000000956 alloy Substances 0.000 claims abstract description 15
- 238000007747 plating Methods 0.000 claims abstract description 11
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims abstract description 8
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims abstract description 6
- 239000010931 gold Substances 0.000 claims description 19
- 229910052737 gold Inorganic materials 0.000 claims description 13
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical group [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 12
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 9
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 8
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
- 150000002736 metal compounds Chemical class 0.000 claims description 8
- 239000011135 tin Substances 0.000 claims description 8
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 7
- 229910052718 tin Inorganic materials 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 239000011651 chromium Substances 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 5
- 229910052802 copper Inorganic materials 0.000 claims description 5
- 229910052697 platinum Inorganic materials 0.000 claims description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 5
- 239000010937 tungsten Substances 0.000 claims description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 4
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims description 4
- 229910052804 chromium Inorganic materials 0.000 claims description 4
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 4
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 claims description 4
- WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 239000010955 niobium Substances 0.000 claims description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims description 4
- 150000004767 nitrides Chemical class 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 229910052763 palladium Inorganic materials 0.000 claims description 4
- 239000010948 rhodium Substances 0.000 claims description 4
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 claims description 4
- 239000004332 silver Substances 0.000 claims description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 239000011701 zinc Substances 0.000 claims description 4
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 239000010941 cobalt Substances 0.000 claims description 3
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 claims description 3
- 229910052732 germanium Inorganic materials 0.000 claims description 3
- 229910052738 indium Inorganic materials 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 229910052703 rhodium Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- 229910017052 cobalt Inorganic materials 0.000 claims description 2
- 229910052726 zirconium Inorganic materials 0.000 claims description 2
- 239000001307 helium Substances 0.000 abstract description 8
- 229910052734 helium Inorganic materials 0.000 abstract description 8
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract description 8
- 238000007796 conventional method Methods 0.000 abstract description 6
- SJKRCWUQJZIWQB-UHFFFAOYSA-N azane;chromium Chemical compound N.[Cr] SJKRCWUQJZIWQB-UHFFFAOYSA-N 0.000 abstract description 5
- 150000002739 metals Chemical class 0.000 abstract 1
- 239000010408 film Substances 0.000 description 19
- 230000008020 evaporation Effects 0.000 description 7
- 238000001704 evaporation Methods 0.000 description 7
- 229910000510 noble metal Inorganic materials 0.000 description 5
- -1 argon ion Chemical class 0.000 description 4
- KYLWJAUHHPTDDH-UHFFFAOYSA-N primetin Chemical compound OC1=CC=C(O)C(C(C=2)=O)=C1OC=2C1=CC=CC=C1 KYLWJAUHHPTDDH-UHFFFAOYSA-N 0.000 description 4
- 229910001316 Ag alloy Inorganic materials 0.000 description 2
- 229910001297 Zn alloy Inorganic materials 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005034 decoration Methods 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910000927 Ge alloy Inorganic materials 0.000 description 1
- 229910000846 In alloy Inorganic materials 0.000 description 1
- 229910001182 Mo alloy Inorganic materials 0.000 description 1
- 229910001257 Nb alloy Inorganic materials 0.000 description 1
- 229910000990 Ni alloy Inorganic materials 0.000 description 1
- 229910001252 Pd alloy Inorganic materials 0.000 description 1
- 229910001260 Pt alloy Inorganic materials 0.000 description 1
- 229910000629 Rh alloy Inorganic materials 0.000 description 1
- 229910001128 Sn alloy Inorganic materials 0.000 description 1
- 229910001362 Ta alloys Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 229910001093 Zr alloy Inorganic materials 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- GNEMDYVJKXMKCS-UHFFFAOYSA-N cobalt zirconium Chemical compound [Co].[Zr] GNEMDYVJKXMKCS-UHFFFAOYSA-N 0.000 description 1
- 235000019646 color tone Nutrition 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 210000000689 upper leg Anatomy 0.000 description 1
- 210000000707 wrist Anatomy 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61C—DENTISTRY; APPARATUS OR METHODS FOR ORAL OR DENTAL HYGIENE
- A61C13/00—Dental prostheses; Making same
- A61C13/0003—Making bridge-work, inlays, implants or the like
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61C—DENTISTRY; APPARATUS OR METHODS FOR ORAL OR DENTAL HYGIENE
- A61C5/00—Filling or capping teeth
- A61C5/70—Tooth crowns; Making thereof
- A61C5/77—Methods or devices for making crowns
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- A—HUMAN NECESSITIES
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- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F2/00—Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
- A61F2/02—Prostheses implantable into the body
- A61F2/30—Joints
