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FR2876180B1 - Resonateur a masses oscillantes. - Google Patents

Resonateur a masses oscillantes.

Info

Publication number
FR2876180B1
FR2876180B1 FR0452276A FR0452276A FR2876180B1 FR 2876180 B1 FR2876180 B1 FR 2876180B1 FR 0452276 A FR0452276 A FR 0452276A FR 0452276 A FR0452276 A FR 0452276A FR 2876180 B1 FR2876180 B1 FR 2876180B1
Authority
FR
France
Prior art keywords
resonator
oscillating masses
masses
oscillating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0452276A
Other languages
English (en)
Other versions
FR2876180A1 (fr
Inventor
Elisabeth Delevoye
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0452276A priority Critical patent/FR2876180B1/fr
Priority to EP05810750A priority patent/EP1797395A1/fr
Priority to PCT/FR2005/050815 priority patent/WO2006037928A1/fr
Priority to JP2007535218A priority patent/JP2008516217A/ja
Priority to US11/576,777 priority patent/US7637155B2/en
Publication of FR2876180A1 publication Critical patent/FR2876180A1/fr
Application granted granted Critical
Publication of FR2876180B1 publication Critical patent/FR2876180B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02259—Driving or detection means
    • H03H9/02275—Comb electrodes
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H9/2431—Ring resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H9/02338—Suspension means
    • H03H2009/02346—Anchors for ring resonators
    • H03H2009/02354—Anchors for ring resonators applied along the periphery, e.g. at nodal points of the ring
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02244—Details of microelectro-mechanical resonators
    • H03H2009/02488—Vibration modes
    • H03H2009/02496—Horizontal, i.e. parallel to the substrate plane
    • H03H2009/02503—Breath-like, e.g. Lam? mode, wine-glass mode
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/24—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive
    • H03H9/2405—Constructional features of resonators of material which is not piezoelectric, electrostrictive, or magnetostrictive of microelectro-mechanical resonators
    • H03H2009/2442—Square resonators

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Gyroscopes (AREA)
FR0452276A 2004-10-06 2004-10-06 Resonateur a masses oscillantes. Expired - Fee Related FR2876180B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR0452276A FR2876180B1 (fr) 2004-10-06 2004-10-06 Resonateur a masses oscillantes.
EP05810750A EP1797395A1 (fr) 2004-10-06 2005-10-05 Resonateur a masses oscillantes
PCT/FR2005/050815 WO2006037928A1 (fr) 2004-10-06 2005-10-05 Resonateur a masses oscillantes
JP2007535218A JP2008516217A (ja) 2004-10-06 2005-10-05 振動質量共振器
US11/576,777 US7637155B2 (en) 2004-10-06 2005-10-05 Oscillating mass resonator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0452276A FR2876180B1 (fr) 2004-10-06 2004-10-06 Resonateur a masses oscillantes.

Publications (2)

Publication Number Publication Date
FR2876180A1 FR2876180A1 (fr) 2006-04-07
FR2876180B1 true FR2876180B1 (fr) 2006-12-08

Family

ID=34954605

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0452276A Expired - Fee Related FR2876180B1 (fr) 2004-10-06 2004-10-06 Resonateur a masses oscillantes.

Country Status (5)

