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FR2961946B1 - Dispositif de traitement pour boites de transport et de stockage - Google Patents

Dispositif de traitement pour boites de transport et de stockage

Info

Publication number
FR2961946B1
FR2961946B1 FR1055187A FR1055187A FR2961946B1 FR 2961946 B1 FR2961946 B1 FR 2961946B1 FR 1055187 A FR1055187 A FR 1055187A FR 1055187 A FR1055187 A FR 1055187A FR 2961946 B1 FR2961946 B1 FR 2961946B1
Authority
FR
France
Prior art keywords
transport
treatment device
storage boxes
boxes
storage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
FR1055187A
Other languages
English (en)
Other versions
FR2961946A1 (fr
Inventor
Sylvain Rioufrays
Erwan Godot
Arnaud Favre
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum SAS
Original Assignee
Alcatel Lucent SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel Lucent SAS filed Critical Alcatel Lucent SAS
Priority to FR1055187A priority Critical patent/FR2961946B1/fr
Priority to TW100121841A priority patent/TWI533948B/zh
Priority to PCT/EP2011/060749 priority patent/WO2012000950A1/fr
Priority to JP2013517235A priority patent/JP5814362B2/ja
Priority to SG10201505061WA priority patent/SG10201505061WA/en
Priority to KR1020127034327A priority patent/KR20130095198A/ko
Priority to CN201180032234.9A priority patent/CN102985344B/zh
Priority to SG2012091625A priority patent/SG186713A1/en
Priority to US13/806,318 priority patent/US9403196B2/en
Priority to EP11734040.6A priority patent/EP2588392A1/fr
Publication of FR2961946A1 publication Critical patent/FR2961946A1/fr
Application granted granted Critical
Publication of FR2961946B1 publication Critical patent/FR2961946B1/fr
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B5/00—Cleaning by methods involving the use of air flow or gas flow
    • B08B5/04—Cleaning by suction, with or without auxiliary action
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02—Storage devices
    • B65G1/04—Storage devices mechanical
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67389—Closed carriers characterised by atmosphere control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/0821—Handling or manipulating containers, e.g. moving or rotating containers in cleaning devices, conveying to or from cleaning devices
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B9/00—Cleaning hollow articles by methods or apparatus specially adapted thereto
    • B08B9/08—Cleaning containers, e.g. tanks
    • B08B9/20—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought
    • B08B9/42—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus being characterised by means for conveying or carrying containers therethrough
    • B08B9/44—Cleaning containers, e.g. tanks by using apparatus into or on to which containers, e.g. bottles, jars, cans are brought the apparatus being characterised by means for conveying or carrying containers therethrough the means being for loading or unloading the apparatus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/6773—Conveying cassettes, containers or carriers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
  • Warehouses Or Storage Devices (AREA)
FR1055187A 2010-06-29 2010-06-29 Dispositif de traitement pour boites de transport et de stockage Active FR2961946B1 (fr)

Priority Applications (10)

Application Number Priority Date Filing Date Title
FR1055187A FR2961946B1 (fr) 2010-06-29 2010-06-29 Dispositif de traitement pour boites de transport et de stockage
TW100121841A TWI533948B (zh) 2010-06-29 2011-06-22 運送及貯藏盒的處理裝置
JP2013517235A JP5814362B2 (ja) 2010-06-29 2011-06-27 移送および格納容器の処理装置
SG10201505061WA SG10201505061WA (en) 2010-06-29 2011-06-27 Treatment device for transport and storage boxes
KR1020127034327A KR20130095198A (ko) 2010-06-29 2011-06-27 운반 및 보관 상자용 처리 장치
CN201180032234.9A CN102985344B (zh) 2010-06-29 2011-06-27 运输和储存盒的处理装置
PCT/EP2011/060749 WO2012000950A1 (fr) 2010-06-29 2011-06-27 Dispositif de traitement pour boites de transport et de stockage
SG2012091625A SG186713A1 (en) 2010-06-29 2011-06-27 Treatment device for transport and storage boxes
US13/806,318 US9403196B2 (en) 2010-06-29 2011-06-27 Treatment device for transport and storage boxes
EP11734040.6A EP2588392A1 (fr) 2010-06-29 2011-06-27 Dispositif de traitement pour boites de transport et de stockage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR1055187A FR2961946B1 (fr) 2010-06-29 2010-06-29 Dispositif de traitement pour boites de transport et de stockage

Publications (2)

Publication Number Publication Date
FR2961946A1 FR2961946A1 (fr) 2011-12-30
FR2961946B1 true FR2961946B1 (fr) 2012-08-03

Family

ID=42701989

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1055187A Active FR2961946B1 (fr) 2010-06-29 2010-06-29 Dispositif de traitement pour boites de transport et de stockage

Country Status (9)