- A61F2/30767—Special external or bone-contacting surface, e.g. coating for improving bone ingrowth
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
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- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F2/00—Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
- A61F2/02—Prostheses implantable into the body
- A61F2/30—Joints
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-
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- A61F2/00—Filters implantable into blood vessels; Prostheses, i.e. artificial substitutes or replacements for parts of the body; Appliances for connecting them with the body; Devices providing patency to, or preventing collapsing of, tubular structures of the body, e.g. stents
- A61F2/02—Prostheses implantable into the body
- A61F2/30—Joints
- A61F2/30767—Special external or bone-contacting surface, e.g. coating for improving bone ingrowth
- A61F2002/30929—Special external or bone-contacting surface, e.g. coating for improving bone ingrowth having at least two superposed coatings
-
- A—HUMAN NECESSITIES
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- A61F2310/00—Prostheses classified in A61F2/28 or A61F2/30 - A61F2/44 being constructed from or coated with a particular material
- A61F2310/00005—The prosthesis being constructed from a particular material
- A61F2310/00011—Metals or alloys
- A61F2310/00035—Other metals or alloys
- A61F2310/00083—Zinc or Zn-based alloys
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- A61F2310/00—Prostheses classified in A61F2/28 or A61F2/30 - A61F2/44 being constructed from or coated with a particular material
- A61F2310/00389—The prosthesis being coated or covered with a particular material
- A61F2310/00395—Coating or prosthesis-covering structure made of metals or of alloys
- A61F2310/00401—Coating made of iron, of stainless steel or of other Fe-based alloys
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- A—HUMAN NECESSITIES
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- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F2310/00—Prostheses classified in A61F2/28 or A61F2/30 - A61F2/44 being constructed from or coated with a particular material
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- A61F2310/00395—Coating or prosthesis-covering structure made of metals or of alloys
- A61F2310/00413—Coating made of cobalt or of Co-based alloys
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- A61F2310/00—Prostheses classified in A61F2/28 or A61F2/30 - A61F2/44 being constructed from or coated with a particular material
- A61F2310/00389—The prosthesis being coated or covered with a particular material
- A61F2310/00395—Coating or prosthesis-covering structure made of metals or of alloys
- A61F2310/00419—Other metals
- A61F2310/00431—Coating made of aluminium or of Al-based alloys
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
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- A61F2310/00389—The prosthesis being coated or covered with a particular material
- A61F2310/00395—Coating or prosthesis-covering structure made of metals or of alloys
- A61F2310/00419—Other metals
- A61F2310/00449—Coating made of chromium or Cr-based alloys
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- A—HUMAN NECESSITIES
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- A61F2310/00—Prostheses classified in A61F2/28 or A61F2/30 - A61F2/44 being constructed from or coated with a particular material
- A61F2310/00389—The prosthesis being coated or covered with a particular material
- A61F2310/00395—Coating or prosthesis-covering structure made of metals or of alloys
- A61F2310/00419—Other metals
- A61F2310/00455—Coating made of manganese Mn-based alloys
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F2310/00—Prostheses classified in A61F2/28 or A61F2/30 - A61F2/44 being constructed from or coated with a particular material
- A61F2310/00389—The prosthesis being coated or covered with a particular material
- A61F2310/00395—Coating or prosthesis-covering structure made of metals or of alloys
- A61F2310/00419—Other metals
- A61F2310/00461—Coating made of nickel or Ni-based alloys
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
- A61F2310/00—Prostheses classified in A61F2/28 or A61F2/30 - A61F2/44 being constructed from or coated with a particular material
- A61F2310/00389—The prosthesis being coated or covered with a particular material
- A61F2310/00395—Coating or prosthesis-covering structure made of metals or of alloys
- A61F2310/00419—Other metals
- A61F2310/00467—Coating made of copper or Cu-based alloys
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Abstract
A method for processing a metal surface is disclosed, in which two layered coatings consisting of a prime thin hard coating selected from chromium nitride,titanium nitride or titanium carbide and of a secondary thin coating selected from elemental metals and their corresponding alloys capable of dry-plating are provided on a metal material by an ion-plating process. An essential feature of the invention is to provide the secondary thin coating by means of the ion-plating process in the absence of an inert gas, such as an argon or helium gas, which is different from the conventional method for ion-plating the elemental metal in the presence of such inert gas. <IMAGE>
Description
SPECIFICATION
A method of processing a metal surface
This invention relates two a method of processing a metal surface, particularly in which a metal material is coated with a primarythin film of hard metal compound and furtherthereon with a secondarythin film of an elemental metal or an alloy by use of an ion-plating techniqueto form a beautiful and glossy metal surface of high durability on a whole surface of the metal material or in a desired pattern.
