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FR2781868B1 - Installation et procede de fourniture d'helium a plusieurs lignes de production - Google Patents

Installation et procede de fourniture d'helium a plusieurs lignes de production

Info

Publication number
FR2781868B1
FR2781868B1 FR9809694A FR9809694A FR2781868B1 FR 2781868 B1 FR2781868 B1 FR 2781868B1 FR 9809694 A FR9809694 A FR 9809694A FR 9809694 A FR9809694 A FR 9809694A FR 2781868 B1 FR2781868 B1 FR 2781868B1
Authority
FR
France
Prior art keywords
helium
source
network
main pipe
liters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
FR9809694A
Other languages
English (en)
Other versions
FR2781868A1 (fr
Inventor
Frederic Castellanet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
Air Liquide SA
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=9529142&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=FR2781868(B1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Air Liquide SA, LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical Air Liquide SA
Priority to FR9809694A priority Critical patent/FR2781868B1/fr
Priority to TW088111425A priority patent/TW410257B/zh
Priority to ZA9904643A priority patent/ZA994643B/xx
Priority to US09/359,355 priority patent/US6178755B1/en
Priority to SG1999003626A priority patent/SG74156A1/en
Priority to BR9902937A priority patent/BR9902937A/pt
Priority to ARP990103694A priority patent/AR024506A1/es
Priority to AT99401928T priority patent/ATE347668T1/de
Priority to EP99401928.9A priority patent/EP0976969B2/fr
Priority to KR1019990030740A priority patent/KR20000012019A/ko
Priority to JP11213752A priority patent/JP2000055299A/ja
Priority to CA002279108A priority patent/CA2279108A1/fr
Priority to DE69934277.5T priority patent/DE69934277T3/de
Priority to ES99401928T priority patent/ES2278432T3/es
Priority to CN99110699A priority patent/CN1092314C/zh
Publication of FR2781868A1 publication Critical patent/FR2781868A1/fr
Publication of FR2781868B1 publication Critical patent/FR2781868B1/fr
Application granted granted Critical
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C5/00Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures
    • F17C5/06Methods or apparatus for filling containers with liquefied, solidified, or compressed gases under pressures for filling with compressed gases
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17BGAS-HOLDERS OF VARIABLE CAPACITY
    • F17B1/00Gas-holders of variable capacity
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C9/00Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure
    • F17C9/02Methods or apparatus for discharging liquefied or solidified gases from vessels not under pressure with change of state, e.g. vaporisation
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2201/00Vessel construction, in particular geometry, arrangement or size
    • F17C2201/05Size
    • F17C2201/054Size medium (>1 m3)
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2205/00Vessel construction, in particular mounting arrangements, attachments or identifications means
    • F17C2205/01Mounting arrangements
    • F17C2205/0123Mounting arrangements characterised by number of vessels
    • F17C2205/013Two or more vessels
    • F17C2205/0134Two or more vessels characterised by the presence of fluid connection between vessels
    • F17C2205/0142Two or more vessels characterised by the presence of fluid connection between vessels bundled in parallel
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2221/00Handled fluid, in particular type of fluid
    • F17C2221/01Pure fluids
    • F17C2221/016Noble gases (Ar, Kr, Xe)
    • F17C2221/017Helium
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0107Single phase
    • F17C2223/0115Single phase dense or supercritical, i.e. at high pressure and high density
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2223/00Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel
    • F17C2223/01Handled fluid before transfer, i.e. state of fluid when stored in the vessel or before transfer from the vessel characterised by the phase
    • F17C2223/0146Two-phase
    • F17C2223/0153Liquefied gas, e.g. LPG, GPL
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0107Single phase
    • F17C2225/0115Single phase dense or supercritical, i.e. at high pressure and high density
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2225/00Handled fluid after transfer, i.e. state of fluid after transfer from the vessel
    • F17C2225/01Handled fluid after transfer, i.e. state of fluid after transfer from the vessel characterised by the phase
    • F17C2225/0146Two-phase
    • F17C2225/0153Liquefied gas, e.g. LPG, GPL
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2250/00Accessories; Control means; Indicating, measuring or monitoring of parameters
    • F17C2250/01Intermediate tanks
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2265/00Effects achieved by gas storage or gas handling
    • F17C2265/01Purifying the fluid
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00Applications
    • F17C2270/01Applications for fluid transport or storage
    • F17C2270/0165Applications for fluid transport or storage on the road
    • F17C2270/0168Applications for fluid transport or storage on the road by vehicles
    • F17C2270/0171Trucks
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00Applications
    • F17C2270/01Applications for fluid transport or storage
    • F17C2270/0165Applications for fluid transport or storage on the road
    • F17C2270/0168Applications for fluid transport or storage on the road by vehicles
    • F17C2270/0173Railways
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F17STORING OR DISTRIBUTING GASES OR LIQUIDS
    • F17CVESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED OR SOLIDIFIED GASES; FIXED-CAPACITY GAS-HOLDERS; FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED, LIQUEFIED, OR SOLIDIFIED GASES
    • F17C2270/00Applications
    • F17C2270/05Applications for industrial use

