[go: up one dir, main page]

FR3139904B1 - Dispositif de mesure de la contamination gazeuse d’une enceinte de transport de substrats semi-conducteurs et procédé de mesure associé - Google Patents

Dispositif de mesure de la contamination gazeuse d’une enceinte de transport de substrats semi-conducteurs et procédé de mesure associé Download PDF

Info

Publication number
FR3139904B1
FR3139904B1 FR2209474A FR2209474A FR3139904B1 FR 3139904 B1 FR3139904 B1 FR 3139904B1 FR 2209474 A FR2209474 A FR 2209474A FR 2209474 A FR2209474 A FR 2209474A FR 3139904 B1 FR3139904 B1 FR 3139904B1
Authority
FR
France
Prior art keywords
measuring
door
enclosure
transport enclosure
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR2209474A
Other languages
English (en)
Other versions
FR3139904A1 (fr
Inventor
Donovan Lebon
Julien Bounouar
Barillec Olivier Le
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Pfeiffer Vacuum SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum SAS filed Critical Pfeiffer Vacuum SAS
Priority to FR2209474A priority Critical patent/FR3139904B1/fr
Priority to PCT/EP2023/070270 priority patent/WO2024061513A1/fr
Priority to KR1020257009936A priority patent/KR20250069560A/ko
Priority to TW112130109A priority patent/TW202429058A/zh
Publication of FR3139904A1 publication Critical patent/FR3139904A1/fr
Application granted granted Critical
Publication of FR3139904B1 publication Critical patent/FR3139904B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/02—Devices for withdrawing samples
    • G01N1/22—Devices for withdrawing samples in the gaseous state
    • G01N1/2226—Sampling from a closed space, e.g. food package, head space
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67242—Apparatus for monitoring, sorting or marking
    • H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • H01L21/67393—Closed carriers characterised by atmosphere control characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl

Landscapes

  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Biochemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Biomedical Technology (AREA)
  • Molecular Biology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Sampling And Sample Adjustment (AREA)

Abstract

Dispositif de mesure de la contamination gazeuse d’une enceinte de transport de substrats semi-conducteurs et procédé de mesure associé Dispositif de mesure (1) de la contamination gazeuse d’une enceinte de transport (2) pour le convoyage et le stockage atmosphérique d’au moins un substrat semi-conducteur (6), ladite enceinte (2) comprenant une porte (4b) et une coque (4a) pouvant être fermée par la porte (4b) au niveau d’une zone de joint (7), l’enceinte (2) étant munie d’au moins un port de ventilation (9, 11, 13, 15), le dispositif de mesure (1) comprenant au moins un analyseur (29) configuré pour mesurer la concentration d’au moins un contaminant gazeux, le dispositif de mesure (1) comprenant une interface (3) configurée pour s’accoupler à l’enceinte de transport (2), ladite interface (3) comprenant une plateforme (5) en regard de laquelle la porte (4b) de l’enceinte de transport (2) est destinée à s’accoupler en ménageant un interstice entre la plateforme (5) et la porte (4b), le dispositif de mesure (1) comprenant :- une tête de mesure (25) reliée audit au moins un analyseur (29) et configurée pour être accouplée de manière étanche à l’un du, au moins un, port de ventilation (9) de l’enceinte de transport (2),- au moins une buse d’injection (33) configurée pour injecter un gaz contrôlé dans l’interstice formé entre la plateforme (5) et la porte (4b), de sorte que le gaz contrôlé se répande au moins face à la zone de joint (7) entourant la porte (4b). Figure 1
FR2209474A 2022-09-20 2022-09-20 Dispositif de mesure de la contamination gazeuse d’une enceinte de transport de substrats semi-conducteurs et procédé de mesure associé Active FR3139904B1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR2209474A FR3139904B1 (fr) 2022-09-20 2022-09-20 Dispositif de mesure de la contamination gazeuse d’une enceinte de transport de substrats semi-conducteurs et procédé de mesure associé
PCT/EP2023/070270 WO2024061513A1 (fr) 2022-09-20 2023-07-21 Dispositif de mesure de la contamination gazeuse d'un support de transport de substrats semi-conducteurs et procédé de mesure associé
KR1020257009936A KR20250069560A (ko) 2022-09-20 2023-07-21 반도체 기판을 운반하는 캐리어의 기상 오염을 측정하는 측정 장치 및 관련 측정 방법
TW112130109A TW202429058A (zh) 2022-09-20 2023-08-10 用於測量用於輸送半導體基板的載具的氣體污染的裝置及關聯的測量方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR2209474 2022-09-20
FR2209474A FR3139904B1 (fr) 2022-09-20 2022-09-20 Dispositif de mesure de la contamination gazeuse d’une enceinte de transport de substrats semi-conducteurs et procédé de mesure associé

