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GB0513714D0 - Method and apparatus for evacuating an enclosure - Google Patents

Method and apparatus for evacuating an enclosure

Info

Publication number
GB0513714D0
GB0513714D0 GB0513714A GB0513714A GB0513714D0 GB 0513714 D0 GB0513714 D0 GB 0513714D0 GB 0513714 A GB0513714 A GB 0513714A GB 0513714 A GB0513714 A GB 0513714A GB 0513714 D0 GB0513714 D0 GB 0513714D0
Authority
GB
United Kingdom
Prior art keywords
evacuating
enclosure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
GB0513714A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BOC Group Ltd
Original Assignee
BOC Group Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BOC Group Ltd filed Critical BOC Group Ltd
Priority to GB0513714A priority Critical patent/GB0513714D0/en
Publication of GB0513714D0 publication Critical patent/GB0513714D0/en
Priority to PCT/EP2006/062871 priority patent/WO2007003479A1/en
Priority to TW095122511A priority patent/TW200710331A/en
Ceased legal-status Critical Current

Links

GB0513714A 2005-07-05 2005-07-05 Method and apparatus for evacuating an enclosure Ceased GB0513714D0 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
GB0513714A GB0513714D0 (en) 2005-07-05 2005-07-05 Method and apparatus for evacuating an enclosure
PCT/EP2006/062871 WO2007003479A1 (en) 2005-07-05 2006-06-02 Method and apparatus for evacuating an enclosure
TW095122511A TW200710331A (en) 2005-07-05 2006-06-22 Method and apparatus for evacuating an enclosure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB0513714A GB0513714D0 (en) 2005-07-05 2005-07-05 Method and apparatus for evacuating an enclosure

Publications (1)

Publication Number Publication Date
GB0513714D0 true GB0513714D0 (en) 2005-08-10

Family

ID=34856655

Family Applications (1)

Application Number Title Priority Date Filing Date
GB0513714A Ceased GB0513714D0 (en) 2005-07-05 2005-07-05 Method and apparatus for evacuating an enclosure

Country Status (3)

Country Link
GB (1) GB0513714D0 (en)
TW (1) TW200710331A (en)
WO (1) WO2007003479A1 (en)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09306972A (en) * 1996-05-17 1997-11-28 C Bui Res:Kk Semiconductor manufacturing equipment
JP4531557B2 (en) * 2002-05-21 2010-08-25 エーエスエム アメリカ インコーポレイテッド Reduction of cross-contamination between chambers in semiconductor processing tools
GB0418771D0 (en) * 2004-08-20 2004-09-22 Boc Group Plc Evacuation of a load lock enclosure

Also Published As

Publication number Publication date
TW200710331A (en) 2007-03-16
WO2007003479A1 (en) 2007-01-11

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Legal Events

Date Code Title Description
AT Applications terminated before publication under section 16(1)