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FR2836595B1 - Systeme de repartition homogene de la temperature a la surface d'une semelle sur laquelle est dispose un element - Google Patents

Systeme de repartition homogene de la temperature a la surface d'une semelle sur laquelle est dispose un element

Info

Publication number
FR2836595B1
FR2836595B1 FR0203083A FR0203083A FR2836595B1 FR 2836595 B1 FR2836595 B1 FR 2836595B1 FR 0203083 A FR0203083 A FR 0203083A FR 0203083 A FR0203083 A FR 0203083A FR 2836595 B1 FR2836595 B1 FR 2836595B1
Authority
FR
France
Prior art keywords
sole
available
temperature
homogeneous distribution
homogeneous
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0203083A
Other languages
English (en)
Other versions
FR2836595A1 (fr
Inventor
Yvon Pellegrin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semco Engineering SA
Original Assignee
Semco Engineering SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semco Engineering SA filed Critical Semco Engineering SA
Priority to FR0203083A priority Critical patent/FR2836595B1/fr
Publication of FR2836595A1 publication Critical patent/FR2836595A1/fr
Application granted granted Critical
Publication of FR2836595B1 publication Critical patent/FR2836595B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
    • H01L21/6833—Details of electrostatic chucks

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
FR0203083A 2002-02-27 2002-02-27 Systeme de repartition homogene de la temperature a la surface d'une semelle sur laquelle est dispose un element Expired - Fee Related FR2836595B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR0203083A FR2836595B1 (fr) 2002-02-27 2002-02-27 Systeme de repartition homogene de la temperature a la surface d'une semelle sur laquelle est dispose un element

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0203083A FR2836595B1 (fr) 2002-02-27 2002-02-27 Systeme de repartition homogene de la temperature a la surface d'une semelle sur laquelle est dispose un element

Publications (2)

Publication Number Publication Date
FR2836595A1 FR2836595A1 (fr) 2003-08-29
FR2836595B1 true FR2836595B1 (fr) 2005-04-08

Family

ID=27676224

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0203083A Expired - Fee Related FR2836595B1 (fr) 2002-02-27 2002-02-27 Systeme de repartition homogene de la temperature a la surface d'une semelle sur laquelle est dispose un element

Country Status (1)

Country Link
FR (1) FR2836595B1 (fr)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0635870A1 (fr) * 1993-07-20 1995-01-25 Applied Materials, Inc. Un support électrostatique ayant une surface rayée
US6125025A (en) * 1998-09-30 2000-09-26 Lam Research Corporation Electrostatic dechucking method and apparatus for dielectric workpieces in vacuum processors
TW517265B (en) * 2000-06-23 2003-01-11 Applied Materials Inc Apparatus for supporting a substrate and method of fabricating same

Also Published As

Publication number Publication date
FR2836595A1 (fr) 2003-08-29

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20141031