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FR2764163B1 - Torche a plasma inductif a injecteur de reactif - Google Patents

Torche a plasma inductif a injecteur de reactif

Info

Publication number
FR2764163B1
FR2764163B1 FR9706908A FR9706908A FR2764163B1 FR 2764163 B1 FR2764163 B1 FR 2764163B1 FR 9706908 A FR9706908 A FR 9706908A FR 9706908 A FR9706908 A FR 9706908A FR 2764163 B1 FR2764163 B1 FR 2764163B1
Authority
FR
France
Prior art keywords
plasma torch
inductive plasma
reagent injector
injector
reagent
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9706908A
Other languages
English (en)
Other versions
FR2764163A1 (fr
Inventor
Christian Trassy
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR9706908A priority Critical patent/FR2764163B1/fr
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to US09/424,727 priority patent/US6207924B1/en
Priority to JP50034399A priority patent/JP4320790B2/ja
Priority to PCT/FR1998/001086 priority patent/WO1998054935A1/fr
Priority to CA002291683A priority patent/CA2291683A1/fr
Priority to KR1019997010911A priority patent/KR20010012941A/ko
Priority to EP98928393A priority patent/EP0985331A1/fr
Publication of FR2764163A1 publication Critical patent/FR2764163A1/fr
Application granted granted Critical
Publication of FR2764163B1 publication Critical patent/FR2764163B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F9/00—Making metallic powder or suspensions thereof
    • B22F9/02—Making metallic powder or suspensions thereof using physical processes
    • B22F9/06—Making metallic powder or suspensions thereof using physical processes starting from liquid material
    • B22F9/08—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying
    • B22F9/082—Making metallic powder or suspensions thereof using physical processes starting from liquid material by casting, e.g. through sieves or in water, by atomising or spraying atomising using a fluid
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B22—CASTING; POWDER METALLURGY
    • B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
    • B22F1/00—Metallic powder; Treatment of metallic powder, e.g. to facilitate working or to improve properties
    • B22F1/14—Treatment of metallic powder
    • B22F1/142—Thermal or thermo-mechanical treatment
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F7/00—Compounds of aluminium
    • C01F7/02—Aluminium oxide; Aluminium hydroxide; Aluminates
    • C01F7/42—Preparation of aluminium oxide or hydroxide from metallic aluminium, e.g. by oxidation
    • C01F7/422—Preparation of aluminium oxide or hydroxide from metallic aluminium, e.g. by oxidation by oxidation with a gaseous oxidator at a high temperature
    • C01F7/424—Preparation of aluminium oxide or hydroxide from metallic aluminium, e.g. by oxidation by oxidation with a gaseous oxidator at a high temperature using a plasma
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/26—Plasma torches
    • H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J2219/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J2219/08—Processes employing the direct application of electric or wave energy, or particle radiation; Apparatus therefor
    • B01J2219/0894—Processes carried out in the presence of a plasma

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Organic Chemistry (AREA)
  • Thermal Sciences (AREA)
  • Electromagnetism (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Geology (AREA)
  • Plasma Technology (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Manufacture Of Metal Powder And Suspensions Thereof (AREA)
  • Manufacture And Refinement Of Metals (AREA)
FR9706908A 1997-05-30 1997-05-30 Torche a plasma inductif a injecteur de reactif Expired - Fee Related FR2764163B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR9706908A FR2764163B1 (fr) 1997-05-30 1997-05-30 Torche a plasma inductif a injecteur de reactif
JP50034399A JP4320790B2 (ja) 1997-05-30 1998-05-29 リアクティブ噴射器を有する誘導プラズマトーチ及びその使用する方法
PCT/FR1998/001086 WO1998054935A1 (fr) 1997-05-30 1998-05-29 Torche a plasma inductif a injecteur de reactif
CA002291683A CA2291683A1 (fr) 1997-05-30 1998-05-29 Torche a plasma inductif a injecteur de reactif
US09/424,727 US6207924B1 (en) 1997-05-30 1998-05-29 Inductive plasma torch with a reagent injector
KR1019997010911A KR20010012941A (ko) 1997-05-30 1998-05-29 리액티브 주입기를 갖는 유도 플라즈마 토치
EP98928393A EP0985331A1 (fr) 1997-05-30 1998-05-29 Torche a plasma inductif a injecteur de reactif