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Filling Or Discharging Of Gas Storage Vessels (AREA)
  • Separation By Low-Temperature Treatments (AREA)
  • Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
  • Micromachines (AREA)
FR9809694A 1998-07-29 1998-07-29 Installation et procede de fourniture d'helium a plusieurs lignes de production Expired - Lifetime FR2781868B1 (fr)

Priority Applications (15)

Application Number Priority Date Filing Date Title
FR9809694A FR2781868B1 (fr) 1998-07-29 1998-07-29 Installation et procede de fourniture d'helium a plusieurs lignes de production
TW088111425A TW410257B (en) 1998-07-29 1999-07-06 Plant and process for supplying helium to a plurality of production lines
ZA9904643A ZA994643B (en) 1998-07-29 1999-07-19 Plant and process for supplying helium to a plurality of production lines.
US09/359,355 US6178755B1 (en) 1998-07-29 1999-07-21 Plant and process for supplying helium to a plurality of production lines
SG1999003626A SG74156A1 (en) 1998-07-29 1999-07-23 Plant and process for supplying helium to a plurality of production lines
BR9902937A BR9902937A (pt) 1998-07-29 1999-07-23 Instalação fabril e processo para fornecer hélio a uma pluralidade de linhas de produção.
ARP990103694A AR024506A1 (es) 1998-07-29 1999-07-27 Planta y proceso para suministrar helio a una pluralidad de lineas de produccion.
EP99401928.9A EP0976969B2 (fr) 1998-07-29 1999-07-28 Installation et procédé de fourniture d'hélium à plusiers lignes de production
AT99401928T ATE347668T1 (de) 1998-07-29 1999-07-28 Vorrichtung und verfahren zur versorgung von helium zu mehreren produktionslinien
KR1019990030740A KR20000012019A (ko) 1998-07-29 1999-07-28 복수 개의 생산 라인에 헬륨을 공급하기 위한 플랜트 및 그공급 방법
JP11213752A JP2000055299A (ja) 1998-07-29 1999-07-28 複数の製造ラインへのヘリウム供給プラントおよび方法
CA002279108A CA2279108A1 (fr) 1998-07-29 1999-07-28 Equipement et procede pour fournir de l'helium a une multitude de chaines de production
DE69934277.5T DE69934277T3 (de) 1998-07-29 1999-07-28 Vorrichtung und Verfahren zur Versorgung von Helium zu mehreren Produktionslinien
ES99401928T ES2278432T3 (es) 1998-07-29 1999-07-28 Instalacion y procedimiento de suministro de helio con varias lineas de produccion.
CN99110699A CN1092314C (zh) 1998-07-29 1999-07-28 为多路生产线供氦的设备与方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9809694A FR2781868B1 (fr) 1998-07-29 1998-07-29 Installation et procede de fourniture d'helium a plusieurs lignes de production

Publications (2)

