GB2165545B - Pellicle structure for transmission of mid ultraviolet light - Google Patents

Pellicle structure for transmission of mid ultraviolet light

Info

Publication number: GB2165545B
Authority: GB; United Kingdom
Prior art keywords: transmission; ultraviolet light; pellicle structure; mid ultraviolet; mid
Prior art date: 1984-10-16
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired

Application number

GB08523609A

Other versions

GB8523609D0 (en

GB2165545A (en

Inventor

Joseph Gordon

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

EIDP Inc

Tekscend Photomasks Inc

Original Assignee

Du Pont Semiconductor Products Inc

EI Du Pont de Nemours and Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1984-10-16

Filing date

1985-09-25

Publication date

1988-03-30

1985-09-25 Application filed by Du Pont Semiconductor Products Inc, EI Du Pont de Nemours and Co filed Critical Du Pont Semiconductor Products Inc

1985-10-30 Publication of GB8523609D0 publication Critical patent/GB8523609D0/en

1986-04-16 Publication of GB2165545A publication Critical patent/GB2165545A/en

1988-03-30 Application granted granted Critical

1988-03-30 Publication of GB2165545B publication Critical patent/GB2165545B/en

Status Expired legal-status Critical Current

Classifications

- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J5/00—Manufacture of articles or shaped materials containing macromolecular substances
- C08J5/18—Manufacture of films or sheets
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
- B29C41/02—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of definite length, i.e. discrete articles
- B29C41/12—Spreading-out the material on a substrate, e.g. on the surface of a liquid
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/62—Pellicles, e.g. pellicle assemblies, e.g. having membrane on support frame; Preparation thereof
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2001/00—Use of cellulose, modified cellulose or cellulose derivatives, e.g. viscose, as moulding material
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2001/00—Use of cellulose, modified cellulose or cellulose derivatives, e.g. viscose, as moulding material
- B29K2001/08—Cellulose derivatives
- B29K2001/12—Cellulose acetate
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29K—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES B29B, B29C OR B29D, RELATING TO MOULDING MATERIALS OR TO MATERIALS FOR MOULDS, REINFORCEMENTS, FILLERS OR PREFORMED PARTS, e.g. INSERTS
- B29K2105/00—Condition, form or state of moulded material or of the material to be shaped
- B29K2105/0058—Liquid or visquous
- B29K2105/0073—Solution
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08J—WORKING-UP; GENERAL PROCESSES OF COMPOUNDING; AFTER-TREATMENT NOT COVERED BY SUBCLASSES C08B, C08C, C08F, C08G or C08H
- C08J2301/00—Characterised by the use of cellulose, modified cellulose or cellulose derivatives
- C08J2301/08—Cellulose derivatives
- C08J2301/14—Mixed esters

Landscapes

Engineering & Computer Science (AREA)
Chemical & Material Sciences (AREA)
Manufacturing & Machinery (AREA)
Medicinal Chemistry (AREA)
Health & Medical Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Materials Engineering (AREA)
Polymers & Plastics (AREA)
Organic Chemistry (AREA)
Mechanical Engineering (AREA)
Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Preparing Plates And Mask In Photomechanical Process (AREA)
Laminated Bodies (AREA)
Manufacture Of Macromolecular Shaped Articles (AREA)

GB08523609A 1984-10-16 1985-09-25 Pellicle structure for transmission of mid ultraviolet light Expired GB2165545B (en)

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
US66157784A	1984-10-16	1984-10-16

Publications (3)

Publication Number	Publication Date
GB8523609D0 GB8523609D0 (en)	1985-10-30
GB2165545A GB2165545A (en)	1986-04-16
GB2165545B true GB2165545B (en)	1988-03-30

Family

ID=24654183

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
GB08523609A Expired GB2165545B (en)	1984-10-16	1985-09-25	Pellicle structure for transmission of mid ultraviolet light

Country Status (5)

