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GB201509386D0 - Vacuum pump - Google Patents

Vacuum pump

Info

Publication number
GB201509386D0
GB201509386D0 GBGB1509386.7A GB201509386A GB201509386D0 GB 201509386 D0 GB201509386 D0 GB 201509386D0 GB 201509386 A GB201509386 A GB 201509386A GB 201509386 D0 GB201509386 D0 GB 201509386D0
Authority
GB
United Kingdom
Prior art keywords
vacuum pump
vacuum
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
GBGB1509386.7A
Other versions
GB2538962B (en
GB2538962A (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Ltd
Original Assignee
Edwards Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Ltd filed Critical Edwards Ltd
Priority to GB1509386.7A priority Critical patent/GB2538962B/en
Publication of GB201509386D0 publication Critical patent/GB201509386D0/en
Priority to CA2987510A priority patent/CA2987510A1/en
Priority to EP16723492.1A priority patent/EP3303846B1/en
Priority to US15/578,485 priority patent/US20180163732A1/en
Priority to JP2017562699A priority patent/JP2018516338A/en
Priority to PCT/GB2016/051408 priority patent/WO2016193664A1/en
Publication of GB2538962A publication Critical patent/GB2538962A/en
Application granted granted Critical
Publication of GB2538962B publication Critical patent/GB2538962B/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/522—Casings; Connections of working fluid for axial pumps especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
GB1509386.7A 2015-06-01 2015-06-01 Vacuum pump Expired - Fee Related GB2538962B (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB1509386.7A GB2538962B (en) 2015-06-01 2015-06-01 Vacuum pump
JP2017562699A JP2018516338A (en) 2015-06-01 2016-05-16 Vacuum pump
EP16723492.1A EP3303846B1 (en) 2015-06-01 2016-05-16 Vacuum pump
US15/578,485 US20180163732A1 (en) 2015-06-01 2016-05-16 Vacuum pump
CA2987510A CA2987510A1 (en) 2015-06-01 2016-05-16 Vacuum pump
PCT/GB2016/051408 WO2016193664A1 (en) 2015-06-01 2016-05-16 Vacuum pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB1509386.7A GB2538962B (en) 2015-06-01 2015-06-01 Vacuum pump

Publications (3)

Publication Number Publication Date
GB201509386D0 true GB201509386D0 (en) 2015-07-15
GB2538962A GB2538962A (en) 2016-12-07
GB2538962B GB2538962B (en) 2019-06-26

Family

ID=53677527

Family Applications (1)

Application Number Title Priority Date Filing Date
GB1509386.7A Expired - Fee Related GB2538962B (en) 2015-06-01 2015-06-01 Vacuum pump

Country Status (6)

Country Link
US (1) US20180163732A1 (en)
EP (1) EP3303846B1 (en)
JP (1) JP2018516338A (en)
CA (1) CA2987510A1 (en)
GB (1) GB2538962B (en)
WO (1) WO2016193664A1 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP3296571B1 (en) * 2017-07-21 2021-11-03 Pfeiffer Vacuum Gmbh Vacuum pump
EP3564538B1 (en) * 2019-02-20 2021-04-07 Pfeiffer Vacuum Gmbh Vacuum system and method for manufacturing the same
GB2584603B (en) 2019-04-11 2021-10-13 Edwards Ltd Vacuum chamber module
GB2592375A (en) * 2020-02-25 2021-09-01 Edwards Vacuum Llc Flange for a vacuum apparatus
GB2592619A (en) * 2020-03-03 2021-09-08 Edwards Ltd Vacuum system

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2924292A (en) * 1956-02-16 1960-02-09 Cons Electrodynamics Corp Apparatus for pumping
JPH01277698A (en) * 1988-04-30 1989-11-08 Nippon Ferrofluidics Kk Combined vacuum pump
US5733104A (en) * 1992-12-24 1998-03-31 Balzers-Pfeiffer Gmbh Vacuum pump system
DE10211134C1 (en) * 2002-03-14 2003-08-14 Schwerionenforsch Gmbh Turbomolecular pump for low pressure applications has coaxial central opening providing free access to center
US7278831B2 (en) * 2003-12-31 2007-10-09 The Boc Group, Inc. Apparatus and method for control, pumping and abatement for vacuum process chambers
GB0411426D0 (en) * 2004-05-21 2004-06-23 Boc Group Plc Pumping arrangement
GB0414316D0 (en) * 2004-06-25 2004-07-28 Boc Group Plc Vacuum pump
GB0424198D0 (en) * 2004-11-01 2004-12-01 Boc Group Plc Pumping arrangement
DE102008009715A1 (en) * 2008-02-19 2009-08-20 Oerlikon Leybold Vacuum Gmbh Vacuum pumping system and use of a multi-stage vacuum pump
GB201005459D0 (en) * 2010-03-31 2010-05-19 Edwards Ltd Vacuum pumping system
FR2984972A1 (en) * 2011-12-26 2013-06-28 Adixen Vacuum Products ADAPTER FOR VACUUM PUMPS AND ASSOCIATED PUMPING DEVICE
GB201314841D0 (en) * 2013-08-20 2013-10-02 Thermo Fisher Scient Bremen Multiple port vacuum pump system

Also Published As

Publication number Publication date
CA2987510A1 (en) 2016-12-08
US20180163732A1 (en) 2018-06-14
EP3303846B1 (en) 2020-09-30
GB2538962B (en) 2019-06-26
JP2018516338A (en) 2018-06-21
EP3303846A1 (en) 2018-04-11
WO2016193664A1 (en) 2016-12-08
GB2538962A (en) 2016-12-07

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Legal Events

Date Code Title Description
PCNP Patent ceased through non-payment of renewal fee

Effective date: 20230601