FR3058161B1 - Installation de traitement de surface d'un substrat en mouvement sous atmosphere controlee, et son procede de dimensionnement - Google Patents

Installation de traitement de surface d'un substrat en mouvement sous atmosphere controlee, et son procede de dimensionnement Download PDF

Info

Publication number: FR3058161B1
Authority: FR; France
Prior art keywords: surface treatment; controlled atmosphere; moving substrate; treatment installation; sizing method
Prior art date: 2016-10-27
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Fee Related

Application number

FR1660427A

Other languages

English (en)

Other versions

FR3058161A1 (fr

Inventor

Julien Vallade

Cedric Pfister

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Coating Plasma Innovation SAS

Original Assignee

Coating Plasma Industrie SAS

Coating Plasma Innovation SAS

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2016-10-27

Filing date

2016-10-27

Publication date

2018-11-16

2016-10-27 Priority to FR1660427A priority Critical patent/FR3058161B1/fr

2016-10-27 Application filed by Coating Plasma Industrie SAS, Coating Plasma Innovation SAS filed Critical Coating Plasma Industrie SAS

2017-10-16 Priority to CN201780066726.7A priority patent/CN109923240B/zh

2017-10-16 Priority to KR1020197014455A priority patent/KR102441291B1/ko

2017-10-16 Priority to JP2019523775A priority patent/JP7014790B2/ja

2017-10-16 Priority to BR112019008332-4A priority patent/BR112019008332B1/pt

2017-10-16 Priority to PCT/FR2017/052827 priority patent/WO2018078237A1/fr

2017-10-16 Priority to EP17792127.7A priority patent/EP3532652B1/fr

2017-10-27 Priority to US16/344,303 priority patent/US12125681B2/en

2018-05-04 Publication of FR3058161A1 publication Critical patent/FR3058161A1/fr

2018-11-16 Application granted granted Critical

2018-11-16 Publication of FR3058161B1 publication Critical patent/FR3058161B1/fr

Status Expired - Fee Related legal-status Critical Current

2036-10-27 Anticipated expiration legal-status Critical

Classifications

- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45593—Recirculation of reactive gases
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/3244—Gas supply means
- H01J37/32449—Gas control, e.g. control of the gas flow
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32513—Sealing means, e.g. sealing between different parts of the vessel
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32752—Means for moving the material to be treated for moving the material across the discharge
- H01J37/32761—Continuous moving
- H01J37/3277—Continuous moving of continuous material
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
- H01J37/32816—Pressure
- H01J37/32834—Exhausting

Landscapes

Chemical & Material Sciences (AREA)
Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Plasma & Fusion (AREA)
Analytical Chemistry (AREA)
General Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Materials Engineering (AREA)
Mechanical Engineering (AREA)
Metallurgy (AREA)
Organic Chemistry (AREA)
Plasma Technology (AREA)

FR1660427A 2016-10-27 2016-10-27 Installation de traitement de surface d'un substrat en mouvement sous atmosphere controlee, et son procede de dimensionnement Expired - Fee Related FR3058161B1 (fr)

Priority Applications (8)

Application Number	Priority Date	Filing Date	Title
FR1660427A FR3058161B1 (fr)	2016-10-27	2016-10-27	Installation de traitement de surface d'un substrat en mouvement sous atmosphere controlee, et son procede de dimensionnement
KR1020197014455A KR102441291B1 (ko)	2016-10-27	2017-10-16	제어된 분위기에서 이동하는 기판의 표면을 처리하는 설비 및 그의 크기를 규정하는 방법
JP2019523775A JP7014790B2 (ja)	2016-10-27	2017-10-16	制御雰囲気において移動する基板の表面を処理するための設備およびそのサイズを画定するための方法
BR112019008332-4A BR112019008332B1 (pt)	2016-10-27	2017-10-16	Instalação de tratamento de superfície de um substrato móvel em uma atmosfera controlada e método para definição da dimensão da mesma
CN201780066726.7A CN109923240B (zh)	2016-10-27	2017-10-16	在受控气氛中处理移动基材的表面的设备及其尺寸的限定方法
PCT/FR2017/052827 WO2018078237A1 (fr)	2016-10-27	2017-10-16	Installation de traitement de surface d'un substrat en mouvement sous atmosphere controlee, et son procede de dimensionnement
EP17792127.7A EP3532652B1 (fr)	2016-10-27	2017-10-16	Installation de traitement de surface d'un substrat en mouvement sous atmosphere controlee, et son procede de dimensionnement
US16/344,303 US12125681B2 (en)	2016-10-27	2017-10-27	Facility for treating the surface of a moving substrate in a controlled atmosphere, and method for defining the size thereof

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
FR1660427		2016-10-27
FR1660427A FR3058161B1 (fr)	2016-10-27	2016-10-27	Installation de traitement de surface d'un substrat en mouvement sous atmosphere controlee, et son procede de dimensionnement

Publications (2)

Publication Number	Publication Date
FR3058161A1 FR3058161A1 (fr)	2018-05-04
FR3058161B1 true FR3058161B1 (fr)	2018-11-16

Family

ID=57681637

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR1660427A Expired - Fee Related FR3058161B1 (fr)	2016-10-27	2016-10-27	Installation de traitement de surface d'un substrat en mouvement sous atmosphere controlee, et son procede de dimensionnement

Country Status (1)

Country	Link
FR (1)	FR3058161B1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP5486249B2 (ja) *	2009-09-11	2014-05-07	富士フイルム株式会社	成膜方法
EP2762608B1 (fr) *	2013-01-31	2019-10-02	Applied Materials, Inc.	Séparation de gaz par une paroi de séparation réglable
FR3035122B1 (fr) *	2015-04-20	2017-04-28	Coating Plasma Ind	Procede de traitement de surface d'un film en mouvement et installation pour la mise en oeuvre de ce procede

2016
- 2016-10-27 FR FR1660427A patent/FR3058161B1/fr not_active Expired - Fee Related

Also Published As

Publication number	Publication date
FR3058161A1 (fr)	2018-05-04

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Legal Events

Date	Code	Title	Description
2017-10-26	PLFP	Fee payment	Year of fee payment: 2
2018-05-04	PLSC	Publication of the preliminary search report	Effective date: 20180504
2018-10-29	PLFP	Fee payment	Year of fee payment: 3
2018-11-02	CA	Change of address	Effective date: 20180927
2018-11-02	CD	Change of name or company name	Owner name: COATING PLASMA INNOVATION, FR Effective date: 20180927
2019-10-25	PLFP	Fee payment	Year of fee payment: 4
2020-10-20	PLFP	Fee payment	Year of fee payment: 5
2021-10-19	PLFP	Fee payment	Year of fee payment: 6
2023-06-30	ST	Notification of lapse	Effective date: 20230606