There have been known a numberof articles, such as a wristwatch, cuffs, an eye-glassframe, a tie-pin,a brooch, a stationery and other accessories or outer decorations, as well as a cap crown for a tooth or dental prosthetics in which a metal material is plated with a noble metal, such as gold. There have also been wellknown in the art several methods forthe purpose. These conventional articles, however, have a disadvantage in that the noble metal coating tends to come off and form specks in areas offrequent use, which adversely affect durability and appearance of the articles. Further, metal articles having on their surfaces lustrous patterns are also commercially available, which are, however, poor in durability and tend to come off by rubbing.
In orderto overcome those disadvantages, there has been proposed an ion-plating method forforming a primary thin coating of hard metal compound on a surface of a metal material followed by a further ionplating procedureforforming a secondarythin film of an elemental noble metal oran alloy having asimilar colour tone to that ofthe primary coating (GB 2000812A). The applicant has also developed a method of forming a primary and a secondaryfilm over a whole area of a metal material or in a desired pattern, utilizing similarlythe ion-plating technique (GB 2162205A).
In general, a film-forming method utilizing the ion-plating technique comprises ionization of a portion of vaporized metal particles followed by deposition thereof on a solid surface to form a film, in which the ionization in the presence of an inert gas (such as argon or helium) provides a film of pure metal (elemental metal), whereas the ionization in the presence of an active gas (such as oxygen or nitrogen) provides a hard film of metal oxides or nitrides. Such procedure has been generally known as a conventional method for ion-plating in the art (Scientific Dictionary, Maruzen & Co., Ltd., Page 53 (1985).
GB 200081 2A has also utilized the conventional method, as described in Examples, in which a primaryflim is formed in the presence of nitrogen as the active gas while a secondaryfilm is formed in the presence of argon as the inert gas.
It has now been found outas a result of continued study offorming the two layered coatings of primary and secondaryfilms by means of the ion-plating technique that the ion-plating procedure in the absence of the inert gas (such as argon or helium) during formation of the secondary film of elemental metal or its alloy differently from the conventional method may avoid an operation, such as involving a high frequency output of argon gas pressure, and improve its operability. Further, a spattering phenomenon with an argon ion may be eliminated to increase a rate of forming a thickness of the film and to lower a treatmenttemperature,so that the material may be prevented from damage.In the absence of the inert gas (such as argon or helium), it has also been found outthatthe ionization may occur only with an evaporated metal to enable vacuum in an apparatus to be reduced to 106 - 1 O5Torrwhich is lower by 102- 1 O3Torrthan the order of 108Torr in the conventional method, to increase purity of the resulting film due to the absence of inclusion of, for example, the argon ion and to prevent pin holes, resulting in improvement of corrosion-resistance. Further, the enhan ced ionization of the evaporated metal permits working in a place of lower voltage applied to a cathode, thereby to reduce troubles due to abnormal discharge.
An object of the invention is to provide a method of processing a metal surface by means of an ion-plating technique, which is superior in operability, economy and properties of products to conventional ion-plating methods when a hard primary metal film is formed on a surface of a metal material followed by a secondary film of elemental metaloritsalloythereon.