Country Link
US (1) US9403196B2 (fr)
EP (1) EP2588392A1 (fr)
JP (1) JP5814362B2 (fr)
KR (1) KR20130095198A (fr)
CN (1) CN102985344B (fr)
FR (1) FR2961946B1 (fr)
SG (2) SG10201505061WA (fr)
TW (1) TWI533948B (fr)
WO (1) WO2012000950A1 (fr)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2954583B1 (fr) 2009-12-18 2017-11-24 Alcatel Lucent Procede et dispositif de pilotage de fabrication de semi conducteurs par mesure de contamination
FR2999015B1 (fr) * 2012-11-30 2014-12-12 Adixen Vacuum Products Station et procede de mesure de la contamination en particules d'une enceinte de transport pour le convoyage et le stockage atmospherique de substrats semi-conducteurs
JP6237686B2 (ja) * 2015-04-06 2017-11-29 京セラドキュメントソリューションズ株式会社 電子機器及び画像形成装置
KR101695948B1 (ko) * 2015-06-26 2017-01-13 주식회사 테라세미콘 기판처리 시스템
JP6572854B2 (ja) * 2016-09-09 2019-09-11 株式会社ダイフク 容器収納設備
TWI717034B (zh) * 2017-06-23 2021-01-21 美商應用材料股份有限公司 側儲存倉、電子裝置處理系統、和處理基板的方法
JP7234527B2 (ja) * 2018-07-30 2023-03-08 Tdk株式会社 センサー内蔵フィルタ構造体及びウエハ収容容器
US11365896B2 (en) * 2019-11-05 2022-06-21 Kenneth Edwin Bobko Negative pressure wall box
NO346963B1 (en) 2021-08-23 2023-03-20 Autostore Tech As Disinfection station for a storage container
CN114251774B (zh) * 2021-12-15 2023-12-08 浙江托马仕电器有限公司 一种离子风空气净化器
CN118023246A (zh) * 2024-02-06 2024-05-14 江苏芯梦半导体设备有限公司 基于检测结果的半导体存储容器清洁方法、清洁单元及清洁系统

