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FR2705693B1 - Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide. - Google Patents

Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide.

Info

Publication number
FR2705693B1
FR2705693B1 FR9306281A FR9306281A FR2705693B1 FR 2705693 B1 FR2705693 B1 FR 2705693B1 FR 9306281 A FR9306281 A FR 9306281A FR 9306281 A FR9306281 A FR 9306281A FR 2705693 B1 FR2705693 B1 FR 2705693B1
Authority
FR
France
Prior art keywords
fluid
piece
convey
contain
closing plates
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9306281A
Other languages
English (en)
Other versions
FR2705693A1 (fr
Inventor
De Rooij Nicolaas Frans
Gass Volker
Jeanneret Sylvain
Der Schoot Van Bart
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Universite de Neuchatel
Original Assignee
Universite de Neuchatel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR9306281A priority Critical patent/FR2705693B1/fr
Application filed by Universite de Neuchatel filed Critical Universite de Neuchatel
Priority to SG1996003690A priority patent/SG47036A1/en
Priority to EP94107419A priority patent/EP0641934B1/fr
Priority to JP12333394A priority patent/JP3651809B2/ja
Priority to DK94107419.7T priority patent/DK0641934T3/da
Priority to ES94107419T priority patent/ES2099991T3/es
Priority to AT94107419T priority patent/ATE146853T1/de
Priority to DE69401250T priority patent/DE69401250T2/de
Priority to US08/247,550 priority patent/US5462839A/en
Publication of FR2705693A1 publication Critical patent/FR2705693A1/fr
Application granted granted Critical
Publication of FR2705693B1 publication Critical patent/FR2705693B1/fr
Priority to HK98106084A priority patent/HK1006739A1/xx
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • External Artificial Organs (AREA)
  • Weting (AREA)
  • Lubricants (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
FR9306281A 1993-05-24 1993-05-24 Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide. Expired - Fee Related FR2705693B1 (fr)

Priority Applications (10)

Application Number Priority Date Filing Date Title
FR9306281A FR2705693B1 (fr) 1993-05-24 1993-05-24 Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide.
DE69401250T DE69401250T2 (de) 1993-05-24 1994-05-13 Herstellungsverfahren einer Mikropumpe
JP12333394A JP3651809B2 (ja) 1993-05-24 1994-05-13 流体を入れまたは運ぶための超小形装置の製造方法及びその方法により製造した装置
DK94107419.7T DK0641934T3 (da) 1993-05-24 1994-05-13 Fremgangsmåde til fremstiling af en mikropumpe.
ES94107419T ES2099991T3 (es) 1993-05-24 1994-05-13 Procedimiento de fabricacion de una microbomba.
AT94107419T ATE146853T1 (de) 1993-05-24 1994-05-13 Herstellungsverfahren einer mikropumpe
SG1996003690A SG47036A1 (en) 1993-05-24 1994-05-13 Process for the manufacture of a micromachines device to contain or convey a fluid
EP94107419A EP0641934B1 (fr) 1993-05-24 1994-05-13 Procédé de fabrication d'une micropompe
US08/247,550 US5462839A (en) 1993-05-24 1994-05-23 Process for the manufacture of a micromachined device to contain or convey a fluid
HK98106084A HK1006739A1 (en) 1993-05-24 1998-06-23 Manufacturing process for a micropump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9306281A FR2705693B1 (fr) 1993-05-24 1993-05-24 Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide.

Publications (2)

Publication Number Publication Date
FR2705693A1 FR2705693A1 (fr) 1994-12-02
FR2705693B1 true FR2705693B1 (fr) 1995-07-28

Family

ID=9447460

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9306281A Expired - Fee Related FR2705693B1 (fr) 1993-05-24 1993-05-24 Procédé de fabrication d'un dispositif micro-usiné à contenir ou à véhiculer un fluide.

Country Status (10)

Country Link
US (1) US5462839A (fr)
EP (1) EP0641934B1 (fr)
JP (1) JP3651809B2 (fr)
AT (1) ATE146853T1 (fr)
DE (1) DE69401250T2 (fr)
DK (1) DK0641934T3 (fr)
ES (1) ES2099991T3 (fr)
FR (1) FR2705693B1 (fr)
HK (1) HK1006739A1 (fr)
SG (1) SG47036A1 (fr)

