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FR2711276B1 - Cellule photovoltaïque et procédé de fabrication d'une telle cellule. - Google Patents

Cellule photovoltaïque et procédé de fabrication d'une telle cellule.

Info

Publication number
FR2711276B1
FR2711276B1 FR9312246A FR9312246A FR2711276B1 FR 2711276 B1 FR2711276 B1 FR 2711276B1 FR 9312246 A FR9312246 A FR 9312246A FR 9312246 A FR9312246 A FR 9312246A FR 2711276 B1 FR2711276 B1 FR 2711276B1
Authority
FR
France
Prior art keywords
layer
pct
cell
conductivity type
date
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9312246A
Other languages
English (en)
Other versions
FR2711276A1 (fr
Inventor
Herbert Keppner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite de Neuchatel
Original Assignee
Universite de Neuchatel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Universite de Neuchatel filed Critical Universite de Neuchatel
Priority to FR9312246A priority Critical patent/FR2711276B1/fr
Priority to US08/446,628 priority patent/US5589008A/en
Priority to PCT/CH1994/000192 priority patent/WO1995010856A1/fr
Priority to EP94926766A priority patent/EP0673549A1/fr
Priority to JP7511140A priority patent/JPH08508368A/ja
Priority to AU76506/94A priority patent/AU7650694A/en
Publication of FR2711276A1 publication Critical patent/FR2711276A1/fr
Application granted granted Critical
Publication of FR2711276B1 publication Critical patent/FR2711276B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F10/00Individual photovoltaic cells, e.g. solar cells
    • H10F10/10Individual photovoltaic cells, e.g. solar cells having potential barriers
    • H10F10/16Photovoltaic cells having only PN heterojunction potential barriers
    • H10F10/164Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells
    • H10F10/165Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells the heterojunctions being Group IV-IV heterojunctions, e.g. Si/Ge, SiGe/Si or Si/SiC photovoltaic cells
    • H10F10/166Photovoltaic cells having only PN heterojunction potential barriers comprising heterojunctions with Group IV materials, e.g. ITO/Si or GaAs/SiGe photovoltaic cells the heterojunctions being Group IV-IV heterojunctions, e.g. Si/Ge, SiGe/Si or Si/SiC photovoltaic cells the Group IV-IV heterojunctions being heterojunctions of crystalline and amorphous materials, e.g. silicon heterojunction [SHJ] photovoltaic cells
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/244Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/20Electrodes
    • H10F77/244Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
    • H10F77/251Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers comprising zinc oxide [ZnO]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/40Optical elements or arrangements
    • H10F77/42Optical elements or arrangements directly associated or integrated with photovoltaic cells, e.g. light-reflecting means or light-concentrating means
    • H10F77/48Back surface reflectors [BSR]
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/70Surface textures, e.g. pyramid structures
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/70Surface textures, e.g. pyramid structures
    • H10F77/703Surface textures, e.g. pyramid structures of the semiconductor bodies, e.g. textured active layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10FINORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00Constructional details of devices covered by this subclass
    • H10F77/70Surface textures, e.g. pyramid structures
    • H10F77/707Surface textures, e.g. pyramid structures of the substrates or of layers on substrates, e.g. textured ITO layer on a glass substrate
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/52PV systems with concentrators
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00Semiconductor device manufacturing: process
    • Y10S438/958Passivation layer

Landscapes

  • Photovoltaic Devices (AREA)
FR9312246A 1993-10-11 1993-10-11 Cellule photovoltaïque et procédé de fabrication d'une telle cellule. Expired - Fee Related FR2711276B1 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR9312246A FR2711276B1 (fr) 1993-10-11 1993-10-11 Cellule photovoltaïque et procédé de fabrication d'une telle cellule.
US08/446,628 US5589008A (en) 1993-10-11 1994-09-27 Photovoltaic cell and method for fabrication of said cell
PCT/CH1994/000192 WO1995010856A1 (fr) 1993-10-11 1994-09-27 Cellule photovoltaique et procede de fabrication d'une telle cellule
EP94926766A EP0673549A1 (fr) 1993-10-11 1994-09-27 Cellule photovoltaique et procede de fabrication d'une telle cellule
JP7511140A JPH08508368A (ja) 1993-10-11 1994-09-27 光電池および光電池を製造するための方法
AU76506/94A AU7650694A (en) 1993-10-11 1994-09-27 Photovoltaic cell and method for fabrication of said cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9312246A FR2711276B1 (fr) 1993-10-11 1993-10-11 Cellule photovoltaïque et procédé de fabrication d'une telle cellule.

Publications (2)

Publication Number Publication Date
FR2711276A1 FR2711276A1 (fr) 1995-04-21
FR2711276B1 true FR2711276B1 (fr) 1995-12-01

Family

ID=9451834

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9312246A Expired - Fee Related FR2711276B1 (fr) 1993-10-11 1993-10-11 Cellule photovoltaïque et procédé de fabrication d'une telle cellule.

Country Status (6)

Country Link
US (1) US5589008A (fr)
EP (1) EP0673549A1 (fr)
JP (1) JPH08508368A (fr)
AU (1) AU7650694A (fr)
FR (1) FR2711276B1 (fr)
WO (1) WO1995010856A1 (fr)

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US6587097B1 (en) 2000-11-28 2003-07-01 3M Innovative Properties Co. Display system
US6750394B2 (en) * 2001-01-12 2004-06-15 Sharp Kabushiki Kaisha Thin-film solar cell and its manufacturing method
US7442629B2 (en) 2004-09-24 2008-10-28 President & Fellows Of Harvard College Femtosecond laser-induced formation of submicrometer spikes on a semiconductor substrate
US7057256B2 (en) 2001-05-25 2006-06-06 President & Fellows Of Harvard College Silicon-based visible and near-infrared optoelectric devices
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CN2550906Y (zh) * 2002-05-27 2003-05-14 李映华 立体光双面结光电池
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Also Published As

Publication number Publication date
WO1995010856A1 (fr) 1995-04-20
JPH08508368A (ja) 1996-09-03
EP0673549A1 (fr) 1995-09-27
US5589008A (en) 1996-12-31
FR2711276A1 (fr) 1995-04-21
AU7650694A (en) 1995-05-04

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