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FR2788885B1 - Dispositif de detection thermique de rayonnements electromagnetiques et procede de fabrication de celui-ci - Google Patents

Dispositif de detection thermique de rayonnements electromagnetiques et procede de fabrication de celui-ci

Info

Publication number
FR2788885B1
FR2788885B1 FR9900632A FR9900632A FR2788885B1 FR 2788885 B1 FR2788885 B1 FR 2788885B1 FR 9900632 A FR9900632 A FR 9900632A FR 9900632 A FR9900632 A FR 9900632A FR 2788885 B1 FR2788885 B1 FR 2788885B1
Authority
FR
France
Prior art keywords
manufacturing
same
electromagnetic radiation
thermal detection
thermal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9900632A
Other languages
English (en)
Other versions
FR2788885A1 (fr
Inventor
Jean Jacques Yon
Michel Vilain
Buffet Jean Louis Ouvrier
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR9900632A priority Critical patent/FR2788885B1/fr
Priority to PCT/FR2000/000120 priority patent/WO2000044050A1/fr
Priority to EP00900622A priority patent/EP1147560A1/fr
Publication of FR2788885A1 publication Critical patent/FR2788885A1/fr
Application granted granted Critical
Publication of FR2788885B1 publication Critical patent/FR2788885B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/0225—Shape of the cavity itself or of elements contained in or suspended over the cavity
    • G01J5/023—Particular leg structure or construction or shape; Nanotubes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H10F39/191—Photoconductor image sensors
    • H10F39/193—Infrared image sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
FR9900632A 1999-01-21 1999-01-21 Dispositif de detection thermique de rayonnements electromagnetiques et procede de fabrication de celui-ci Expired - Fee Related FR2788885B1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
FR9900632A FR2788885B1 (fr) 1999-01-21 1999-01-21 Dispositif de detection thermique de rayonnements electromagnetiques et procede de fabrication de celui-ci
PCT/FR2000/000120 WO2000044050A1 (fr) 1999-01-21 2000-01-20 Reseau de detecteurs thermiques de rayonnements electromagnetiques et procede de fabrication de celui-ci
EP00900622A EP1147560A1 (fr) 1999-01-21 2000-01-20 Reseau de detecteurs thermiques de rayonnements electromagnetiques et procede de fabrication de celui-ci

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9900632A FR2788885B1 (fr) 1999-01-21 1999-01-21 Dispositif de detection thermique de rayonnements electromagnetiques et procede de fabrication de celui-ci

Publications (2)

Publication Number Publication Date
FR2788885A1 FR2788885A1 (fr) 2000-07-28
FR2788885B1 true FR2788885B1 (fr) 2003-07-18

Family

ID=9541069

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9900632A Expired - Fee Related FR2788885B1 (fr) 1999-01-21 1999-01-21 Dispositif de detection thermique de rayonnements electromagnetiques et procede de fabrication de celui-ci

Country Status (3)

Country Link
EP (1) EP1147560A1 (fr)
FR (1) FR2788885B1 (fr)
WO (1) WO2000044050A1 (fr)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7554085B2 (en) * 2003-10-09 2009-06-30 Ocas Corp. Bolometric infrared sensor having two-layer structure and method for manufacturing the same
GB2411521A (en) * 2004-02-27 2005-08-31 Qinetiq Ltd Fabrication method for micro-sensor device
FR2930639B1 (fr) 2008-04-29 2011-07-01 Ulis Detecteur thermique a haute isolation

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2200246B (en) * 1985-09-12 1989-11-01 Plessey Co Plc Thermal detector array
EP0354369B1 (fr) * 1988-08-12 1995-07-26 Texas Instruments Incorporated Détecteur infrarouge
JPH08261832A (ja) * 1995-03-20 1996-10-11 Fujitsu Ltd 赤外線センサ及びその製造方法
FR2752299B1 (fr) * 1996-08-08 1998-09-11 Commissariat Energie Atomique Detecteur infrarouge et procede de fabication de celui-ci

Also Published As

Publication number Publication date
WO2000044050A1 (fr) 2000-07-27
EP1147560A1 (fr) 2001-10-24
FR2788885A1 (fr) 2000-07-28

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Legal Events

Date Code Title Description
CL Concession to grant licences
TP Transmission of property
ST Notification of lapse

Effective date: 20110930