According to the invention there is provided a method of processing a metal surface characterized in that a metal material is subjected to bombard treatment in the presence of an inert gas followed by a firstionplating process in the presence of an active gas to form on a surface of said metal material a primarythin coating of hard metal compound selected from chromium nitride, titanium nitride and titanium carbide, and that the resulting metal material with the primary thin coating is then subjected to a second ion-plating process in the absence of an inert gas to form on said primarythin coating a secondarythin coating of an elemental metal or an alloy capable of dry-plating.
As the inert gas used forforming the primary film, there may be preferably mentioned argon and helium, especially argon, while nitrogen is preferred for the active gas. During formation of the secondary film, both of these inert and active gases are not used, of course.
As the elemental metal for the secondary film, there may be mentioned metal capable of dry-plating, such as gold, silver, platinum, copper, zinc, palladium, chromium, rhodium, indium, nickel, germanium, cobalt, zirconium,tungsten,tantalum, niobium, manganese, molybdenum,tin, iron or aluminium.
Asthe alloyforthe secondaryfilm,there may be mentioned an alioy capable of dry-plating selectedfrom alloys of gold, silver, platinum, copper, palladium, chromium, rhodium, indium, nickel, germanium, cobalt, zirconium, tungsten, tantalum, niobium, manganese, molybdenum, tin, iron, zinc and aluminium.
The primary and/orthe secondaryfilms may be formed over a whole surface of the metal material or in a desired pattern. The latter case is suitable for providing a brand name oran initial on an outer accessory.
In accordance with the invention, the secondary metal film is formed on the primary hard metal film in the absence of the inert gas (such as argon), so that operation such as involving thigh frequency output ofargon gas pressure may be avoided two improve its operability,that a spattering phenomenon with an argon ion may be eliminated to increase a rate offorming a thickness of the film and to lower a treatmenttemperature,and thatthe ionization may occur onlywith an evaporated metal to enable vacuum in an apparatus to be reduced upto 105 105 - 1 Torrwhich is lower by 1 o2 103 Torrthan the order of 108 Torr in the conventional method,to increase purity of the resulting film due to the absence of inclusion of the argon ion and to prevent pin holes, resulting in improvementof corrosion-resistance. Further, the enhanced ionization oftheevaporated metal permits working in a place of lower voltage applied to a cathode,therebyto reduce troubles due to abnormal discharge.
The invention will now be described, byway of example, with reference to the accompanying drawings7 in which:
Figure lisa sectional view of a finished product prepared by the method according to the invention;
Figure2 is a sectional view of the product after use for some period oftime; Figure3 is a perspective view of another product with a patterned coating; and Figure 4 is a schematic view of an apparatus used for ion-plating the secondary metal film.
In Figure 1, reference numeral 1 represents a cap crown formed of a zinc alloy, for example, as a metal material and applied to a cured tooth. A surface of the crown 1 is coated with a prime coating oftitanium nitride as a hard metal compound in a thickness of 3 ii by means of an ion-plating process.
Thus, the surface of the crown 1 is coated with the prime coating of golden colour, which has a surface hardness of 1720 HD and a high corrosion-resistance. The golden colour, however, is somewhat inferiorto thatofa true gold.
Then, a surface of the prime thin coating 2 is coated with a secondary thin coating 3 of metal gold in a thickness of 5- 10 . In order to form the secondary coating 3, the ion-plating process is essentially carried out in the absence of an inert gas, such as an argon or helium gas.
The crown 1 thus processed has a secondary thin coating 3 of gold, which shows the true gold colour.
However, the gold as the secondary coating 3 is very soft and weak, sothatfrequentuse of the crowned tooth may cause the coating 3 to wear away, as shown in Figure 2. Underthe secondary coating 3, however,there exists the prime coating 2 oftitanium nitride, which shows a golden colour similarto the true gold, therebyto prevent specks from appearing after the secondary coating 3 has worn away. Usually, the cap crown 1 of such type is used for a back tooth, so that the apparent golden colour may be kept for a long period of use.