Country	Link
JP (1)	JPH065383B2 (en)
DE (1)	DE3536708A1 (en)
FR (1)	FR2573219B1 (en)
GB (1)	GB2165545B (en)
IT (1)	IT1187747B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
CA1330860C (en) *	1987-10-26	1994-07-26	Muneyuki Matsumoto	Dust-proof film
JP5950467B2 (en) *	2013-09-24	2016-07-13	信越化学工業株式会社	Pellicle

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
GB716398A (en) *	1952-07-07	1954-10-06	Rose Rand	Improvements in or relating to purses or handbags
US3549248A (en) *	1967-12-15	1970-12-22	Polaroid Corp	Optical devices comprising cellulose acetate and cellulose acetate butyrate
US4453828A (en) *	1981-12-02	1984-06-12	Advanced Semiconductor Products, Inc.	Apparatus and methods for measuring the optical thickness and index of refraction of thin, optical membranes
JPS58219023A (en) *	1982-06-15	1983-12-20	Daicel Chem Ind Ltd	Manufacture of resin membrane
US4482591A (en) *	1983-03-08	1984-11-13	J. T. Baker Chemical Company	Polyvinyl butyrate pellicle compositions and pellicles thereof for projection printing

1985
- 1985-09-25 GB GB08523609A patent/GB2165545B/en not_active Expired
- 1985-10-02 IT IT22329/85A patent/IT1187747B/en active
- 1985-10-03 FR FR858514692A patent/FR2573219B1/en not_active Expired
- 1985-10-15 DE DE19853536708 patent/DE3536708A1/en not_active Withdrawn
- 1985-10-16 JP JP23088085A patent/JPH065383B2/en not_active Expired - Lifetime

Also Published As

Publication number	Publication date
GB8523609D0 (en)	1985-10-30
IT1187747B (en)	1987-12-23
JPS61106243A (en)	1986-05-24
GB2165545A (en)	1986-04-16
FR2573219A1 (en)	1986-05-16
DE3536708A1 (en)	1986-04-17
JPH065383B2 (en)	1994-01-19
FR2573219B1 (en)	1989-02-03
IT8522329A0 (en)	1985-10-02

Publication	Publication Date	Title
GB2153151B (en)	1988-04-20	Optical repeaters
GB2132378B (en)	1986-05-21	Illumination of optical instruments
AU575632B2 (en)	1988-08-04	Optical multiplexer/demultiplexer
GB8409094D0 (en)	1984-05-16	Optical fibre
AU6661286A (en)	1987-07-30	Actinic light curable composition
GB8313484D0 (en)	1983-06-22	Optical waveguide
GB8410895D0 (en)	1984-06-06	Optical glass
AU563241B2 (en)	1987-07-02	Optical fibre
GB2137981B (en)	1986-12-03	Optical glass
AU575675B2 (en)	1988-08-04	Optical multiplexer/demultiplexer
AU575387B2 (en)	1988-07-28	Quartz optical fibre
GB8328292D0 (en)	1983-11-23	Optical fibre fabrication
AU2425884A (en)	1984-08-16	Optical fibre manufacture
AU1720483A (en)	1984-02-02	Method of making glass optical fiber
GB8328871D0 (en)	1983-11-30	Optical glass
GB2145711B (en)	1987-05-07	Optical glass
AU2846284A (en)	1984-11-29	Optical fibre manufacture
AU538365B2 (en)	1984-08-09	Optical readhead
GB8514619D0 (en)	1985-07-10	Manufacture of optical components
AU3625084A (en)	1985-06-27	Optical multiplexer/demultiplexer
GB2165545B (en)	1988-03-30	Pellicle structure for transmission of mid ultraviolet light
AU576502B2 (en)	1988-09-01	Optical fibre manufacture
GB2164137B (en)	1987-07-29	Hyperbaric light
GB8328293D0 (en)	1983-11-23	Optical fibre fabrication
AU540429B2 (en)	1984-11-15	Optical readhead

Legal Events

Date	Code	Title	Description
1987-09-30	732	Registration of transactions, instruments or events in the register (sect. 32/1977)
1998-07-22	732E	Amendments to the register in respect of changes of name or changes affecting rights (sect. 32/1977)
1999-05-12	PCNP	Patent ceased through non-payment of renewal fee	Effective date: 19980925