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FR2990757B1 - CAPACITIVE CAPACITOR WITH POROUS MATERIAL HAVING AN IMPROVED ARRANGEMENT - Google Patents

CAPACITIVE CAPACITOR WITH POROUS MATERIAL HAVING AN IMPROVED ARRANGEMENT

Info

Publication number
FR2990757B1
FR2990757B1 FR1254464A FR1254464A FR2990757B1 FR 2990757 B1 FR2990757 B1 FR 2990757B1 FR 1254464 A FR1254464 A FR 1254464A FR 1254464 A FR1254464 A FR 1254464A FR 2990757 B1 FR2990757 B1 FR 2990757B1
Authority
FR
France
Prior art keywords
porous material
improved arrangement
capacitive capacitor
capacitive
capacitor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR1254464A
Other languages
French (fr)
Other versions
FR2990757A1 (en
Inventor
Hubert Grange
Jean-Sebastien Danel
Frederic-Xavier Gaillard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA, Commissariat a lEnergie Atomique et aux Energies Alternatives CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR1254464A priority Critical patent/FR2990757B1/en
Priority to US14/395,227 priority patent/US20150129538A1/en
Priority to CN201380021826.XA priority patent/CN104246486A/en
Priority to EP13724209.5A priority patent/EP2850420B1/en
Priority to PCT/EP2013/059775 priority patent/WO2013171144A1/en
Publication of FR2990757A1 publication Critical patent/FR2990757A1/en
Application granted granted Critical
Publication of FR2990757B1 publication Critical patent/FR2990757B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/223—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity
    • G01N27/225—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance for determining moisture content, e.g. humidity by using hygroscopic materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G13/00—Apparatus specially adapted for manufacturing capacitors; Processes specially adapted for manufacturing capacitors not provided for in groups H01G4/00 - H01G11/00

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Pathology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
FR1254464A 2012-05-15 2012-05-15 CAPACITIVE CAPACITOR WITH POROUS MATERIAL HAVING AN IMPROVED ARRANGEMENT Expired - Fee Related FR2990757B1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR1254464A FR2990757B1 (en) 2012-05-15 2012-05-15 CAPACITIVE CAPACITOR WITH POROUS MATERIAL HAVING AN IMPROVED ARRANGEMENT
US14/395,227 US20150129538A1 (en) 2012-05-15 2013-05-13 Method for producing a capacitive sensor
CN201380021826.XA CN104246486A (en) 2012-05-15 2013-05-13 Method for producing a capacitive sensor
EP13724209.5A EP2850420B1 (en) 2012-05-15 2013-05-13 Method for producing a capacitive sensor
PCT/EP2013/059775 WO2013171144A1 (en) 2012-05-15 2013-05-13 Method for producing a capacitive sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1254464A FR2990757B1 (en) 2012-05-15 2012-05-15 CAPACITIVE CAPACITOR WITH POROUS MATERIAL HAVING AN IMPROVED ARRANGEMENT

Publications (2)

Publication Number Publication Date
FR2990757A1 FR2990757A1 (en) 2013-11-22
FR2990757B1 true FR2990757B1 (en) 2014-10-31

Family

ID=48470936

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1254464A Expired - Fee Related FR2990757B1 (en) 2012-05-15 2012-05-15 CAPACITIVE CAPACITOR WITH POROUS MATERIAL HAVING AN IMPROVED ARRANGEMENT

Country Status (5)