As shown in Figure 3, at first a whole surface of an accessory item 4, such as a tie-pin, cuffs or a brooch, is coated with a thin coating 5 of black titanium carbide bythe ion-plating process under the same condition as for the crown 1. Then, the thin coating 5 oftitanium carbide is masked with a suitable pattern or a name, on which is coated a secondary thin coating 6 of platinum by the ion-plating process in the absence of inert gas, such as argon. Thereafter, the mask is removed to leave the patterned coating.
The prime coating 5 oftitanium carbide has a very high hardness and so is resistant to damage as isthe coating 6 of platinum, so that a durable and luxurious accessory item may be produced.
Alternatively, the surface ofthe metal material may be coated with a thin coating of chromium nitride by the ion-plating proces, which is then further coated with silver alloy by the ion-plating process in the absence of the inert gas to form a durable and luxurious product which does notsufferfrom the occurrence of specks, as in the coating combination of titanium nitride and gold described above.
Similarly, the prime thin coating 5 of hard metal compound, such as chromium nitride, titanium nitride or titanium carbide, which has been coated on the metal material by the ion-plating process, may be coated also by the ion-plating process in the absence of the inert gas with a secondary thin coating 6 of an elemental metal or an alloy capable of dry-plating selected from gold, silver, platinum, copper, zinc, palladium, chromium, rhodium, indium, nickel, germanium, cobalt zirconium, tungsten, tantalum, niobium, manganese, molybdenum, tin and iron, as well as their corresponding alloys,to form durable and beautiful products having lustrous patterns of metal or noble metal.
In accordance with the invention, the surface of the metal material may be coated bythe ion-plating processwith the prime thin coating of hard metal compound; such as chromium nitride, titanium nitride or titanium carbide, which may be then subjected to a further coating process of an elemental metal or an alloy capable of dry-plating, such as copper or its alloy by the ion-plating process in the absence of the inert gas, which its further plated with a suitable metal by a dry- orwet-plating process. Thus, the difficulty of the dry- or wet-plating for the titanium nitride coating may be eliminated by the provision of secondary metal coating through the ion-plating process in the absence of the inert gas. In this case, a similarly durable and beautiful coating may be obtained as in the previous embodiments.
In accordance with the invention, the surface of the metal material may be readily made durable and lustrous at a low cost by ion-plating a combination of the hard prime coating with the secondary coating of elemental metal or alloy over its whole area or in a desired pattern.
Namely, the surface of the metal material is coated bythe ion-plating process with the prime thin coating of the hard metal compound, such as chromium nitride, titanium nitride ortitanium carbide, which prime coating is further coated by the ion-plating process in the absence of the inert gas (such as argon or helium) with the secondary coating of elemental metal or alloy, as described hereinabove, over its whole area or in a desired pattern, so that the wearing away of the secondary thin coating does not form specks of different colours after a long period of use. If a noble metal is used for the secondary thin coating, the metal material may be a base metal for providing a durable and luxurious coating thereon.If copper or an alloythereof capable of dry-plating is used for the secondary thin coating, any suitable metal may be plated thereon bya dry- orwet-plating processto form a durable and beautiful metal surface.
Further, the secondary thin coating may be provided over the whole surface or in a desired pattern to form a durable and luxurious patterned coating, such as figure or names. As the secondary thin coating 6, any suitable metal or alloy may be selected for providing the durable and beautiful coating.
The coating according to the invention may be provided on a cap crown for a tooth, an outer decoration of stationery, a band of a wrist watch, an accessory, a container for toiletries, an eye-glass frame, cuffs, a tie-pin, a brooch or other articles.
The essential feature of providing the secondary thin coating by an ion-plating process in the absence of the inert gas, such as argon or helium, in accordance with the invention may improve operability, work- ability, economy and quality of the products.
The invention will now be illustrated with a few Examples but not limited thereto.
Example 1
A degreased and washed SUS 304 plate of 3 cm x 3 cm square was placed in an apparatus, and 100 ml/min.
of an argon gas was introduced thereinto and a bombard treatment was carried out undera condition of a gas pressure of 0.07 Torr, a voltage of 590 V and a current of 2.2 Afor 30 minutes. Then, 90 ml/min. of a nitrogen gas was introduced to provide a gas pressure of 9 x 1 0-5 - 1.3 x 1 0-4 Torr a nd a titanium metal was evaporated for 40 minutes under a condition of EB voltage and current of 40 V, 65 - 75 A and a bias of 350 -450
V, 405 - 5.0 A. Thereafter, the gas was adjusted to 1 x 10-5 Torr, and a product was removed after cooling for 40 minutes.
