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FR2891280B1 - Formation de silicium poreux dans une plaquette de silicium - Google Patents

Formation de silicium poreux dans une plaquette de silicium

Info

Publication number
FR2891280B1
FR2891280B1 FR0552943A FR0552943A FR2891280B1 FR 2891280 B1 FR2891280 B1 FR 2891280B1 FR 0552943 A FR0552943 A FR 0552943A FR 0552943 A FR0552943 A FR 0552943A FR 2891280 B1 FR2891280 B1 FR 2891280B1
Authority
FR
France
Prior art keywords
silicon
platelet
formation
porous
porous silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0552943A
Other languages
English (en)
Other versions
FR2891280A1 (fr
Inventor
Sebastien Kouassi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
STMicroelectronics SA
Original Assignee
STMicroelectronics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by STMicroelectronics SA filed Critical STMicroelectronics SA
Priority to FR0552943A priority Critical patent/FR2891280B1/fr
Priority to US11/529,637 priority patent/US7704630B2/en
Publication of FR2891280A1 publication Critical patent/FR2891280A1/fr
Application granted granted Critical
Publication of FR2891280B1 publication Critical patent/FR2891280B1/fr
Priority to US12/706,002 priority patent/US8216739B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/12—Etching of semiconducting materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B1/00—Devices without movable or flexible elements, e.g. microcapillary devices
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/14—Etching locally
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/02—Details
    • H01M8/0202—Collectors; Separators, e.g. bipolar separators; Interconnectors
    • H01M8/023—Porous and characterised by the material
    • H01M8/0232—Metals or alloys
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/1097—Fuel cells applied on a support, e.g. miniature fuel cells deposited on silica supports
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M2008/1095—Fuel cells with polymeric electrolytes
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Sustainable Energy (AREA)
  • Sustainable Development (AREA)
  • Manufacturing & Machinery (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Weting (AREA)
  • Fuel Cell (AREA)
  • Inert Electrodes (AREA)
FR0552943A 2005-09-29 2005-09-29 Formation de silicium poreux dans une plaquette de silicium Expired - Fee Related FR2891280B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR0552943A FR2891280B1 (fr) 2005-09-29 2005-09-29 Formation de silicium poreux dans une plaquette de silicium
US11/529,637 US7704630B2 (en) 2005-09-29 2006-09-28 Fuel cell with a large exchange surface area
US12/706,002 US8216739B2 (en) 2005-09-29 2010-02-16 Fuel cell with large exchange surface area

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0552943A FR2891280B1 (fr) 2005-09-29 2005-09-29 Formation de silicium poreux dans une plaquette de silicium

Publications (2)

Publication Number Publication Date
FR2891280A1 FR2891280A1 (fr) 2007-03-30
FR2891280B1 true FR2891280B1 (fr) 2008-01-18

Family

ID=36241067

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0552943A Expired - Fee Related FR2891280B1 (fr) 2005-09-29 2005-09-29 Formation de silicium poreux dans une plaquette de silicium

Country Status (2)

Country Link
US (2) US7704630B2 (fr)
FR (1) FR2891280B1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2168196B1 (fr) * 2007-06-29 2018-12-26 Universite Joseph Fourier - Grenoble 1 Dispositif de membrane artificielle biomimétique
EP2191531B1 (fr) * 2007-09-20 2011-09-14 STMicroelectronics SA Support de cellules de pile a combustible
US9401247B2 (en) * 2011-09-21 2016-07-26 Semiconductor Energy Laboratory Co., Ltd. Negative electrode for power storage device and power storage device
RU2572128C1 (ru) * 2014-07-29 2015-12-27 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Воронежский государственный университет" (ФГБОУ ВПО ВГУ) Способ получения порошков пористого кремния
CN104532337A (zh) * 2015-01-09 2015-04-22 中国矿业大学 一种电腐蚀法快速大面积制备铁基超疏水表面的方法
US20230367024A1 (en) * 2020-09-16 2023-11-16 Amir Massoud Dabiran Nanostructured high-energy particle imaging sensor and a nanoinjection molding process for making the same and other nanostructures

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4180146A (en) * 1978-03-13 1979-12-25 Hurst Performance, Inc. Brake assembly with dual compensation adjustment
US4180416A (en) * 1978-09-27 1979-12-25 International Business Machines Corporation Thermal migration-porous silicon technique for forming deep dielectric isolation
US5759712A (en) 1997-01-06 1998-06-02 Hockaday; Robert G. Surface replica fuel cell for micro fuel cell electrical power pack
US6103077A (en) 1998-01-02 2000-08-15 De Nora S.P.A. Structures and methods of manufacture for gas diffusion electrodes and electrode components
US6664169B1 (en) * 1999-06-08 2003-12-16 Canon Kabushiki Kaisha Process for producing semiconductor member, process for producing solar cell, and anodizing apparatus
DE19941048A1 (de) * 1999-08-28 2001-03-01 Bosch Gmbh Robert Vorrichtung und Verfahren zur Erzeugung strukturierter Oberflächen mit erhöhter Resistenz gegen Verschmutzung und Benetzung
US6641948B1 (en) * 1999-11-17 2003-11-04 Neah Power Systems Inc Fuel cells having silicon substrates and/or sol-gel derived support structures
US7427526B2 (en) * 1999-12-20 2008-09-23 The Penn State Research Foundation Deposited thin films and their use in separation and sacrificial layer applications
US20030096146A1 (en) 2001-03-30 2003-05-22 Foster Ronald B. Planar substrate-based fuel cell Membrane Electrode Assembly and integrated circuitry
EP1258937A1 (fr) 2001-05-17 2002-11-20 STMicroelectronics S.r.l. Micropile à combustible à silicium, méthode de fabrication et dispositif semiconducteur autonome comportant une micropile à combustible
WO2004109837A2 (fr) 2002-10-31 2004-12-16 Carbon Nanotechnologies, Inc. Electrode de pile a combustible comprenant des nanotubes de carbone
FR2846797A1 (fr) * 2002-12-20 2004-05-07 Commissariat Energie Atomique Module de base monobloc et a relief de pile a combustible miniature et son procede de fabrication
WO2004091026A2 (fr) 2003-04-04 2004-10-21 Sagem Sa Micropiles a combustible destinees particulierement aux dispositif electroniques portables et aux dispositifs de telecommunications
TWI242232B (en) 2003-06-09 2005-10-21 Canon Kk Semiconductor substrate, semiconductor device, and method of manufacturing the same

Also Published As

Publication number Publication date
US7704630B2 (en) 2010-04-27
US20100216054A1 (en) 2010-08-26
US8216739B2 (en) 2012-07-10
US20070072032A1 (en) 2007-03-29
FR2891280A1 (fr) 2007-03-30

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20130531