Publication Number Publication Date
FR2781868A1 FR2781868A1 (fr) 2000-02-04
FR2781868B1 true FR2781868B1 (fr) 2000-09-15

Family

ID=9529142

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9809694A Expired - Lifetime FR2781868B1 (fr) 1998-07-29 1998-07-29 Installation et procede de fourniture d'helium a plusieurs lignes de production

Country Status (15)

Country Link
US (1) US6178755B1 (fr)
EP (1) EP0976969B2 (fr)
JP (1) JP2000055299A (fr)
KR (1) KR20000012019A (fr)
CN (1) CN1092314C (fr)
AR (1) AR024506A1 (fr)
AT (1) ATE347668T1 (fr)
BR (1) BR9902937A (fr)
CA (1) CA2279108A1 (fr)
DE (1) DE69934277T3 (fr)
ES (1) ES2278432T3 (fr)
FR (1) FR2781868B1 (fr)
SG (1) SG74156A1 (fr)
TW (1) TW410257B (fr)
ZA (1) ZA994643B (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005032556A1 (de) * 2005-07-11 2007-01-25 Atlas Copco Energas Gmbh Anlage und Verfahren zur Nutzung eines Gases

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20020032173A (ko) * 2000-10-26 2002-05-03 윤종용 웨이퍼 냉각을 위한 냉각 가스 공급장치
WO2003043012A1 (fr) 2001-11-13 2003-05-22 Seagate Technology Llc Systeme d'alimentation en gaz d'un lecteur de disque
US20050076652A1 (en) * 2003-10-10 2005-04-14 Berghoff Rudolf Erwin Method and apparatus for removing boiling liquid from a tank
RU2267023C2 (ru) * 2004-02-11 2005-12-27 Федеральное государственное унитарное предприятие "Конструкторское бюро общего машиностроения им. В.П. Бармина" Способ заправки гелием бортовых баллонов ракет-носителей и космических аппаратов и система заправки гелием бортовых баллонов ракет-носителей и космических аппаратов
GB2416390B (en) * 2004-07-16 2006-07-26 Statoil Asa LCD Offshore Transport System
FR2888120B1 (fr) * 2005-07-07 2008-07-04 Cryo Diffusion S A Sa Dispositif de stockage et de fourniture de fluide cryogenique destine en particulier a la respiration et a l'oxygenotherapie
US7984838B2 (en) * 2006-05-04 2011-07-26 Medtronic Ps Medical, Inc. Recycled helium gas surgical instrument
JP5190315B2 (ja) * 2008-07-25 2013-04-24 東京電力株式会社 低温液の気化ガス供給設備
US20110023501A1 (en) * 2009-07-30 2011-02-03 Thomas Robert Schulte Methods and systems for bulk ultra-high purity helium supply and usage
RU2440505C1 (ru) * 2010-10-08 2012-01-20 Федеральное государственное унитарное предприятие "Центр эксплуатации объектов наземной космической инфраструктуры" (ФГУП "ЦЭНКИ") Способ и устройство для заправки гелием бортовых баллонов ракетоносителей
CN102563337A (zh) * 2010-12-22 2012-07-11 北京博鹏北科科技有限公司 煤气转存系统和方法
FR2993343B1 (fr) * 2012-07-13 2015-06-05 Air Liquide Procede et appareil de vaporisation de liquide riche en dioxyde de carbone
US9234472B2 (en) 2012-08-08 2016-01-12 Caterpillar Inc. Dual fuel engine and evaporated natural gas system
CN103470946B (zh) * 2013-08-29 2015-05-27 北京宇航系统工程研究所 一种高压超临界氦贮罐
CN103672396A (zh) * 2013-11-15 2014-03-26 苏州金宏气体股份有限公司 一种高纯气体液体储罐泻压放空回收利用的方法
CN103672395A (zh) * 2013-11-15 2014-03-26 苏州金宏气体股份有限公司 一种高纯气体运输储罐放空余气回收利用的方法
CN104676248B (zh) * 2014-12-26 2017-03-22 西南石油大学 一种氦气循环系统
CN105546333A (zh) * 2016-01-22 2016-05-04 池州森大轻工制品有限公司 一种高纯气体充装系统
CN109931501B (zh) * 2017-12-18 2021-04-06 上海弗川自动化技术有限公司 一种分段式加热气体输送系统
US11231144B2 (en) 2018-04-26 2022-01-25 Messer Industries Usa, Inc. Methods for helium storage and supply
JP6574321B1 (ja) * 2019-02-15 2019-09-11 石油資源開発株式会社 浮体式低温液化ガス充填設備及びこれを用いた低温液化ガス配送方法
CN112628601B (zh) * 2020-12-03 2022-12-13 蓝箭航天技术有限公司 用于高压气体制备装置的温度控制系统及其控制方法
CN114484267B (zh) * 2022-01-29 2024-03-22 山东简森能源科技有限公司 一种氦气分装回收纯化工艺