Thus the plate with TiN coating was obtained.
Then, the plate with the TiN prime thin coating was placed on a cathode C in an ion-plating apparatus, as shown in Figure 4, which was evacuated to 10-5Torrfor allowing Au (gold) to evaporate, using an evapora tion source A. The evaporated Au atoms provided a vacuum of approximately lO-s - 10-2 Torr between the evaporation source A and an anode B arranged adjacent thereto, thereby to generate an are discharge. In a plasma produced by the are discharge,the Au atom was ionized according to the following equations: Au=Au++e-;Au=Au+++e-- The ionized Au ion was accelerated and deposited onto a cathode (substrate) placed outside the anode to form a thin film.The secondary thin Au coating thus formed in the absence of the argon gas had a high adhesive property with respect to the prime TiN coating. In this example the secondary thin coating was ion-plated under the following condition:
Applied Voltage between A* and B* : 40 V
Applied Voltage between A* and C* : 200 V
Evaporation Rate 0.5g/min.
Treatment Duration 5 min.
(Of course, the inert gas was not present.)
Example2
After a square SUS 304 plate of 3 cm x 3 cm had been ion-plated with a primeTiN thin coating as in
Example 1, it was subjected to an ion-plating process in the same apparatus and the same operation as in
Example 1 in the absence of the inert gas to provide a secondary Pd (palladium) thin coating. This secondary thin coating was formed underthe following condition:
Applied Voltage between A* and B* 40 V
Applied Voltage between A* and C* : 150 V
Evaporation Rate 1 gamin.
Treatment Duration : 3 min.
Example 3
Asample coated with a TiN coating as in Example 1 was placed on the cathode C in the apparatus of Figure 4 and subjected to the ion-plating process in the absence of the inert gas as in Example 1, using Cr (chromium) as an essential elementto form a secondary Crthin coating on the TiN prime coating. In this case, a tungsten thermionic emission electrode was used for generating thermoelectrons between the evaporation source A and the anode B thereby to produce the arc discharge. The secondary thin coating wasformed under the following condition: Applied Voltage between A* and B* Be 80V Applied Voltage between A* and C* : 300 V
Evaporation Rate . 1 gamin.
Treatment Duration lOmin.
Supplied PowertotheThermoelectronic Electrode : 150W
Note
A : Evaporation Source
B : Anode
C : Cathode
Although the invention has been described hereinabove with the preferred embodiments, it will be app reciatedto those skilled in the art that many variations may be made without departing from the scope and spirit of the invention.
Claims (6)
1. A method of processing a metal surface comprising subjecting the metal surface to bombard treatment in the presence of an inert gas followed by a first ion-plating process in the presence of an active gas to form on a surfaceofsaid metal material a primarythin coating of hard metal compound selectedfromchromium nitride, titanium nitride and titanium carbide, and subjecting the resulting metal material with the primary thin coating to a second ion-plating process in the absence of an inert gas to form on said primary thin
coating a secondary thin coating of an elemental metal or an alloy capable of dry-plating.
2. A method according to claim 1, wherein the inert gas is argon and the active gas is nitrogen.
3. A method according to claim 1 wherein the elemental metal or the alloy is selected from gold, silver,
platinum, copper, zinc, palladium, chromium, rhodium, indium, nickel, germanium, cobalt, zirconium,tung
sten,tantalum, niobium, manganese, molybdenum, tin, iron, aluminium and their corresponding alloys.
4. A method according to claim 1,wherein the primary and/orthe secondary thin coatings are formed
over a whole area ofthe metal material or in a desired pattern.