Families Citing this family (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6281560B1 (en) 1995-10-10 2001-08-28 Georgia Tech Research Corp. Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices
US6377155B1 (en) 1995-10-10 2002-04-23 Georgia Tech Research Corp. Microfabricated electromagnetic system and method for forming electromagnets in microfabricated devices
US5847631A (en) * 1995-10-10 1998-12-08 Georgia Tech Research Corporation Magnetic relay system and method capable of microfabrication production
US5879632A (en) * 1996-04-09 1999-03-09 Sarnoff Corporation Apportioning system
WO1998001533A1 (fr) 1996-07-08 1998-01-15 Burstein Laboratories, Inc. Procede et dispositif a element de signal clivable
US20050214827A1 (en) * 1996-07-08 2005-09-29 Burstein Technologies, Inc. Assay device and method
US6342349B1 (en) 1996-07-08 2002-01-29 Burstein Technologies, Inc. Optical disk-based assay devices and methods
US6331275B1 (en) 1996-07-08 2001-12-18 Burstein Technologies, Inc. Spatially addressable, cleavable reflective signal elements, assay device and method
DE19705910C1 (de) * 1997-02-15 1998-06-18 Inst Physikalische Hochtech Ev Mikrokammerarray mit hoher Kammerdichte
DE19719862A1 (de) 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Mikromembranpumpe
DE19719861A1 (de) 1997-05-12 1998-11-19 Fraunhofer Ges Forschung Verfahren zum Herstellen eines Mikromembranpumpenkörpers
EP1129741B1 (fr) 1997-11-19 2006-04-12 Microflow Engineering SA Dispositif de pulvérisation pour inhalateur
WO2000005582A2 (fr) * 1998-07-21 2000-02-03 Burstein Laboratories, Inc. Dispositifs de dosage utilisant des disques optiques et methodes correspondantes
DE1005917T1 (de) 1998-12-01 2001-01-11 Microflow Engineering S.A., Neuenburg/Neuchatel Inhalator mit Ultraschallzerstäuber dessen Sprühöffnungen den Maximalamplituden eines stehenden Wellenmusters überlagert sind
US6410360B1 (en) 1999-01-26 2002-06-25 Teledyne Industries, Inc. Laminate-based apparatus and method of fabrication
US6905614B1 (en) 2000-05-24 2005-06-14 Active Optical Networks, Inc. Pattern-transfer process for forming micro-electro-mechanical structures
US6827866B1 (en) * 2000-05-24 2004-12-07 Active Optical Networks, Inc. Deep-well lithography process for forming micro-electro-mechanical structures
AU2002241602A1 (en) * 2000-11-16 2002-06-11 Burstein Technologies, Inc. Methods and apparatus for detecting and quantifying lymphocytes with optical biodiscs
US6965433B2 (en) * 2000-11-16 2005-11-15 Nagaoka & Co., Ltd. Optical biodiscs with reflective layers
US7087203B2 (en) * 2000-11-17 2006-08-08 Nagaoka & Co., Ltd. Methods and apparatus for blood typing with optical bio-disc
US7026131B2 (en) * 2000-11-17 2006-04-11 Nagaoka & Co., Ltd. Methods and apparatus for blood typing with optical bio-discs
EP1236517A1 (fr) * 2001-02-23 2002-09-04 Microflow Engineering SA Procédé de fabrication d'un nébuliseur de goutelettes et un tel nébuliseur
US7141416B2 (en) * 2001-07-12 2006-11-28 Burstein Technologies, Inc. Multi-purpose optical analysis optical bio-disc for conducting assays and various reporting agents for use therewith
WO2003021222A2 (fr) * 2001-08-31 2003-03-13 Burstein Technologies, Inc. Ensembles a couche de capture destines a des analyses cellulaires, comportant des disques d'analyse optiques, et procedes correspondants
AU2002335715A1 (en) * 2001-09-07 2003-03-24 Burstein Technologies, Inc. Optical bio-disc systems for nuclear morphology based identification
US20050003459A1 (en) * 2002-01-30 2005-01-06 Krutzik Siegfried Richard Multi-purpose optical analysis disc for conducting assays and related methods for attaching capture agents
US20040241381A1 (en) * 2002-01-31 2004-12-02 Chen Yihfar Microfluidic structures with circumferential grooves for bonding adhesives and related optical analysis discs
WO2003065355A2 (fr) * 2002-01-31 2003-08-07 Burstein Technologies, Inc. Elements de securite biologique pour disque d'analyse optique et systeme de disques les contenant
US20070274863A1 (en) * 2003-07-25 2007-11-29 Horacio Kido Fluidic circuits for sample preparation including bio-discs and methods relating thereto
US7723899B2 (en) 2004-02-03 2010-05-25 S.C. Johnson & Son, Inc. Active material and light emitting device
US7538473B2 (en) * 2004-02-03 2009-05-26 S.C. Johnson & Son, Inc. Drive circuits and methods for ultrasonic piezoelectric actuators
EP1792662A1 (fr) 2005-11-30 2007-06-06 Microflow Engineering SA Appareil de distribution de gouttelettes
TWI580878B (zh) * 2016-07-19 2017-05-01 科際精密股份有限公司 單向閥組件
CN112016805B (zh) * 2020-07-23 2023-06-06 上海工程技术大学 一种磁流变液性能评价方法及系统
WO2025242139A1 (fr) * 2024-05-22 2025-11-27 苏州原位芯片科技有限责任公司 Micro-soupape mems et micro-pompe

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4938742A (en) * 1988-02-04 1990-07-03 Smits Johannes G Piezoelectric micropump with microvalves
ES2061042T3 (es) * 1989-06-14 1994-12-01 Westonbridge Int Ltd Microbomba perfeccionada.
CH681168A5 (en) * 1989-11-10 1993-01-29 Westonbridge Int Ltd Micro-pump for medicinal dosing
US5171132A (en) * 1989-12-27 1992-12-15 Seiko Epson Corporation Two-valve thin plate micropump
DE69106240T2 (de) * 1990-07-02 1995-05-11 Seiko Epson Corp Mikropumpe und Verfahren zur Herstellung einer Mikropumpe.

Also Published As

Publication number Publication date
EP0641934B1 (fr) 1996-12-27
ES2099991T3 (es) 1997-06-01
DE69401250D1 (de) 1997-02-06
DE69401250T2 (de) 1997-07-10
DK0641934T3 (da) 1997-10-13
ATE146853T1 (de) 1997-01-15
FR2705693A1 (fr) 1994-12-02
JP3651809B2 (ja) 2005-05-25
SG47036A1 (en) 1998-03-20
EP0641934A1 (fr) 1995-03-08
US5462839A (en) 1995-10-31
JPH0719170A (ja) 1995-01-20
HK1006739A1 (en) 1999-03-12

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Legal Events

Date Code Title Description
TP Transmission of property
TP Transmission of property
ST Notification of lapse

Effective date: 20090119