Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
  • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
  • H01L21/76—Making of isolation regions between components
  • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
  • H01L21/7624—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology
  • H01L21/76251—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques
  • H01L21/76254—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers using semiconductor on insulator [SOI] technology using bonding techniques with separation/delamination along an ion implanted layer, e.g. Smart-cut, Unibond
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy

Landscapes

• Engineering & Computer Science (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Physics & Mathematics (AREA)
• Power Engineering (AREA)
• Photovoltaic Devices (AREA)
• Light Receiving Elements (AREA)
• Recrystallisation Techniques (AREA)
• Element Separation (AREA)
• Pressure Welding/Diffusion-Bonding (AREA)

Priority Applications (8)

Applications Claiming Priority (1)

Publications (2)

Family

ID=40627399

Family Applications (1)

Country Status (8)

Families Citing this family (4)

Family Cites Families (8)

• 2009
  • 2009-03-06 FR FR0951433A patent/FR2942910B1/fr not_active Expired - Fee Related
  • 2009-09-09 WO PCT/EP2009/061711 patent/WO2010099837A1/fr not_active Ceased
  • 2009-09-09 CN CN200980156845.7A patent/CN102318055B/zh not_active Expired - Fee Related
  • 2009-09-09 JP JP2011551420A patent/JP2012519372A/ja active Pending
  • 2009-09-09 EP EP09841026A patent/EP2404318A1/fr not_active Withdrawn
  • 2009-09-09 SG SG2011060118A patent/SG173788A1/en unknown
  • 2009-09-09 US US13/254,550 patent/US8778777B2/en not_active Expired - Fee Related
  • 2009-09-09 KR KR1020117020093A patent/KR101302071B1/ko not_active Expired - Fee Related

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