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4559786A (en) * 1982-02-22 1985-12-24 Air Products And Chemicals, Inc. High pressure helium pump for liquid or supercritical gas
DE3417055C2 (de) * 1984-05-09 1986-05-07 Messerschmitt-Bölkow-Blohm GmbH, 8012 Ottobrunn Helium-II-Phasentrenner
US4766731A (en) * 1987-09-01 1988-08-30 Union Carbide Corporation Method to deliver ultra high purity helium gas to a use point
JPH0622224B2 (ja) * 1988-03-05 1994-03-23 大阪酸素工業株式会社 パーティクルが少ないか又は含まない液化二酸化炭素の供給
US4961325A (en) * 1989-09-07 1990-10-09 Union Carbide Corporation High pressure gas supply system
US5243821A (en) * 1991-06-24 1993-09-14 Air Products And Chemicals, Inc. Method and apparatus for delivering a continuous quantity of gas over a wide range of flow rates
DE4201952A1 (de) 1992-01-24 1993-07-29 Linde Ag Kaltgasversorgung
US5377491A (en) 1992-12-11 1995-01-03 Praxair Technology, Inc. Coolant recovery process
US5386707A (en) * 1992-12-31 1995-02-07 Praxair Technology, Inc. Withdrawal of cryogenic helium with low impurity from a vessel
JP2959947B2 (ja) * 1994-02-28 1999-10-06 信越石英株式会社 原料ガス供給方法及び装置
FR2747595B1 (fr) * 1996-04-19 1998-08-21 Air Liquide Procede et installation de fourniture d'helium ultra-pur
US5934081A (en) * 1998-02-03 1999-08-10 Praxair Technology, Inc. Cryogenic fluid cylinder filling system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005032556A1 (de) * 2005-07-11 2007-01-25 Atlas Copco Energas Gmbh Anlage und Verfahren zur Nutzung eines Gases
DE102005032556B4 (de) * 2005-07-11 2007-04-12 Atlas Copco Energas Gmbh Anlage und Verfahren zur Nutzung eines Gases

Also Published As

Publication number Publication date
DE69934277D1 (de) 2007-01-18
FR2781868A1 (fr) 2000-02-04
ZA994643B (en) 2000-01-12
BR9902937A (pt) 2000-03-21
US6178755B1 (en) 2001-01-30
TW410257B (en) 2000-11-01
JP2000055299A (ja) 2000-02-22
CN1092314C (zh) 2002-10-09
DE69934277T2 (de) 2007-07-05
ATE347668T1 (de) 2006-12-15
DE69934277T3 (de) 2018-08-02
ES2278432T3 (es) 2007-08-01
KR20000012019A (ko) 2000-02-25
EP0976969B2 (fr) 2017-12-20
AR024506A1 (es) 2002-10-16
CA2279108A1 (fr) 2000-01-29
EP0976969A1 (fr) 2000-02-02
CN1245876A (zh) 2000-03-01
EP0976969B1 (fr) 2006-12-06
SG74156A1 (en) 2000-07-18

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