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9706908A FR2764163B1 (fr) 1997-05-30 1997-05-30 Torche a plasma inductif a injecteur de reactif

Publications (2)

Publication Number Publication Date
FR2764163A1 FR2764163A1 (fr) 1998-12-04
FR2764163B1 true FR2764163B1 (fr) 1999-08-13

Family

ID=9507600

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9706908A Expired - Fee Related FR2764163B1 (fr) 1997-05-30 1997-05-30 Torche a plasma inductif a injecteur de reactif

Country Status (7)

Country Link
US (1) US6207924B1 (fr)
EP (1) EP0985331A1 (fr)
JP (1) JP4320790B2 (fr)
KR (1) KR20010012941A (fr)
CA (1) CA2291683A1 (fr)
FR (1) FR2764163B1 (fr)
WO (1) WO1998054935A1 (fr)

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US7591957B2 (en) * 2001-01-30 2009-09-22 Rapt Industries, Inc. Method for atmospheric pressure reactive atom plasma processing for surface modification
US7510664B2 (en) * 2001-01-30 2009-03-31 Rapt Industries, Inc. Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces
DE10104614A1 (de) * 2001-02-02 2002-08-22 Bosch Gmbh Robert Plasmaanlage und Verfahren zur Erzeugung einer Funktionsbeschichtung
DE10104613A1 (de) * 2001-02-02 2002-08-22 Bosch Gmbh Robert Plasmaanlage und Verfahren zur Erzeugung einer Funktionsbeschichtung
US6660177B2 (en) 2001-11-07 2003-12-09 Rapt Industries Inc. Apparatus and method for reactive atom plasma processing for material deposition
US20080190558A1 (en) * 2002-04-26 2008-08-14 Accretech Usa, Inc. Wafer processing apparatus and method
US20080017316A1 (en) * 2002-04-26 2008-01-24 Accretech Usa, Inc. Clean ignition system for wafer substrate processing
US20080011332A1 (en) * 2002-04-26 2008-01-17 Accretech Usa, Inc. Method and apparatus for cleaning a wafer substrate
US7371992B2 (en) * 2003-03-07 2008-05-13 Rapt Industries, Inc. Method for non-contact cleaning of a surface
US7420675B2 (en) * 2003-06-25 2008-09-02 The University Of Akron Multi-wavelength imaging system
US7304263B2 (en) * 2003-08-14 2007-12-04 Rapt Industries, Inc. Systems and methods utilizing an aperture with a reactive atom plasma torch
US7297892B2 (en) * 2003-08-14 2007-11-20 Rapt Industries, Inc. Systems and methods for laser-assisted plasma processing
FR2864795B1 (fr) * 2004-01-06 2008-04-18 Air Liquide Procede de traitement des gaz par des decharges hautes frequence
ES2328395T3 (es) * 2005-10-21 2009-11-12 Sulzer Metco (Us) Inc. Un metodo de fabricacion de polvo de oxido metalico de alta pureza y fluido para un sistema de plasma.
FR2928641B1 (fr) * 2008-03-14 2010-03-26 Centre Nat Rech Scient Procede de purification de silicium pour applications photovoltaiques
EP2297377B1 (fr) * 2008-05-30 2017-12-27 Colorado State University Research Foundation Dispositif de source chimique à base de plasma et procédé d'utilisation de celui-ci
US8994270B2 (en) 2008-05-30 2015-03-31 Colorado State University Research Foundation System and methods for plasma application
US8575843B2 (en) * 2008-05-30 2013-11-05 Colorado State University Research Foundation System, method and apparatus for generating plasma
US9272359B2 (en) 2008-05-30 2016-03-01 Colorado State University Research Foundation Liquid-gas interface plasma device
DE102009010497A1 (de) * 2008-12-19 2010-08-05 J-Fiber Gmbh Mehrdüsiger rohrförmiger Plasma-Abscheidebrenner zur Herstellung von Vorformen als Halbzeuge für optische Fasern
US8222822B2 (en) 2009-10-27 2012-07-17 Tyco Healthcare Group Lp Inductively-coupled plasma device
FR2953278B1 (fr) * 2009-11-27 2012-01-27 Commissariat Energie Atomique Procede et dispositif de destruction thermique de composes organiques par un plasma d'induction.
JP5553460B2 (ja) 2010-03-31 2014-07-16 コロラド ステート ユニバーシティー リサーチ ファウンデーション 液体−気体界面プラズマデバイス
WO2013099004A1 (fr) * 2011-12-28 2013-07-04 中国電力株式会社 Appareil et procédé de production de poudre d'aluminium
CN205166151U (zh) * 2012-07-13 2016-04-20 魄金莱默保健科学有限公司 火炬和用于维持原子化源的系统
JP6398206B2 (ja) * 2013-02-21 2018-10-03 宇部興産株式会社 微量不純物を分析する方法、及び当該分析に用いるプラズマトーチ
US9532826B2 (en) 2013-03-06 2017-01-03 Covidien Lp System and method for sinus surgery
US9555145B2 (en) 2013-03-13 2017-01-31 Covidien Lp System and method for biofilm remediation
US9427821B2 (en) * 2013-03-15 2016-08-30 Agilent Technologies, Inc. Integrated magnetron plasma torch, and related methods
JP6005577B2 (ja) * 2013-04-15 2016-10-12 東芝三菱電機産業システム株式会社 微粒子生成装置
CN104493166A (zh) * 2015-01-15 2015-04-08 中国科学技术大学 利用层流状态的直流等离子体炬进行金属部件快速成形方法

