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GB201616787D0 - Measurement apparatus and methods - Google Patents

Measurement apparatus and methods

Info

Publication number
GB201616787D0
GB201616787D0 GBGB1616787.6A GB201616787A GB201616787D0 GB 201616787 D0 GB201616787 D0 GB 201616787D0 GB 201616787 A GB201616787 A GB 201616787A GB 201616787 D0 GB201616787 D0 GB 201616787D0
Authority
GB
United Kingdom
Prior art keywords
methods
measurement apparatus
measurement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GBGB1616787.6A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Renishaw PLC
Original Assignee
Renishaw PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Renishaw PLC filed Critical Renishaw PLC
Priority to GBGB1616787.6A priority Critical patent/GB201616787D0/en
Publication of GB201616787D0 publication Critical patent/GB201616787D0/en
Priority to PCT/GB2017/052923 priority patent/WO2018065756A1/en
Priority to GB1903332.3A priority patent/GB2568190A/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/44—Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274—Calibration, base line adjustment, drift correction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65—Raman scattering

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Biochemistry (AREA)
  • Theoretical Computer Science (AREA)
  • Engineering & Computer Science (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
  • Radar Systems Or Details Thereof (AREA)
  • Indication And Recording Devices For Special Purposes And Tariff Metering Devices (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
GBGB1616787.6A 2016-10-03 2016-10-03 Measurement apparatus and methods Ceased GB201616787D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GBGB1616787.6A GB201616787D0 (en) 2016-10-03 2016-10-03 Measurement apparatus and methods
PCT/GB2017/052923 WO2018065756A1 (en) 2016-10-03 2017-09-29 Apparatus and method for removing noise from measured data
GB1903332.3A GB2568190A (en) 2016-10-03 2017-09-29 Apparatus and method for removing noise from measured data

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB1616787.6A GB201616787D0 (en) 2016-10-03 2016-10-03 Measurement apparatus and methods

Publications (1)

Publication Number Publication Date
GB201616787D0 true GB201616787D0 (en) 2016-11-16

Family

ID=57571241

Family Applications (2)

Application Number Title Priority Date Filing Date
GBGB1616787.6A Ceased GB201616787D0 (en) 2016-10-03 2016-10-03 Measurement apparatus and methods
GB1903332.3A Withdrawn GB2568190A (en) 2016-10-03 2017-09-29 Apparatus and method for removing noise from measured data

Family Applications After (1)

Application Number Title Priority Date Filing Date
GB1903332.3A Withdrawn GB2568190A (en) 2016-10-03 2017-09-29 Apparatus and method for removing noise from measured data

Country Status (2)

Country Link
GB (2) GB201616787D0 (en)
WO (1) WO2018065756A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112368541B (en) * 2018-07-18 2023-06-27 诺威有限公司 Time domain optical metrology and inspection of semiconductor devices
GB201817028D0 (en) 2018-10-19 2018-12-05 Renishaw Plc Spectroscopic apparatus and methods
CN113109318B (en) * 2021-03-26 2022-05-10 中国科学院西安光学精密机械研究所 Raman spectrum quantitative analysis method and system based on spectral peak height direct extraction
US20250012737A1 (en) * 2021-11-24 2025-01-09 Onto Innovation Inc. Optical metrology with influence map of unknown section
CN117825353B (en) * 2023-12-28 2024-07-30 上海如海光电科技有限公司 A method for removing matrix spectrum from mixture system based on MCR-ALS

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6072576A (en) * 1996-12-31 2000-06-06 Exxon Chemical Patents Inc. On-line control of a chemical process plant
US8570507B1 (en) * 2012-09-06 2013-10-29 Bruker Optics, Inc. Method and apparatus for acquiring Raman spectra without background interferences

Also Published As

Publication number Publication date
WO2018065756A1 (en) 2018-04-12
GB2568190A (en) 2019-05-08
GB201903332D0 (en) 2019-04-24

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)