Publications (2)

Publication Number Publication Date
FR3139904A1 FR3139904A1 (fr) 2024-03-22
FR3139904B1 true FR3139904B1 (fr) 2024-08-30

Family

ID=84569668

Family Applications (1)

Application Number Title Priority Date Filing Date
FR2209474A Active FR3139904B1 (fr) 2022-09-20 2022-09-20 Dispositif de mesure de la contamination gazeuse d’une enceinte de transport de substrats semi-conducteurs et procédé de mesure associé

Country Status (4)

Country Link
KR (1) KR20250069560A (fr)
FR (1) FR3139904B1 (fr)
TW (1) TW202429058A (fr)
WO (1) WO2024061513A1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2915831B1 (fr) * 2007-05-04 2009-09-25 Alcatel Lucent Sas Interface d'enceinte de transport
TW200948688A (en) * 2007-12-18 2009-12-01 Entegris Inc Methods and apparatuses for controlling contamination of substrates
FR3040528B1 (fr) * 2015-09-02 2017-09-15 Pfeiffer Vacuum Sas Procede et station de mesure de la contamination d'une boite de transport pour le convoyage et le stockage atmospherique de substrats

Also Published As

Publication number Publication date
WO2024061513A1 (fr) 2024-03-28
FR3139904A1 (fr) 2024-03-22
TW202429058A (zh) 2024-07-16
KR20250069560A (ko) 2025-05-19

Similar Documents

Publication Publication Date Title
US11268876B2 (en) Apparatus for valve-seat inspection and pressure-resistance inspection for valves, and valve
JP7194773B2 (ja) 容器の漏れの検出
FR3139904B1 (fr) Dispositif de mesure de la contamination gazeuse d’une enceinte de transport de substrats semi-conducteurs et procédé de mesure associé
CN105473762B (zh) 基片加工设备
US11378483B2 (en) System and method for determining the integrity of containers by optical measurement
BR112013023313B1 (pt) Dispositivo de detecção de vazamento para embalagens e máquina de embalar
KR102500483B1 (ko) 기판 처리 장치
SE1530046A1 (sv) System and method for determining the integrity of containers by optical measurement
US20230003602A1 (en) Battery pack leakage detection system and detection method based on tracer gas cumulative test
KR101680165B1 (ko) 측정 유닛 및 퍼지 가스의 유량 측정 방법
JP2022533127A (ja) 密封容器からの漏れを検出する方法および装置
CN111512133A (zh) 阀等压力设备的耐压检查方法及其耐压检查装置以及压力设备
TWI779541B (zh) 基板處理裝置
KR101031254B1 (ko) 기밀성 검사 장치
CN113825992A (zh) 用于识别密封容器是否存在泄漏的方法和装置
CN108802276A (zh) 电芯产气测试系统
KR102764260B1 (ko) 스택 어셈블리 검사장치
KR20100016177A (ko) 운송 포드 인터페이스 및 분석 장치
FR3139663B1 (fr) Station et procédé de mesure de la contamination en particules d’une enceinte de transport pour le convoyage et le stockage atmosphérique de plaquettes semi-conductrices
EP4428511A1 (fr) Détecteur de fuite d'hydrogène et procédé de détection de fuites d'hydrogène
US12276572B2 (en) Method and apparatus for ascertaining the presence of cracks in sealed containers
CN216483760U (zh) 产品焊缝检测装置及产品焊缝检测系统
KR102450558B1 (ko) 유연성 제품에 사용되는 레벨링 방법 및 장치
US20250336691A1 (en) Substrate processing apparatus and substrate processing method
FR3130986B1 (fr) Système d’analyse de fluide par chromatographie

Legal Events

Date Code Title Description
PLFP Fee payment

Year of fee payment: 2

PLFP Fee payment

Year of fee payment: 3

PLFP Fee payment

Year of fee payment: 4