Country Link
US (1) US20150129538A1 (en)
EP (1) EP2850420B1 (en)
CN (1) CN104246486A (en)
FR (1) FR2990757B1 (en)
WO (1) WO2013171144A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3016083A1 (en) 2013-12-26 2015-07-03 Commissariat Energie Atomique ELECTROCHEMICAL BATTERY MODULE PROVIDING IMPROVED WET ENVIRONMENTAL PROTECTION AND METHOD FOR PRODUCING AT LEAST ONE SUCH MODULE
TWI515429B (en) * 2014-03-12 2016-01-01 友達光電股份有限公司 Chemical sensor and method for fabricating the same
KR102026772B1 (en) * 2015-05-08 2019-09-30 시러스 로직 인터내셔널 세미컨덕터 리미티드 High density capacitors formed from thin vertical semiconductor structures such as FinFETs
FR3054665B1 (en) 2016-07-28 2021-09-03 Commissariat Energie Atomique RESONANT CHEMICAL SENSOR INCLUDING A FUNCTIONALIZATION DEVICE AND ITS EMBODIMENT PROCESS
US20180245950A1 (en) * 2017-02-28 2018-08-30 Maxim Integrated Products, Inc. Planarized capacitive sensor array
JP7033798B2 (en) 2017-09-01 2022-03-11 国立研究開発法人物質・材料研究機構 Wet and dry response sensor
WO2021193217A1 (en) * 2020-03-27 2021-09-30 株式会社村田製作所 Moisture detection sensor
WO2021230263A1 (en) * 2020-05-14 2021-11-18 株式会社村田製作所 Moisture detection sensor
JP2023532898A (en) 2020-07-02 2023-08-01 イルミナ インコーポレイテッド Device with field effect transistor
WO2022034726A1 (en) * 2020-08-12 2022-02-17 株式会社村田製作所 Moisture detection sensor

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5855804A (en) * 1996-12-06 1999-01-05 Micron Technology, Inc. Method and apparatus for stopping mechanical and chemical-mechanical planarization of substrates at desired endpoints
US6025225A (en) * 1998-01-22 2000-02-15 Micron Technology, Inc. Circuits with a trench capacitor having micro-roughened semiconductor surfaces and methods for forming the same
DE10100582A1 (en) * 2001-01-09 2002-07-18 Infineon Technologies Ag Process for the production of trench capacitors for integrated semiconductor memories
TW573119B (en) * 2002-08-28 2004-01-21 Nanya Technology Corp A moisture detecting method, a moisture detecting device and method of fabricating the same
US8003513B2 (en) * 2002-09-27 2011-08-23 Medtronic Minimed, Inc. Multilayer circuit devices and manufacturing methods using electroplated sacrificial structures
DE10246050A1 (en) * 2002-10-02 2004-04-15 Robert Bosch Gmbh Moisture concentration measurement apparatus has sensitizing layer of oxidized porous silicon and two electrodes
US7353711B2 (en) * 2003-08-11 2008-04-08 Analog Devices, Inc. Capacitive sensor
JP4535046B2 (en) * 2006-08-22 2010-09-01 ヤマハ株式会社 Capacitance sensor and manufacturing method thereof
US8079248B2 (en) * 2005-11-17 2011-12-20 Nxp B.V. Moisture sensor
DE102006019534A1 (en) * 2006-04-27 2007-11-08 CiS Institut für Mikrosensorik gGmbH microsensor
CN101903989B (en) * 2007-12-21 2013-04-17 朗姆研究公司 Fabrication of silicon structures and deep silicon etch with topography control
FR2934051B1 (en) 2008-07-16 2011-12-09 Commissariat Energie Atomique NANOPOROUS HYDROPHILIC DIELECTRIC HUMIDITY DETECTOR
DE102009000315A1 (en) * 2009-01-20 2010-08-19 Robert Bosch Gmbh liquid sensor
US20100307238A1 (en) * 2009-06-05 2010-12-09 The Governors Of The University Of Alberta Humidity sensor and method of manufacturing the same
US8471304B2 (en) * 2010-06-04 2013-06-25 Carnegie Mellon University Method, apparatus, and system for micromechanical gas chemical sensing capacitor

Also Published As

Publication number Publication date
US20150129538A1 (en) 2015-05-14
CN104246486A (en) 2014-12-24
WO2013171144A1 (en) 2013-11-21
FR2990757A1 (en) 2013-11-22
EP2850420A1 (en) 2015-03-25
EP2850420B1 (en) 2019-11-06

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