GB1003845A - Improvements in or relating to heating by means of electron beams - Google Patents
Improvements in or relating to heating by means of electron beamsInfo
- Publication number
- GB1003845A GB1003845A GB1694662A GB1694662A GB1003845A GB 1003845 A GB1003845 A GB 1003845A GB 1694662 A GB1694662 A GB 1694662A GB 1694662 A GB1694662 A GB 1694662A GB 1003845 A GB1003845 A GB 1003845A
- Authority
- GB
- United Kingdom
- Prior art keywords
- crucible
- coating
- ceramic
- molybdenum
- tungsten
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000010894 electron beam technology Methods 0.000 title abstract 2
- 238000010438 heat treatment Methods 0.000 title 1
- 239000011248 coating agent Substances 0.000 abstract 3
- 238000000576 coating method Methods 0.000 abstract 3
- 229910052751 metal Inorganic materials 0.000 abstract 3
- 239000002184 metal Substances 0.000 abstract 3
- 229910052582 BN Inorganic materials 0.000 abstract 2
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 abstract 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 abstract 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 abstract 2
- 230000008020 evaporation Effects 0.000 abstract 2
- 238000001704 evaporation Methods 0.000 abstract 2
- 229910052750 molybdenum Inorganic materials 0.000 abstract 2
- 239000011733 molybdenum Substances 0.000 abstract 2
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 abstract 1
- BABYXVRSXZSKEF-UHFFFAOYSA-N [W+4].[O-2].[Th+4].[O-2].[O-2].[O-2] Chemical compound [W+4].[O-2].[Th+4].[O-2].[O-2].[O-2] BABYXVRSXZSKEF-UHFFFAOYSA-N 0.000 abstract 1
- 239000004411 aluminium Substances 0.000 abstract 1
- 229910052782 aluminium Inorganic materials 0.000 abstract 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052787 antimony Inorganic materials 0.000 abstract 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 abstract 1
- 229910052804 chromium Inorganic materials 0.000 abstract 1
- 239000011651 chromium Substances 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 239000010931 gold Substances 0.000 abstract 1
- 229910052738 indium Inorganic materials 0.000 abstract 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 abstract 1
- 239000000463 material Substances 0.000 abstract 1
- 229910052759 nickel Inorganic materials 0.000 abstract 1
- 229910052763 palladium Inorganic materials 0.000 abstract 1
- 229910052710 silicon Inorganic materials 0.000 abstract 1
- 239000010703 silicon Substances 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 239000004332 silver Substances 0.000 abstract 1
- 229910052718 tin Inorganic materials 0.000 abstract 1
- 239000011135 tin Substances 0.000 abstract 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 239000010937 tungsten Substances 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/28—Vacuum evaporation by wave energy or particle radiation
- C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
- H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Toxicology (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
In apparatus for coating by evaporation the crucible which heated by an electron beam (see Division H1) consists of electrically conductive ceramic-metal composition, e.g. alumina-molybdenum or thorium oxide-tungsten, or of ceramic in contact with an electrically conducting member or coating, e.g. a molybdenum or tungsten crucible may be provided with an inner alumina or boron nitride liner, or a metal coating may be sprayed on a ceramic crucible. The crucible may be supplied from a continuously advancing metal feed or from a hopper. Suitable materials for evaporation mentioned are gold, silicon, silicon monoxide, palladium, copper, silver, nickel, tin, antimony, lead, chromium, indium and also aluminium which however requires the use of a boron nitride insert in the crucible.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1694662A GB1003845A (en) | 1962-05-03 | 1962-05-03 | Improvements in or relating to heating by means of electron beams |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1694662A GB1003845A (en) | 1962-05-03 | 1962-05-03 | Improvements in or relating to heating by means of electron beams |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1003845A true GB1003845A (en) | 1965-09-08 |
Family
ID=10086514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB1694662A Expired GB1003845A (en) | 1962-05-03 | 1962-05-03 | Improvements in or relating to heating by means of electron beams |
Country Status (1)
| Country | Link |
|---|---|
| GB (1) | GB1003845A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3136465A1 (en) * | 1981-09-15 | 1983-03-31 | Siemens AG, 1000 Berlin und 8000 München | Appliance and method for coating substrates by vapour deposition |
| FR2623819A1 (en) * | 1987-11-26 | 1989-06-02 | Thomson Csf | Electron bombardment oven for vacuum evaporation |
| EP3012345A1 (en) * | 2011-09-29 | 2016-04-27 | Nitride Solutions Inc. | Inorganic materials, methods and apparatus for making same, and uses thereof |
| CN115094389A (en) * | 2022-07-11 | 2022-09-23 | 威科赛乐微电子股份有限公司 | Method for electron beam evaporation plating of palladium |
-
1962
- 1962-05-03 GB GB1694662A patent/GB1003845A/en not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3136465A1 (en) * | 1981-09-15 | 1983-03-31 | Siemens AG, 1000 Berlin und 8000 München | Appliance and method for coating substrates by vapour deposition |
| FR2623819A1 (en) * | 1987-11-26 | 1989-06-02 | Thomson Csf | Electron bombardment oven for vacuum evaporation |
| EP3012345A1 (en) * | 2011-09-29 | 2016-04-27 | Nitride Solutions Inc. | Inorganic materials, methods and apparatus for making same, and uses thereof |
| CN115094389A (en) * | 2022-07-11 | 2022-09-23 | 威科赛乐微电子股份有限公司 | Method for electron beam evaporation plating of palladium |
| CN115094389B (en) * | 2022-07-11 | 2023-12-29 | 威科赛乐微电子股份有限公司 | Method for evaporating palladium by electron beam |
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