FR2967813B1 - Procédé de réalisation d'une structure a couche métallique enterrée - Google Patents
Procédé de réalisation d'une structure a couche métallique enterréeInfo
- Publication number
- FR2967813B1 FR2967813B1 FR1059476A FR1059476A FR2967813B1 FR 2967813 B1 FR2967813 B1 FR 2967813B1 FR 1059476 A FR1059476 A FR 1059476A FR 1059476 A FR1059476 A FR 1059476A FR 2967813 B1 FR2967813 B1 FR 2967813B1
- Authority
- FR
- France
- Prior art keywords
- bentallic
- semiconductor material
- producing
- metal layer
- layer structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/81—Bodies
- H10H20/822—Materials of the light-emitting regions
- H10H20/824—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
- H10H20/825—Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
- H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
- H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
- H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
- H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/127—The active layers comprising only Group III-V materials, e.g. GaAs or InP
- H10F71/1276—The active layers comprising only Group III-V materials, e.g. GaAs or InP comprising growth substrates not made of Group III-V materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/127—The active layers comprising only Group III-V materials, e.g. GaAs or InP
- H10F71/1278—The active layers comprising only Group III-V materials, e.g. GaAs or InP comprising nitrides, e.g. GaN
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
- H10F71/00—Manufacture or treatment of devices covered by this subclass
- H10F71/139—Manufacture or treatment of devices covered by this subclass using temporary substrates
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
- H10H20/013—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials
- H10H20/0137—Manufacture or treatment of bodies, e.g. forming semiconductor layers having light-emitting regions comprising only Group III-V materials the light-emitting regions comprising nitride materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/01—Manufacture or treatment
- H10H20/011—Manufacture or treatment of bodies, e.g. forming semiconductor layers
- H10H20/018—Bonding of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S2301/00—Functional characteristics
- H01S2301/17—Semiconductor lasers comprising special layers
- H01S2301/173—The laser chip comprising special buffer layers, e.g. dislocation prevention or reduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/042—Electrical excitation ; Circuits therefor
- H01S5/0425—Electrodes, e.g. characterised by the structure
- H01S5/04252—Electrodes, e.g. characterised by the structure characterised by the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/323—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/32308—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm
- H01S5/32341—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser emitting light at a wavelength less than 900 nm blue laser based on GaN or GaP
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/832—Electrodes characterised by their material
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/544—Solar cells from Group III-V materials
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
- Recrystallisation Techniques (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1059476A FR2967813B1 (fr) | 2010-11-18 | 2010-11-18 | Procédé de réalisation d'une structure a couche métallique enterrée |
| TW100141652A TWI532209B (zh) | 2010-11-18 | 2011-11-15 | 一種用於形成一埋入式金屬層結構的方法 |
| PCT/EP2011/070249 WO2012066033A1 (fr) | 2010-11-18 | 2011-11-16 | Procédé de formation d'une structure de couche métallique enfouie |
| US13/988,196 US9224921B2 (en) | 2010-11-18 | 2011-11-16 | Method for forming a buried metal layer structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR1059476A FR2967813B1 (fr) | 2010-11-18 | 2010-11-18 | Procédé de réalisation d'une structure a couche métallique enterrée |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2967813A1 FR2967813A1 (fr) | 2012-05-25 |
| FR2967813B1 true FR2967813B1 (fr) | 2013-10-04 |
Family
ID=43573873
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR1059476A Active FR2967813B1 (fr) | 2010-11-18 | 2010-11-18 | Procédé de réalisation d'une structure a couche métallique enterrée |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9224921B2 (fr) |
| FR (1) | FR2967813B1 (fr) |
| TW (1) | TWI532209B (fr) |