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JPH0665035B2 (ja) 1983-07-01 1994-08-22 新神戸電機株式会社 鉛電池用格子体の製造法
US4665296A (en) * 1984-04-28 1987-05-12 Neturen Co., Ltd. Method of and apparatus for igniting a high-frequency torch to create a high-temperature plasma of high purity
JPS61174107A (ja) * 1985-01-28 1986-08-05 High Frequency Heattreat Co Ltd 窒化アルミニウム超微粒子の製造方法
JPS62274428A (ja) 1986-05-23 1987-11-28 Hitachi Ltd 構文主導型入力誘導方法
JPH01115810A (ja) * 1987-10-29 1989-05-09 Mitsubishi Metal Corp 高純度立方晶炭化タングステン超微粉末の製造法
US4926021A (en) * 1988-09-09 1990-05-15 Amax Inc. Reactive gas sample introduction system for an inductively coupled plasma mass spectrometer
US5012065A (en) * 1989-11-20 1991-04-30 New Mexico State University Technology Transfer Corporation Inductively coupled plasma torch with laminar flow cooling
DE4021182A1 (de) * 1990-07-03 1992-01-16 Plasma Technik Ag Vorrichtung zur beschichtung der oberflaeche von gegenstaenden
FR2714371B1 (fr) * 1993-12-24 1996-02-16 Cabloptic Sa Procédé de recharge d'une préforme de fibre optique, dispositif pour la mise en Óoeuvre de ce procédé et fibre optique par ce procédé.
US5907566A (en) 1997-05-29 1999-05-25 3Com Corporation Continuous byte-stream encoder/decoder using frequency increase and cyclic redundancy check
US5908566A (en) * 1997-09-17 1999-06-01 The United States Of America As Represented By The Secretary Of The Navy Modified plasma torch design for introducing sample air into inductively coupled plasma

Also Published As

Publication number Publication date
US6207924B1 (en) 2001-03-27
WO1998054935A1 (fr) 1998-12-03
CA2291683A1 (fr) 1998-12-03
JP4320790B2 (ja) 2009-08-26
KR20010012941A (ko) 2001-02-26
JP2002501661A (ja) 2002-01-15
EP0985331A1 (fr) 2000-03-15
FR2764163A1 (fr) 1998-12-04

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20150130