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FR2971584B1 - WIRELESS TEMPERATURE OR TEMPERATURE AND PRESSURE SENSOR COMPRISING ACOUSTIC WAVE RESONATORS WITH ALLOY ELECTRODES - Google Patents

WIRELESS TEMPERATURE OR TEMPERATURE AND PRESSURE SENSOR COMPRISING ACOUSTIC WAVE RESONATORS WITH ALLOY ELECTRODES

Info

Publication number
FR2971584B1
FR2971584B1 FR1151094A FR1151094A FR2971584B1 FR 2971584 B1 FR2971584 B1 FR 2971584B1 FR 1151094 A FR1151094 A FR 1151094A FR 1151094 A FR1151094 A FR 1151094A FR 2971584 B1 FR2971584 B1 FR 2971584B1
Authority
FR
France
Prior art keywords
temperature
pressure sensor
acoustic wave
wave resonators
alloy electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1151094A
Other languages
French (fr)
Other versions
FR2971584A1 (en
Inventor
Sylvain Ballandras
Jean-Francois Leguen
Luc Chommeloux
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
SENSeOR
Original Assignee
Centre National de la Recherche Scientifique CNRS
SENSeOR
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS, SENSeOR filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR1151094A priority Critical patent/FR2971584B1/en
Publication of FR2971584A1 publication Critical patent/FR2971584A1/en
Application granted granted Critical
Publication of FR2971584B1 publication Critical patent/FR2971584B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
    • G01K11/22—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects
    • G01K11/26—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects of resonant frequencies
    • G01K11/265—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects of resonant frequencies using surface acoustic wave [SAW]

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • General Physics & Mathematics (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
FR1151094A 2011-02-10 2011-02-10 WIRELESS TEMPERATURE OR TEMPERATURE AND PRESSURE SENSOR COMPRISING ACOUSTIC WAVE RESONATORS WITH ALLOY ELECTRODES Active FR2971584B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR1151094A FR2971584B1 (en) 2011-02-10 2011-02-10 WIRELESS TEMPERATURE OR TEMPERATURE AND PRESSURE SENSOR COMPRISING ACOUSTIC WAVE RESONATORS WITH ALLOY ELECTRODES

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1151094A FR2971584B1 (en) 2011-02-10 2011-02-10 WIRELESS TEMPERATURE OR TEMPERATURE AND PRESSURE SENSOR COMPRISING ACOUSTIC WAVE RESONATORS WITH ALLOY ELECTRODES

Publications (2)

Publication Number Publication Date
FR2971584A1 FR2971584A1 (en) 2012-08-17
FR2971584B1 true FR2971584B1 (en) 2014-10-03

Family

ID=44534468

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1151094A Active FR2971584B1 (en) 2011-02-10 2011-02-10 WIRELESS TEMPERATURE OR TEMPERATURE AND PRESSURE SENSOR COMPRISING ACOUSTIC WAVE RESONATORS WITH ALLOY ELECTRODES

Country Status (1)

Country Link
FR (1) FR2971584B1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102980678A (en) * 2012-11-27 2013-03-20 安徽鑫龙电器股份有限公司 Wireless passive temperature measuring device
CN103926017A (en) * 2013-01-14 2014-07-16 北京中讯四方科技股份有限公司 Surface acoustic wave temperature sensor based on special quartz material
CN111342806B (en) * 2018-12-18 2023-12-15 天津大学 Piezoelectric filter having lamb wave resonator, duplexer, and electronic device
CN112697262B (en) * 2020-12-08 2023-06-27 联合微电子中心有限责任公司 Hydrophone and method for manufacturing same

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3244386B2 (en) * 1994-08-23 2002-01-07 松下電器産業株式会社 Surface acoustic wave device
US6958565B1 (en) * 2004-04-05 2005-10-25 Honeywell International Inc. Passive wireless piezoelectric smart tire sensor with reduced size

Also Published As

Publication number Publication date
FR2971584A1 (en) 2012-08-17

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