| WO (1) | WO2012066033A1 (fr) |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2992466A1 (fr) | 2012-06-22 | 2013-12-27 | Soitec Silicon On Insulator | Procede de realisation de contact pour led et structure resultante |
| EP2908330B1 (fr) | 2012-10-12 | 2021-05-19 | Sumitomo Electric Industries, Ltd. | Substrat composite à nitrure du groupe iii, procédé pour sa fabrication et procédé de fabrication d'un dispositif semi-conducteur à nitrure du groupe iii |
| JP6322890B2 (ja) | 2013-02-18 | 2018-05-16 | 住友電気工業株式会社 | Iii族窒化物複合基板およびその製造方法、ならびにiii族窒化物半導体デバイスの製造方法 |
| US9484418B2 (en) | 2012-11-19 | 2016-11-01 | Delta Electronics, Inc. | Semiconductor device |
| CN104995713A (zh) | 2013-02-18 | 2015-10-21 | 住友电气工业株式会社 | Iii族氮化物复合衬底及其制造方法,层叠的iii族氮化物复合衬底,以及iii族氮化物半导体器件及其制造方法 |
| FR3003692B1 (fr) * | 2013-03-25 | 2015-04-10 | Commissariat Energie Atomique | Procede de fabrication d’une structure a multijonctions pour cellule photovoltaique |
| US10454239B2 (en) * | 2015-08-28 | 2019-10-22 | International Business Machines Corporation | Wafer scale monolithic integration of lasers, modulators, and other optical components using ALD optical coatings |
| DE102015116495B4 (de) * | 2015-09-29 | 2025-04-30 | OSRAM Opto Semiconductors Gesellschaft mit beschränkter Haftung | Optoelektronischer Halbleiterchip und Verfahren zum Herstellen eines optoelektronischen Halbleiterchips |
| FR3047350B1 (fr) * | 2016-02-03 | 2018-03-09 | Soitec | Substrat avance a miroir integre |
| CN109065672A (zh) * | 2018-08-15 | 2018-12-21 | 横店集团东磁股份有限公司 | 一种减小异质膜组件封损的工艺 |
| KR102001791B1 (ko) * | 2018-12-26 | 2019-07-18 | 한양대학교 산학협력단 | 이온 주입을 이용한 질화갈륨 기판 제조 방법 |
| CN111048639B (zh) * | 2019-01-31 | 2022-06-24 | 深圳第三代半导体研究院 | 一种正装集成单元发光二极管 |
| TWI713229B (zh) * | 2019-04-02 | 2020-12-11 | 長生太陽能股份有限公司 | 太陽能電池及其製造方法 |
| CN114203866B (zh) * | 2021-10-19 | 2023-12-05 | 闽都创新实验室 | 预埋金属电极的垂直型发光三极管器件及其制备方法 |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2681472B1 (fr) | 1991-09-18 | 1993-10-29 | Commissariat Energie Atomique | Procede de fabrication de films minces de materiau semiconducteur. |
| JP2001298214A (ja) * | 2000-02-10 | 2001-10-26 | Sharp Corp | 半導体発光素子およびその製造方法 |
| US6335263B1 (en) * | 2000-03-22 | 2002-01-01 | The Regents Of The University Of California | Method of forming a low temperature metal bond for use in the transfer of bulk and thin film materials |
| US6984538B2 (en) * | 2001-07-26 | 2006-01-10 | Phosistor Technologies, Inc. | Method for quantum well intermixing using pre-annealing enhanced defects diffusion |
| TWI240434B (en) | 2003-06-24 | 2005-09-21 | Osram Opto Semiconductors Gmbh | Method to produce semiconductor-chips |
| FR2857982B1 (fr) * | 2003-07-24 | 2007-05-18 | Soitec Silicon On Insulator | Procede de fabrication d'une couche epitaxiee |
| TWI307175B (en) * | 2006-01-11 | 2009-03-01 | Ind Tech Res Inst | Non-substrate light emitting diode and fabrication method thereof |
| CN101295758B (zh) * | 2007-04-29 | 2013-03-06 | 晶能光电(江西)有限公司 | 含有碳基衬底的铟镓铝氮发光器件以及其制造方法 |
| TWI349381B (en) * | 2007-08-03 | 2011-09-21 | Chi Mei Lighting Tech Corp | Light-emitting diode and manufacturing method thereof |
| US20090039382A1 (en) * | 2007-08-10 | 2009-02-12 | Iintematix Technology Center Corp. | Light emitting diode package structure |
| US8815618B2 (en) * | 2008-08-29 | 2014-08-26 | Tsmc Solid State Lighting Ltd. | Light-emitting diode on a conductive substrate |
| US8048754B2 (en) * | 2008-09-29 | 2011-11-01 | Semiconductor Energy Laboratory Co., Ltd. | Method for manufacturing SOI substrate and method for manufacturing single crystal semiconductor layer |
| JP5611571B2 (ja) * | 2008-11-27 | 2014-10-22 | 株式会社半導体エネルギー研究所 | 半導体基板の作製方法及び半導体装置の作製方法 |
| KR101038923B1 (ko) * | 2010-02-02 | 2011-06-03 | 전북대학교산학협력단 | 개선된 발광 효율을 갖는 발광 다이오드 및 이의 제조방법 |
| US9190560B2 (en) * | 2010-05-18 | 2015-11-17 | Agency For Science Technology And Research | Method of forming a light emitting diode structure and a light diode structure |
| US20120043567A1 (en) * | 2010-08-18 | 2012-02-23 | Liang-Jyi Yan | Led structure with bragg film and metal layer |
-
2010
- 2010-11-18 FR FR1059476A patent/FR2967813B1/fr active Active
-
2011
- 2011-11-15 TW TW100141652A patent/TWI532209B/zh active
- 2011-11-16 US US13/988,196 patent/US9224921B2/en active Active
- 2011-11-16 WO PCT/EP2011/070249 patent/WO2012066033A1/fr not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| US20130285067A1 (en) | 2013-10-31 |
| TW201246600A (en) | 2012-11-16 |
| FR2967813A1 (fr) | 2012-05-25 |
| US9224921B2 (en) | 2015-12-29 |
| TWI532209B (zh) | 2016-05-01 |
| WO2012066033A1 (fr) | 2012-05-24 |
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