Country Link
US (1) US7637155B2 (fr)
EP (1) EP1797395A1 (fr)
JP (1) JP2008516217A (fr)
FR (1) FR2876180B1 (fr)
WO (1) WO2006037928A1 (fr)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2905457B1 (fr) * 2006-09-01 2008-10-17 Commissariat Energie Atomique Microsysteme, plus particulierement microgyrometre, avec element de detection a electrodes capacitives.
FR2910742B1 (fr) 2006-12-22 2009-05-01 Commissariat Energie Atomique Oscillateur mecanique forme d'un reseau d'oscillateurs elementaires
US8952832B2 (en) 2008-01-18 2015-02-10 Invensense, Inc. Interfacing application programs and motion sensors of a device
US8508039B1 (en) 2008-05-08 2013-08-13 Invensense, Inc. Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics
US8462109B2 (en) 2007-01-05 2013-06-11 Invensense, Inc. Controlling and accessing content using motion processing on mobile devices
US8141424B2 (en) * 2008-09-12 2012-03-27 Invensense, Inc. Low inertia frame for detecting coriolis acceleration
US7934423B2 (en) 2007-12-10 2011-05-03 Invensense, Inc. Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics
US8250921B2 (en) 2007-07-06 2012-08-28 Invensense, Inc. Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics
DE102007051591B4 (de) * 2007-10-12 2019-04-25 Robert Bosch Gmbh Mikromechanische Vorrichtung mit Antriebsrahmen
US7777596B2 (en) * 2007-12-18 2010-08-17 Robert Bosch Gmbh MEMS resonator structure and method
JP5228675B2 (ja) * 2008-07-29 2013-07-03 富士通株式会社 角速度センサおよび電子装置
FI20095201A0 (fi) 2009-03-02 2009-03-02 Vti Technologies Oy Värähtelevä mikromekaaninen kulmanopeusanturi
JP5206709B2 (ja) * 2009-03-18 2013-06-12 株式会社豊田中央研究所 可動体を備えている装置
FR2945621B1 (fr) 2009-05-15 2011-08-26 Commissariat Energie Atomique Structure de couplage pour gyrometre resonnant
FR2946479A1 (fr) * 2009-06-09 2010-12-10 Commissariat Energie Atomique Resonateur electromecanique a ancrage resonant.
CN102334008B (zh) * 2010-01-12 2015-07-15 索尼公司 角速度传感器、电子设备以及角速度的检测方法
JP4905574B2 (ja) * 2010-03-25 2012-03-28 株式会社豊田中央研究所 可動部分を備えている積層構造体
US9571013B2 (en) 2010-10-12 2017-02-14 Colorado Seminary Micromechanical resonators
JP5789485B2 (ja) * 2011-11-08 2015-10-07 日本電波工業株式会社 水晶振動子
EP2544370B1 (fr) * 2011-07-06 2020-01-01 Nxp B.V. Résonateur MEMS
US10203272B2 (en) 2011-10-12 2019-02-12 Colorado Seminary, University of Denver MEMS aerosol impactor
FR3008190B1 (fr) 2013-07-08 2015-08-07 Commissariat Energie Atomique Procede et dispositif de mesure d'un champ magnetique au moyen d'excitations synchronisees
US9476712B2 (en) * 2013-07-31 2016-10-25 Honeywell International Inc. MEMS device mechanism enhancement for robust operation through severe shock and acceleration
JP6196736B2 (ja) * 2013-12-23 2017-09-13 ウーテーアー・エス・アー・マニファクチュール・オロロジェール・スイス 計時器用同期機構

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5349855A (en) * 1992-04-07 1994-09-27 The Charles Stark Draper Laboratory, Inc. Comb drive micromechanical tuning fork gyro
DE4414237A1 (de) * 1994-04-23 1995-10-26 Bosch Gmbh Robert Mikromechanischer Schwinger eines Schwingungsgyrometers
DE19500800A1 (de) * 1994-06-16 1995-12-21 Bosch Gmbh Robert Beschleunigungssensor
DE4442033C2 (de) * 1994-11-25 1997-12-18 Bosch Gmbh Robert Drehratensensor
US5635638A (en) * 1995-06-06 1997-06-03 Analog Devices, Inc. Coupling for multiple masses in a micromachined device
JP3882972B2 (ja) * 1998-06-18 2007-02-21 アイシン精機株式会社 角速度センサ
DE19844686A1 (de) * 1998-09-29 2000-04-06 Fraunhofer Ges Forschung Mikromechanischer Drehratensensor und Verfahren zur Herstellung
JP2000105124A (ja) * 1998-09-30 2000-04-11 Aisin Seiki Co Ltd 静電駆動，静電検出式の角速度センサ
FR2846740B1 (fr) * 2002-11-05 2005-02-04 Thales Sa Capteur gyrometrique micro-usine, a detection dans le plan de la plaque usinee
US6843127B1 (en) * 2003-07-30 2005-01-18 Motorola, Inc. Flexible vibratory micro-electromechanical device
US6892575B2 (en) * 2003-10-20 2005-05-17 Invensense Inc. X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging

Also Published As

Publication number Publication date
FR2876180A1 (fr) 2006-04-07
WO2006037928A1 (fr) 2006-04-13
US7637155B2 (en) 2009-12-29
JP2008516217A (ja) 2008-05-15
EP1797395A1 (fr) 2007-06-20
US20090249873A1 (en) 2009-10-08

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Year of fee payment: 13

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Effective date: 20180629