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GB1391063A - Apparatus for vacuum deposition - Google Patents

Apparatus for vacuum deposition

Info

Publication number
GB1391063A
GB1391063A GB574571A GB574571A GB1391063A GB 1391063 A GB1391063 A GB 1391063A GB 574571 A GB574571 A GB 574571A GB 574571 A GB574571 A GB 574571A GB 1391063 A GB1391063 A GB 1391063A
Authority
GB
United Kingdom
Prior art keywords
planet
annulus
sun wheel
different
disc
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB574571A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to GB574571A priority Critical patent/GB1391063A/en
Priority to US00164336A priority patent/US3783821A/en
Priority to IT6765272A priority patent/IT952883B/en
Priority to DE19722209857 priority patent/DE2209857A1/en
Priority to FR7207072A priority patent/FR2128477A1/fr
Priority to NL7202729A priority patent/NL7202729A/xx
Publication of GB1391063A publication Critical patent/GB1391063A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C23C14/505—Substrate holders for rotation of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

1391063 Vapour-deposition apparatus C D DOBSON 14 April 1972 [2 March 1971 17 June 1971] 5745/71 and 28357/71 Heading C7F Vacuum deposition apparatus includes within a vessel 11 a coating material source, and workpiece support means comprising a rotary "planetary" system comprising a lower annulus 20, an upper smaller diameter fixed sun wheel or disc, and planet members 25, each planet member being provided with at least one work-holder for an article 26 to be coated and engaging and being supported by annulus 20 and the sun wheel, and power-operated means 35 for causing relative rotation between the sun wheel and disc. The sun wheel may be inclined as shown, and fixedly supported on bent legs 32 attached to annulus 16, which also supports bearings 18 for annulus assembly 17, 19, 20 rotation of this assembly being caused by drive 14, gear-box 36, and friction wheel 35. Members 40 serve to hold down and separate the planets 25. In a modification, Figs. 4 and 5 (not shown) each planet is arranged so that individual substrate holders can rotate epicyclically relative to the planet, which itself rotates epicyclically in the manner described above. Different sun wheels of different sizes may be provided for different planets 25.
GB574571A 1971-03-02 1971-03-02 Apparatus for vacuum deposition Expired GB1391063A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB574571A GB1391063A (en) 1971-03-02 1971-03-02 Apparatus for vacuum deposition
US00164336A US3783821A (en) 1971-03-02 1971-07-20 Planetary workholders
IT6765272A IT952883B (en) 1971-03-02 1972-03-01 DEVICE FOR SUPPORTING AND MOVING PIECES INSIDE AN VACUUM STORAGE APPLIANCE
DE19722209857 DE2209857A1 (en) 1971-03-02 1972-03-01 Workpiece carrier for a vacuum coating system
FR7207072A FR2128477A1 (en) 1971-03-02 1972-03-01
NL7202729A NL7202729A (en) 1971-03-02 1972-03-01

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GB574571A GB1391063A (en) 1971-03-02 1971-03-02 Apparatus for vacuum deposition
GB2835771 1971-06-17

Publications (1)

Publication Number Publication Date
GB1391063A true GB1391063A (en) 1975-04-16

Family

ID=26240120

Family Applications (1)

Application Number Title Priority Date Filing Date
GB574571A Expired GB1391063A (en) 1971-03-02 1971-03-02 Apparatus for vacuum deposition

Country Status (1)

Country Link
GB (1) GB1391063A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2499080C2 (en) * 2008-06-11 2013-11-20 Эрликон Трейдинг Аг, Трюббах Cassette for processed parts

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
RU2499080C2 (en) * 2008-06-11 2013-11-20 Эрликон Трейдинг Аг, Трюббах Cassette for processed parts

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Legal Events

Date Code Title Description
PS Patent sealed
PLNP Patent lapsed through nonpayment of renewal fees