GB1379830A - Process for bonding titanium or tantalum to copper o' iron - Google Patents
Process for bonding titanium or tantalum to copper o' ironInfo
- Publication number
- GB1379830A GB1379830A GB5470872A GB5470872A GB1379830A GB 1379830 A GB1379830 A GB 1379830A GB 5470872 A GB5470872 A GB 5470872A GB 5470872 A GB5470872 A GB 5470872A GB 1379830 A GB1379830 A GB 1379830A
- Authority
- GB
- United Kingdom
- Prior art keywords
- copper
- tantalum
- iron
- sputtering
- bonding titanium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010949 copper Substances 0.000 title abstract 6
- 229910052802 copper Inorganic materials 0.000 title abstract 4
- 229910052742 iron Inorganic materials 0.000 title abstract 4
- 229910052715 tantalum Inorganic materials 0.000 title abstract 3
- 229910052719 titanium Inorganic materials 0.000 title abstract 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 title 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 title 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 title 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 title 1
- 239000010936 titanium Substances 0.000 title 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 abstract 2
- 238000004544 sputter deposition Methods 0.000 abstract 2
- RPNUMPOLZDHAAY-UHFFFAOYSA-N Diethylenetriamine Chemical compound NCCNCCN RPNUMPOLZDHAAY-UHFFFAOYSA-N 0.000 abstract 1
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 abstract 1
- BFNBIHQBYMNNAN-UHFFFAOYSA-N ammonium sulfate Chemical compound N.N.OS(O)(=O)=O BFNBIHQBYMNNAN-UHFFFAOYSA-N 0.000 abstract 1
- 229910052921 ammonium sulfate Inorganic materials 0.000 abstract 1
- 239000001166 ammonium sulphate Substances 0.000 abstract 1
- 235000011130 ammonium sulphate Nutrition 0.000 abstract 1
- 238000004140 cleaning Methods 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000009713 electroplating Methods 0.000 abstract 1
- 239000001117 sulphuric acid Substances 0.000 abstract 1
- 235000011149 sulphuric acid Nutrition 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/02—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material
- C23C28/023—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings only including layers of metallic material only coatings of metal elements only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Electrolytic Production Of Metals (AREA)
- Laminated Bodies (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
1379830 Sputtering Cu or Fe; electrodepositing Cu RHONE-PROGIL 27 Nov 1972 [24 Dec 1971] 54708/72 Headings C7B and C7F Fe or Cu is bonded to Ti or Ta by mechanically or chemically cleaning the Ti or Ta, subjecting to ionic bombardment in a rare gas atmosphere, and then sputtering Fe or Cu at a temperature below 500‹C (300 to 400‹C). A movable shield is used during the ionic bombardment. The Cu coating may be thickened by electroplating, e.g. in a copper sulphate, sulphuric acid or a copper sulphate, diethylene-triamine, ammonium sulphate bath.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR7147874A FR2164546B1 (en) | 1971-12-24 | 1971-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1379830A true GB1379830A (en) | 1975-01-08 |
Family
ID=9088534
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB5470872A Expired GB1379830A (en) | 1971-12-24 | 1972-11-27 | Process for bonding titanium or tantalum to copper o' iron |
Country Status (14)
| Country | Link |
|---|---|
| US (1) | US3835007A (en) |
| JP (1) | JPS521697B2 (en) |
| AT (1) | AT318344B (en) |
| BE (1) | BE793268A (en) |
| BR (1) | BR7209084D0 (en) |
