FR2980994B1 - Prehenseur multi-plaquettes. - Google Patents

Prehenseur multi-plaquettes.

Info

Publication number: FR2980994B1
Authority: FR; France
Prior art keywords: prehenseer; platelet; platelet prehenseer
Prior art date: 2011-10-07
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Active

Application number

FR1159064A

Other languages

English (en)

Other versions

FR2980994A1 (fr

Inventor

Yvon Pellegrin

Jacques Morote

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

ECM Greentech SAS

Original Assignee

Semco Engineering SA

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2011-10-07

Filing date

2011-10-07

Publication date

2015-11-27

2011-10-07 Application filed by Semco Engineering SA filed Critical Semco Engineering SA

2011-10-07 Priority to FR1159064A priority Critical patent/FR2980994B1/fr

2012-10-05 Priority to PCT/FR2012/052261 priority patent/WO2013050716A1/fr

2013-04-12 Publication of FR2980994A1 publication Critical patent/FR2980994A1/fr

2015-11-27 Application granted granted Critical

2015-11-27 Publication of FR2980994B1 publication Critical patent/FR2980994B1/fr

Status Active legal-status Critical Current

2031-10-07 Anticipated expiration legal-status Critical

Classifications

- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices

Landscapes

Engineering & Computer Science (AREA)
Physics & Mathematics (AREA)
Condensed Matter Physics & Semiconductors (AREA)
General Physics & Mathematics (AREA)
Manufacturing & Machinery (AREA)
Computer Hardware Design (AREA)
Microelectronics & Electronic Packaging (AREA)
Power Engineering (AREA)
Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Manipulator (AREA)

FR1159064A 2011-10-07 2011-10-07 Prehenseur multi-plaquettes. Active FR2980994B1 (fr)

Priority Applications (2)

Application Number	Priority Date	Filing Date	Title
FR1159064A FR2980994B1 (fr)	2011-10-07	2011-10-07	Prehenseur multi-plaquettes.
PCT/FR2012/052261 WO2013050716A1 (fr)	2011-10-07	2012-10-05	Prehenseur multi-plaquettes

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FR1159064A FR2980994B1 (fr)	2011-10-07	2011-10-07	Prehenseur multi-plaquettes.

Publications (2)

Publication Number	Publication Date
FR2980994A1 FR2980994A1 (fr)	2013-04-12
FR2980994B1 true FR2980994B1 (fr)	2015-11-27

Family

ID=47191944

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FR1159064A Active FR2980994B1 (fr)	2011-10-07	2011-10-07	Prehenseur multi-plaquettes.

Country Status (2)

Country	Link
FR (1)	FR2980994B1 (fr)
WO (1)	WO2013050716A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DE102017203939A1 (de) *	2017-03-09	2018-09-13	Cevotec Gmbh	Legestempel

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
DK604074A (da)	1974-11-20	1976-05-21	Chemical Reactor Equip As	Apparat til beroringsfri transport af sarbare, hovedsageligt skiveformede objekter, navnlig tyndfilmbelagte halvledersubstrater
DE3923672A1 (de)	1988-10-28	1990-05-03	Festo Kg	Handhabungsvorrichtung zum greifen, halten, bewegen od. dgl. handhaben von gegenstaenden
DE59406900D1 (de) *	1993-02-08	1998-10-22	Sez Semiconduct Equip Zubehoer	Träger für scheibenförmige Gegenstände
DE59900743D1 (de) *	1999-04-28	2002-02-28	Sez Semiconduct Equip Zubehoer	Vorrichtung und Verfahren zur Flüssigkeitsbehandlung von scheibenförmigen Gegenständen
JP2001277173A (ja) *	2000-04-03	2001-10-09	Yamaden Kogyo:Kk	プリント基板の吸着装置及び投入機
FR2818050B1 (fr)	2000-12-12	2006-08-11	Semco Engineering Sa	Dispositif de prehension electrostatique d'une tranche de composant electronique
JP4740414B2 (ja)	2007-04-24	2011-08-03	東京エレクトロン株式会社	基板搬送装置
JP4616873B2 (ja) *	2007-09-28	2011-01-19	東京エレクトロン株式会社	半導体製造装置、基板保持方法及びプログラム
DE102008062343B4 (de) *	2008-12-15	2013-05-29	Festo Ag & Co. Kg	Nach dem Bernoulli-Prinzip arbeitender Sauggreifer
DE102009051567A1 (de) *	2009-10-22	2011-04-28	Alexander Borowski	Bernoulli-Düse, Greifervorrichtung mit Bernoulli-Düse und Verfahren zur Herstellung

2011
- 2011-10-07 FR FR1159064A patent/FR2980994B1/fr active Active
2012
- 2012-10-05 WO PCT/FR2012/052261 patent/WO2013050716A1/fr not_active Ceased

Also Published As

Publication number	Publication date
WO2013050716A1 (fr)	2013-04-11
FR2980994A1 (fr)	2013-04-12

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FR2986872B1 (fr)	2014-03-07	.
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FR2973145B1 (fr)	2013-03-22	Atlas visuo-tactile.
FI20115354A0 (fi)	2011-04-13	Kampikammion luukku
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Legal Events

Date	Code	Title	Description
2016-04-29	PLFP	Fee payment	Year of fee payment: 5
2017-04-24	PLFP	Fee payment	Year of fee payment: 6
2017-10-18	PLFP	Fee payment	Year of fee payment: 7
2018-10-23	PLFP	Fee payment	Year of fee payment: 8
2019-10-15	PLFP	Fee payment	Year of fee payment: 9
2020-10-29	PLFP	Fee payment	Year of fee payment: 10
2021-07-09	CA	Change of address	Effective date: 20210531
2021-07-09	TP	Transmission of property	Owner name: SEMCO TECHNOLOGIES, FR Effective date: 20210531
2021-09-17	TP	Transmission of property	Owner name: ECM GREENTECH, FR Effective date: 20210809
2021-10-27	PLFP	Fee payment	Year of fee payment: 11
2022-10-27	PLFP	Fee payment	Year of fee payment: 12
2023-10-30	PLFP	Fee payment	Year of fee payment: 13
2024-10-30	PLFP	Fee payment	Year of fee payment: 14
2025-10-30	PLFP	Fee payment	Year of fee payment: 15