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FR3010995B1 - Installation industrielle pour infiltration chimique en phase gazeuse de substrats poreux avec circuit de refroidissement accelere - Google Patents

Installation industrielle pour infiltration chimique en phase gazeuse de substrats poreux avec circuit de refroidissement accelere

Info

Publication number
FR3010995B1
FR3010995B1 FR1359231A FR1359231A FR3010995B1 FR 3010995 B1 FR3010995 B1 FR 3010995B1 FR 1359231 A FR1359231 A FR 1359231A FR 1359231 A FR1359231 A FR 1359231A FR 3010995 B1 FR3010995 B1 FR 3010995B1
Authority
FR
France
Prior art keywords
gas phase
cooling circuit
accelerated cooling
porous substrates
phase chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1359231A
Other languages
English (en)
Other versions
FR3010995A1 (fr
Inventor
Franck Lamouroux
Sebastien Bertrand
Bernard Aguilar
Joel Mano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Ceramics SA
Original Assignee
Herakles SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Herakles SA filed Critical Herakles SA
Priority to FR1359231A priority Critical patent/FR3010995B1/fr
Priority to PCT/FR2014/052317 priority patent/WO2015044562A1/fr
Publication of FR3010995A1 publication Critical patent/FR3010995A1/fr
Application granted granted Critical
Publication of FR3010995B1 publication Critical patent/FR3010995B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/04—Coating on selected surface areas, e.g. using masks
    • C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
    • C23C16/45593—Recirculation of reactive gases
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/46—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for heating the substrate
    • C23C16/463—Cooling of the substrate

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
FR1359231A 2013-09-25 2013-09-25 Installation industrielle pour infiltration chimique en phase gazeuse de substrats poreux avec circuit de refroidissement accelere Active FR3010995B1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FR1359231A FR3010995B1 (fr) 2013-09-25 2013-09-25 Installation industrielle pour infiltration chimique en phase gazeuse de substrats poreux avec circuit de refroidissement accelere
PCT/FR2014/052317 WO2015044562A1 (fr) 2013-09-25 2014-09-17 Installation industrielle pour infiltration chimique en phase gazeuse de substrats poreux avec circuit de refroidissement accelere

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1359231A FR3010995B1 (fr) 2013-09-25 2013-09-25 Installation industrielle pour infiltration chimique en phase gazeuse de substrats poreux avec circuit de refroidissement accelere

Publications (2)

Publication Number Publication Date
FR3010995A1 FR3010995A1 (fr) 2015-03-27
FR3010995B1 true FR3010995B1 (fr) 2015-10-23

Family

ID=50069044

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1359231A Active FR3010995B1 (fr) 2013-09-25 2013-09-25 Installation industrielle pour infiltration chimique en phase gazeuse de substrats poreux avec circuit de refroidissement accelere

Country Status (2)

Country Link
FR (1) FR3010995B1 (fr)
WO (1) WO2015044562A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3132719A1 (fr) 2022-02-17 2023-08-18 Safran Ceramics Outillage amovible pour l’infiltration en phase gazeuse

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6352430B1 (en) * 1998-10-23 2002-03-05 Goodrich Corporation Method and apparatus for cooling a CVI/CVD furnace
CN1073458C (zh) * 1998-11-24 2001-10-24 西北工业大学 Cvi/cvd工艺尾气处理方法
FR2881145B1 (fr) * 2005-01-24 2007-11-23 Snecma Propulsion Solide Sa Procede d'infiltration chimique en phase gazeuse pour la densification de substrats poreux par du carbone pyrolytique

Also Published As

Publication number Publication date
FR3010995A1 (fr) 2015-03-27
WO2015044562A1 (fr) 2015-04-02

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