Family Cites Families (48)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3250038A (en) * 1963-02-18 1966-05-10 Kota Products Inc Window structure
US5284412A (en) * 1990-08-17 1994-02-08 Tokyo Electron Sagami Limited Stock unit for storing carriers
JP2971184B2 (ja) * 1991-06-28 1999-11-02 中部電力株式会社 空気再生機
ATE129361T1 (de) * 1992-08-04 1995-11-15 Ibm Fertigungsstrasse architektur mit vollautomatisierten und rechnergesteuerten fördereinrichtungen geeignet für abdichtbaren tragbaren unter druck stehenden behältern.
DE4237767A1 (de) 1992-11-09 1994-05-11 Siemens Ag Verfahren und Vorrichtung zum Reinigen von Bauteiloberflächen, insbesondere von mit Partikeln kontaminierten hochreinen Oberflächen von für die Elektronikfertigung bestimmten Bauteilen, wie Masken, Wafern od. dgl.
US5616208A (en) * 1993-09-17 1997-04-01 Tokyo Electron Limited Vacuum processing apparatus, vacuum processing method, and method for cleaning the vacuum processing apparatus
JP2741156B2 (ja) 1993-09-17 1998-04-15 東京エレクトロン株式会社 マルチチャンバー処理装置のクリーニング方法
US5827118A (en) * 1996-08-28 1998-10-27 Seh America, Inc. Clean storage unit air flow system
US5879458A (en) 1996-09-13 1999-03-09 Semifab Incorporated Molecular contamination control system
SG76561A1 (en) 1997-09-22 2000-11-21 Tokyo Electron Ltd Processing apparatus and method
JPH11168135A (ja) * 1997-12-03 1999-06-22 Toshiba Corp 基板保管装置および基板保管方法
US6168672B1 (en) * 1998-03-06 2001-01-02 Applied Materials Inc. Method and apparatus for automatically performing cleaning processes in a semiconductor wafer processing system
JPH11274282A (ja) 1998-03-23 1999-10-08 Toshiba Corp 基板収納容器、基板収納容器清浄化装置、基板収納容器清浄化方法および基板処理装置
US6193601B1 (en) 1998-11-10 2001-02-27 Sandia Corporation Module bay with directed flow
DE19922936B4 (de) * 1999-05-19 2004-04-29 Infineon Technologies Ag Anlage zur Bearbeitung von Wafern
DE19941399A1 (de) 1999-08-31 2001-04-19 Infineon Technologies Ag Reinigung von Stencilmasken mit Hilfe einer durch Maskenöffnungen hindurchtretenden Gasströmung
US6791661B2 (en) 1999-12-09 2004-09-14 Nikon Corporation Gas replacement method and apparatus, and exposure method and apparatus
US6346986B1 (en) 2000-03-14 2002-02-12 Wafertech, Inc. Non-intrusive pellicle height measurement system
JP2001267200A (ja) 2000-03-14 2001-09-28 Nikon Corp ガス置換方法及び装置、並びに露光方法及び装置
KR20010095087A (ko) 2000-03-30 2001-11-03 시마무라 테루오 노광장치, 노광방법 및 디바이스의 제조방법
EP1320879A4 (fr) 2000-08-11 2009-03-11 Chem Trace Corp Systeme et procede de nettoyage de pieces d'equipements de fabrication de semi-conducteurs
US6710845B2 (en) 2000-12-29 2004-03-23 Intel Corporation Purging gas from a photolithography enclosure between a mask protective device and a patterned mask
JP2002372777A (ja) 2001-06-18 2002-12-26 Canon Inc ガス置換方法および露光装置
SE0102438D0 (sv) 2001-07-05 2001-07-05 Astrazeneca Ab New compounds
US20040023419A1 (en) 2001-09-24 2004-02-05 Extraction Systems, Inc System and method for monitoring contamination
WO2003034475A1 (fr) 2001-10-10 2003-04-24 Nikon Corporation Procede et dispositif de substitution de gaz, dispositif de protection de masque, masque, ainsi que procede et dispositif d'exposition
JP4006235B2 (ja) 2002-02-05 2007-11-14 キヤノン株式会社 不活性ガス置換方法及び装置、レチクル保管庫、レチクル検査装置、レチクル搬送ボックス、デバイスの製造方法
JP4355488B2 (ja) 2002-05-13 2009-11-04 富士通株式会社 分子汚染監視システム
TWI249220B (en) 2003-04-28 2006-02-11 Tdk Corp Purging apparatus and purging method
JP2005093697A (ja) 2003-09-17 2005-04-07 Canon Inc 面位置検出装置及び方法、露光装置並びに収差補正方法
US7218983B2 (en) 2003-11-06 2007-05-15 Applied Materials, Inc. Method and apparatus for integrating large and small lot electronic device fabrication facilities
JP2005256983A (ja) 2004-03-12 2005-09-22 Shin Etsu Polymer Co Ltd 基板収納容器
CN100500526C (zh) 2004-12-28 2009-06-17 友达光电股份有限公司 卡匣仓储系统
FR2883412B1 (fr) 2005-03-18 2007-05-04 Alcatel Sa Procede et dispositif pour le controle de la contamination des plaquettes de substrat
KR100719373B1 (ko) 2005-08-11 2007-05-17 삼성전자주식회사 반도체 노광 설비 및 펠리클 검사 방법
TWI328854B (en) 2005-09-14 2010-08-11 Applied Materials Inc Methods and apparatus for a transfer station
US20070062561A1 (en) 2005-09-19 2007-03-22 International Business Machines Corporation Method And Apparatus For Testing Particulate Contamination In Wafer Carriers
JP2007123673A (ja) * 2005-10-31 2007-05-17 Asyst Shinko Inc 物品収納用容器の防振機構
US8308418B2 (en) 2006-05-09 2012-11-13 Taiwan Semiconductor Manufacturing Co., Ltd. High efficiency buffer stocker
FR2901546B1 (fr) * 2006-05-24 2010-10-15 Cit Alcatel Procede et dispositif de depollution d'environnement confine
FR2908674A1 (fr) 2007-01-29 2008-05-23 Alcatel Sa Dispositif de nettoyage et de depollution d'un objet a environnement confine non etanche limite par une paroi a membrane souple
WO2008144670A1 (fr) * 2007-05-18 2008-11-27 Brooks Automation, Inc. Ventilation rapide à pompe pour sas de chargement
FR2920046A1 (fr) 2007-08-13 2009-02-20 Alcatel Lucent Sas Procede de post-traitement d'un support de transport pour le convoyage et le stockage atmospherique de substrats semi-conducteurs, et station de post-traitement pour la mise en oeuvre d'un tel procede
US20090162170A1 (en) * 2007-12-19 2009-06-25 Asm Japan K.K. Tandem type semiconductor-processing apparatus
US20100021273A1 (en) * 2008-07-28 2010-01-28 Applied Materials, Inc. Concrete vacuum chamber
JP5517182B2 (ja) * 2008-08-08 2014-06-11 村田機械株式会社 保管庫システム
FR2954583B1 (fr) 2009-12-18 2017-11-24 Alcatel Lucent Procede et dispositif de pilotage de fabrication de semi conducteurs par mesure de contamination
FR2964334B1 (fr) 2010-09-08 2012-09-14 Alcatel Lucent Procede et dispositif de depollution d'un photomasque pellicule

Also Published As

Publication number Publication date
KR20130095198A (ko) 2013-08-27
WO2012000950A1 (fr) 2012-01-05
CN102985344A (zh) 2013-03-20
TW201221233A (en) 2012-06-01
CN102985344B (zh) 2015-08-12
EP2588392A1 (fr) 2013-05-08
FR2961946A1 (fr) 2011-12-30
TWI533948B (zh) 2016-05-21
US9403196B2 (en) 2016-08-02
JP5814362B2 (ja) 2015-11-17
SG10201505061WA (en) 2015-07-30
JP2013539200A (ja) 2013-10-17
US20130097802A1 (en) 2013-04-25
SG186713A1 (en) 2013-02-28

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Legal Events

Date Code Title Description
TP Transmission of property

Owner name: ADIXEN VACUUM PRODUCTS, FR

Effective date: 20120131

PLFP Fee payment

Year of fee payment: 6

CD Change of name or company name

Owner name: PFEIFFER VACUUM, FR

Effective date: 20160120

PLFP Fee payment

Year of fee payment: 7

PLFP Fee payment

Year of fee payment: 8