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GB0701470D0 - Improved Particle Beam Generator - Google Patents

Improved Particle Beam Generator

Info

Publication number
GB0701470D0
GB0701470D0 GB0701470A GB0701470A GB0701470D0 GB 0701470 D0 GB0701470 D0 GB 0701470D0 GB 0701470 A GB0701470 A GB 0701470A GB 0701470 A GB0701470 A GB 0701470A GB 0701470 D0 GB0701470 D0 GB 0701470D0
Authority
GB
United Kingdom
Prior art keywords
particle beam
beam generator
improved particle
improved
generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0701470A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nfab Ltd
Original Assignee
Nfab Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nfab Ltd filed Critical Nfab Ltd
Priority to GB0701470A priority Critical patent/GB0701470D0/en
Publication of GB0701470D0 publication Critical patent/GB0701470D0/en
Priority to US12/523,984 priority patent/US20100187433A1/en
Priority to JP2009546818A priority patent/JP2010517233A/en
Priority to CN200880003237A priority patent/CN101647085A/en
Priority to PCT/GB2008/050050 priority patent/WO2008090380A1/en
Priority to EP08702133A priority patent/EP2126955A1/en
Ceased legal-status Critical Current

Links

GB0701470A 2007-01-25 2007-01-25 Improved Particle Beam Generator Ceased GB0701470D0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
GB0701470A GB0701470D0 (en) 2007-01-25 2007-01-25 Improved Particle Beam Generator
US12/523,984 US20100187433A1 (en) 2007-01-25 2008-01-24 Improved particle beam generator
JP2009546818A JP2010517233A (en) 2007-01-25 2008-01-24 Improved particle beam generator
CN200880003237A CN101647085A (en) 2007-01-25 2008-01-24 Improved Particle Beam Generator
PCT/GB2008/050050 WO2008090380A1 (en) 2007-01-25 2008-01-24 Improved particle beam generator
EP08702133A EP2126955A1 (en) 2007-01-25 2008-01-24 Improved particle beam generator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0701470A GB0701470D0 (en) 2007-01-25 2007-01-25 Improved Particle Beam Generator

Publications (1)

Publication Number Publication Date
GB0701470D0 true GB0701470D0 (en) 2007-03-07

Family

ID=37872801

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0701470A Ceased GB0701470D0 (en) 2007-01-25 2007-01-25 Improved Particle Beam Generator

Country Status (2)

Country Link
CN (1) CN101647085A (en)
GB (1) GB0701470D0 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105229772B (en) * 2013-05-15 2017-03-22 学校法人冲绳科学技术大学院大学学园 LEED detection module and SEM with same
CN106783466B (en) * 2016-12-27 2019-04-02 四川智研科技有限公司 A kind of accelerated electron beam stream optical texture
WO2019224872A1 (en) * 2018-05-21 2019-11-28 株式会社日立ハイテクノロジーズ Electron beam application device
US11562879B2 (en) * 2020-09-15 2023-01-24 Nuflare Technology, Inc. Low-blur electrostatic transfer lens for multi-beam electron gun

Also Published As

Publication number Publication date
CN101647085A (en) 2010-02-10

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)