| CA (1) | CA991586A (en) |
| CH (1) | CH567105A5 (en) |
| DE (1) | DE2263013A1 (en) |
| ES (1) | ES409995A1 (en) |
| FR (1) | FR2164546B1 (en) |
| GB (1) | GB1379830A (en) |
| IT (1) | IT973575B (en) |
| NL (1) | NL7215746A (en) |
| SE (1) | SE374764B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4027362A1 (en) * | 1989-09-28 | 1991-04-11 | Daido Metal Co Ltd | METHOD FOR PRODUCING A SLIDING BEARING |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2353942A1 (en) * | 1973-10-27 | 1975-05-07 | Bosch Gmbh Robert | PROCESS FOR PRODUCING A SOLDER-RESISTANT COPPER LAYER |
| US3986944A (en) * | 1975-06-27 | 1976-10-19 | Honeywell Information Systems, Inc. | Method for obtaining adhesion of multilayer thin films |
| US4281235A (en) * | 1979-10-09 | 1981-07-28 | Tri Delta Industries, Inc. | Method for welding ferrous alloys to aluminum and aluminum alloys or refractory metals |
| US4328080A (en) * | 1980-10-24 | 1982-05-04 | General Electric Company | Method of making a catalytic electrode |
| US4964962A (en) * | 1988-10-08 | 1990-10-23 | Matsushita Electric Works, Ltd. | Method for forming conducting metal layer on inorganic substrate |
| US20050045469A1 (en) * | 2003-08-29 | 2005-03-03 | Northrop Grumman Corporation | Titanium foil metallization product and process |
| US20090160309A1 (en) * | 2005-10-15 | 2009-06-25 | Dirk Burth | Electron beam exit window |
| US7968829B2 (en) * | 2006-12-28 | 2011-06-28 | United Technologies Corporation | Electrical connection for titanium metal heater in jet turbine applications |
| GB0715258D0 (en) * | 2007-08-06 | 2007-09-12 | Univ Leuven Kath | Deposition from ionic liquids |
-
0
- BE BE793268D patent/BE793268A/en unknown
-
1971
- 1971-12-24 FR FR7147874A patent/FR2164546B1/fr not_active Expired
-
1972
- 1972-11-16 IT IT54054/72A patent/IT973575B/en active
- 1972-11-21 NL NL7215746A patent/NL7215746A/xx unknown
- 1972-11-27 SE SE7215416A patent/SE374764B/xx unknown
- 1972-11-27 GB GB5470872A patent/GB1379830A/en not_active Expired
- 1972-12-13 US US00314858A patent/US3835007A/en not_active Expired - Lifetime
- 1972-12-20 CA CA159,508A patent/CA991586A/en not_active Expired
- 1972-12-21 JP JP47128796A patent/JPS521697B2/ja not_active Expired
- 1972-12-21 AT AT1093272A patent/AT318344B/en not_active IP Right Cessation
- 1972-12-22 DE DE2263013A patent/DE2263013A1/en active Pending
- 1972-12-22 BR BR9084/72A patent/BR7209084D0/en unknown
- 1972-12-22 CH CH1879872A patent/CH567105A5/xx not_active IP Right Cessation
- 1972-12-23 ES ES409995A patent/ES409995A1/en not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4027362A1 (en) * | 1989-09-28 | 1991-04-11 | Daido Metal Co Ltd | METHOD FOR PRODUCING A SLIDING BEARING |
| GB2238089A (en) * | 1989-09-28 | 1991-05-22 | Daido Metal Co | Method of producing a plain bearing |
| GB2238089B (en) * | 1989-09-28 | 1994-04-06 | Daido Metal Co | Composite bearings |
Also Published As
| Publication number | Publication date |
|---|---|
| BE793268A (en) | 1973-06-22 |
| SE374764B (en) | 1975-03-17 |
| BR7209084D0 (en) | 1973-09-25 |
| AT318344B (en) | 1974-10-10 |
| NL7215746A (en) | 1973-06-26 |
| CA991586A (en) | 1976-06-22 |
| DE2263013A1 (en) | 1973-06-28 |
| FR2164546A1 (en) | 1973-08-03 |
| IT973575B (en) | 1974-06-10 |
| JPS4872044A (en) | 1973-09-28 |
| FR2164546B1 (en) | 1974-06-07 |
| ES409995A1 (en) | 1975-12-01 |
| JPS521697B2 (en) | 1977-01-17 |
| CH567105A5 (en) | 1975-09-30 |
| US3835007A (en) | 1974-09-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PCNP | Patent ceased through non-payment of renewal fee |