[go: up one dir, main page]

FR2873045B1 - Traitement d'effluents gazeux par plasma a pression atmospherique - Google Patents

Traitement d'effluents gazeux par plasma a pression atmospherique

Info

Publication number
FR2873045B1
FR2873045B1 FR0451527A FR0451527A FR2873045B1 FR 2873045 B1 FR2873045 B1 FR 2873045B1 FR 0451527 A FR0451527 A FR 0451527A FR 0451527 A FR0451527 A FR 0451527A FR 2873045 B1 FR2873045 B1 FR 2873045B1
Authority
FR
France
Prior art keywords
treatment
atmospheric pressure
pressure plasma
gaseous effluents
effluents
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0451527A
Other languages
English (en)
Other versions
FR2873045A1 (fr
Inventor
Yassine Kabouzi
Michel Moisan
Jean Christophe Rostaing
Daniel Guerin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Priority to FR0451527A priority Critical patent/FR2873045B1/fr
Priority to CN 200580023515 priority patent/CN101065182A/zh
Priority to EP05789918A priority patent/EP1768776A2/fr
Priority to JP2007520867A priority patent/JP2008506516A/ja
Priority to US11/571,652 priority patent/US20080234530A1/en
Priority to PCT/FR2005/050555 priority patent/WO2006008421A2/fr
Publication of FR2873045A1 publication Critical patent/FR2873045A1/fr
Application granted granted Critical
Publication of FR2873045B1 publication Critical patent/FR2873045B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J19/087—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor employing electric or magnetic energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/32—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by electrical effects other than those provided for in group B01D61/00
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/80—Employing electric, magnetic, electromagnetic or wave energy, or particle radiation
    • B01D2259/818—Employing electrical discharges or the generation of a plasma
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0869—Feeding or evacuating the reactor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0873—Materials to be treated
    • B01J2219/0875—Gas
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Treating Waste Gases (AREA)
FR0451527A 2004-07-13 2004-07-13 Traitement d'effluents gazeux par plasma a pression atmospherique Expired - Fee Related FR2873045B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR0451527A FR2873045B1 (fr) 2004-07-13 2004-07-13 Traitement d'effluents gazeux par plasma a pression atmospherique
CN 200580023515 CN101065182A (zh) 2004-07-13 2005-07-08 气态流出物的常压等离子体处理
EP05789918A EP1768776A2 (fr) 2004-07-13 2005-07-08 Traitement d'effluents gazeux par plasma a pression atmospherique
JP2007520867A JP2008506516A (ja) 2004-07-13 2005-07-08 ガス排出物の大気圧プラズマ処理
US11/571,652 US20080234530A1 (en) 2004-07-13 2005-07-08 Atmospheric Pressure Plasma Treatment of Gaseous Effluents
PCT/FR2005/050555 WO2006008421A2 (fr) 2004-07-13 2005-07-08 Traitement d'effluents gazeux par plasma a pression atmospherique

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0451527A FR2873045B1 (fr) 2004-07-13 2004-07-13 Traitement d'effluents gazeux par plasma a pression atmospherique

Publications (2)

Publication Number Publication Date
FR2873045A1 FR2873045A1 (fr) 2006-01-20
FR2873045B1 true FR2873045B1 (fr) 2007-01-19

Family

ID=34949995

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0451527A Expired - Fee Related FR2873045B1 (fr) 2004-07-13 2004-07-13 Traitement d'effluents gazeux par plasma a pression atmospherique

Country Status (2)

Country Link
CN (1) CN101065182A (fr)
FR (1) FR2873045B1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2888130A1 (fr) * 2005-07-06 2007-01-12 Air Liquide Electronics Sys Traitement d'effluents gazeux par plasma a pression atmospherique
GB2497273B (en) * 2011-11-19 2017-09-13 Edwards Ltd Apparatus for treating a gas stream
US10573496B2 (en) * 2014-12-09 2020-02-25 Applied Materials, Inc. Direct outlet toroidal plasma source

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5349154A (en) * 1991-10-16 1994-09-20 Rockwell International Corporation Diamond growth by microwave generated plasma flame
FR2751565B1 (fr) * 1996-07-26 1998-09-04 Air Liquide Procede et installation de traitement de gaz perfluores et hydrofluorocarbones en vue de leur destruction
CA2410927A1 (fr) * 2002-11-05 2004-05-05 Michel Petitclerc Reacteur a chauffage electrique pour le reformage en phase gazeuse

Also Published As

Publication number Publication date
CN101065182A (zh) 2007-10-31
FR2873045A1 (fr) 2006-01-20

Similar Documents

Publication Publication Date Title
DE60315814D1 (de) Drehschwenkmechanismus eines tragbaren fernsprechers
NO20042275L (no) Nasal mask
FR2835191B3 (fr) Appareil maniable pour exercices physiques par pression exercee sur le corps
BR0316705B1 (pt) aparelho para fornecer pressço positiva a via aÉrea a um paciente.
EP1991297A4 (fr) Détermination d'apnéee/hypopnée pendant un traitement par pression positive continue (cpap)
FR2869229B1 (fr) Utilisation d'un inducteur des ugt par voie topique
JP2004508162A5 (fr)
DE602005024877D1 (de) Ausatmungseinheit eines Atemgerätes
NO20064935L (no) Fremgangsmate for fremstilling av oksykodonhydroklorid som har mindre enn 25 ppm 14-hydroksykodeioner
TW200639161A (en) Process for the purification of duloxetine hydrochloride
DE502004005591D1 (de) Druckgastank
EP1943004A4 (fr) Cycloaddition catalysee par le ruthenium d'alcynes et d'azides organiques
MA31145B1 (fr) Composition antivirale et procede d'utilisation
IS7446A (is) Aðferð til að mynda næriþekjur prímata
MA27168A1 (fr) Corps portant du phosphate-glycerol pharmaceutiquement acceptable
IS7092A (is) Einfaldur skammtur af asíþrómýsíni til meðhöndlunar á sýkingum í öndunarvegi
PT1799878E (pt) Deposição de vapor químico à pressão atmosférica
MY148459A (en) Use of benzo-fused heterocycle sulfamide derivatives for the treatment of depression
EP1885366A4 (fr) Chaperones pharmacologiques destinees a traiter l'obesite
FR2852113B1 (fr) Regulateur de pression
FR2943537B1 (fr) Traitement des nevrites vestibulaires par l'acetyl-l-leucine
FR2873045B1 (fr) Traitement d'effluents gazeux par plasma a pression atmospherique
FR2868962B1 (fr) Procede de purification d'un gaz naturel par adsorption des mercaptans.
ITBO20020310A0 (it) Apparato di controllo dell ' erogazione di gas medicinali , particolarmente per l ' ausilio alla respirazione
FR2839749B1 (fr) Carburateur a membrane

Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20150331