5. A method according to claim 1, substantially as hereinbefore described with reference to any one ofthe Examples.
6. A metal surface processed by a method as claimed in any one of claims two 5.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61022169A JPH0639684B2 (en) | 1986-02-05 | 1986-02-05 | Metal surface processing method |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| GB8612374D0 GB8612374D0 (en) | 1986-06-25 |
| GB2186000A true GB2186000A (en) | 1987-08-05 |
| GB2186000B GB2186000B (en) | 1990-03-14 |
Family
ID=12075304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB8612374A Expired - Lifetime GB2186000B (en) | 1986-02-05 | 1986-05-21 | A method of processing a metal surface |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPH0639684B2 (en) |
| GB (1) | GB2186000B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3904430A1 (en) * | 1989-02-14 | 1990-08-16 | Wall Giselher | Dental prosthetic attachment anchor, especially telescopic or conical crown, and casting method for producing it |
| WO1990009463A1 (en) * | 1989-02-17 | 1990-08-23 | Preci-Coat S.A. | Method for the deposition of at least one thickness of at least one decorative material to an object, and decorative object obtained by such method |
| WO1996035825A1 (en) * | 1995-05-08 | 1996-11-14 | Helmut Tannenberger | Workpiece for high-temperature uses and process for producing it |
| WO1998048078A1 (en) * | 1997-04-21 | 1998-10-29 | Alliedsignal Inc. | Aircraft wheel part with corrosion and wear resistance |
| WO2003003950A1 (en) * | 2001-07-06 | 2003-01-16 | Depuy International Limited | An orthopaedic joint prosthesis |
| GB2385062A (en) * | 2002-02-07 | 2003-08-13 | Teer Coatings Ltd | Method of Applying Hard Coatings |
| US20140199657A1 (en) * | 2011-07-29 | 2014-07-17 | Osstemimplant Co., Ltd. | Membrane for alveolar bone regeneration |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2883150B1 (en) * | 2005-03-15 | 2007-04-20 | Seb Sa | EASY-TO-CLEAN COOKING SURFACE AND HOUSEHOLD ARTICLE COMPRISING SUCH A SURFACE |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2162205A (en) * | 1984-07-28 | 1986-01-29 | Tadanobu Okubo | Forming coloured coatings by ion plating |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4420386A (en) * | 1983-04-22 | 1983-12-13 | White Engineering Corporation | Method for pure ion plating using magnetic fields |
-
1986
- 1986-02-05 JP JP61022169A patent/JPH0639684B2/en not_active Expired - Lifetime
- 1986-05-21 GB GB8612374A patent/GB2186000B/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2162205A (en) * | 1984-07-28 | 1986-01-29 | Tadanobu Okubo | Forming coloured coatings by ion plating |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3904430A1 (en) * | 1989-02-14 | 1990-08-16 | Wall Giselher | Dental prosthetic attachment anchor, especially telescopic or conical crown, and casting method for producing it |
| WO1990009463A1 (en) * | 1989-02-17 | 1990-08-23 | Preci-Coat S.A. | Method for the deposition of at least one thickness of at least one decorative material to an object, and decorative object obtained by such method |
| WO1996035825A1 (en) * | 1995-05-08 | 1996-11-14 | Helmut Tannenberger | Workpiece for high-temperature uses and process for producing it |
| WO1998048078A1 (en) * | 1997-04-21 | 1998-10-29 | Alliedsignal Inc. | Aircraft wheel part with corrosion and wear resistance |
| US5931269A (en) * | 1997-04-21 | 1999-08-03 | Alliedsignal Inc. | Aircraft wheel part with corrosion and wear resistance |
| WO2003003950A1 (en) * | 2001-07-06 | 2003-01-16 | Depuy International Limited | An orthopaedic joint prosthesis |
| GB2385062A (en) * | 2002-02-07 | 2003-08-13 | Teer Coatings Ltd | Method of Applying Hard Coatings |
| US20140199657A1 (en) * | 2011-07-29 | 2014-07-17 | Osstemimplant Co., Ltd. | Membrane for alveolar bone regeneration |
| US9339354B2 (en) * | 2011-07-29 | 2016-05-17 | Osstemimplant Co., Ltd. | Membrane for alveolar bone regeneration |
Also Published As
| Publication number | Publication date |
|---|---|
| GB2186000B (en) | 1990-03-14 |
| JPH0639684B2 (en) | 1994-05-25 |
| JPS62182267A (en) | 1987-08-10 |
| GB8612374D0 (en) | 1986-06-25 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 19950521 |