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FR2758285B3 - Procede de fixation d'un agent abrasif ou de polissage, sous forme de feuille, sur un support magnetique - Google Patents

Procede de fixation d'un agent abrasif ou de polissage, sous forme de feuille, sur un support magnetique

Info

Publication number
FR2758285B3
FR2758285B3 FR9800391A FR9800391A FR2758285B3 FR 2758285 B3 FR2758285 B3 FR 2758285B3 FR 9800391 A FR9800391 A FR 9800391A FR 9800391 A FR9800391 A FR 9800391A FR 2758285 B3 FR2758285 B3 FR 2758285B3
Authority
FR
France
Prior art keywords
abrasive
sheet
fixing
polishing agent
magnetic support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9800391A
Other languages
English (en)
Other versions
FR2758285A3 (fr
Inventor
Morten J Damgaard
Leila Bjerregaard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Struers ApS
Original Assignee
Struers ApS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Struers ApS filed Critical Struers ApS
Publication of FR2758285A3 publication Critical patent/FR2758285A3/fr
Application granted granted Critical
Publication of FR2758285B3 publication Critical patent/FR2758285B3/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/02—Backings, e.g. foils, webs, mesh fabrics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D9/00—Wheels or drums supporting in exchangeable arrangement a layer of flexible abrasive material, e.g. sandpaper
    • B24D9/08—Circular back-plates for carrying flexible material
    • B24D9/085—Devices for mounting sheets on a backing plate

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
FR9800391A 1997-01-13 1998-01-12 Procede de fixation d'un agent abrasif ou de polissage, sous forme de feuille, sur un support magnetique Expired - Fee Related FR2758285B3 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DK4197 1997-01-13

Publications (2)

Publication Number Publication Date
FR2758285A3 FR2758285A3 (fr) 1998-07-17
FR2758285B3 true FR2758285B3 (fr) 1998-12-04

Family

ID=8089072

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9800391A Expired - Fee Related FR2758285B3 (fr) 1997-01-13 1998-01-12 Procede de fixation d'un agent abrasif ou de polissage, sous forme de feuille, sur un support magnetique

Country Status (6)

Country Link
US (1) US6116998A (fr)
EP (1) EP1007282B1 (fr)
JP (1) JP2001508365A (fr)
DE (1) DE69804632T2 (fr)
FR (1) FR2758285B3 (fr)
WO (1) WO1998030359A1 (fr)

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US6358133B1 (en) 1998-02-06 2002-03-19 3M Innovative Properties Company Grinding wheel
DE69901571T2 (de) * 1998-09-08 2003-01-09 Struers A/S, Rodovre Träger zur zeitweisen befestigung eines selbstklebenden schleif- und/oder polierblattes
US6719615B1 (en) 2000-10-10 2004-04-13 Beaver Creek Concepts Inc Versatile wafer refining
US6224474B1 (en) 1999-01-06 2001-05-01 Buehler, Ltd. Magnetic disc system for grinding or polishing specimens
EP1052062A1 (fr) 1999-05-03 2000-11-15 Applied Materials, Inc. Préconditionnement d'un article abrasif fixé
US6386963B1 (en) * 1999-10-29 2002-05-14 Applied Materials, Inc. Conditioning disk for conditioning a polishing pad
US6991526B2 (en) * 2002-09-16 2006-01-31 Applied Materials, Inc. Control of removal profile in electrochemically assisted CMP
US6979248B2 (en) 2002-05-07 2005-12-27 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US7374644B2 (en) 2000-02-17 2008-05-20 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US7670468B2 (en) 2000-02-17 2010-03-02 Applied Materials, Inc. Contact assembly and method for electrochemical mechanical processing
US20030213703A1 (en) * 2002-05-16 2003-11-20 Applied Materials, Inc. Method and apparatus for substrate polishing
US7125477B2 (en) 2000-02-17 2006-10-24 Applied Materials, Inc. Contacts for electrochemical processing
US20040182721A1 (en) * 2003-03-18 2004-09-23 Applied Materials, Inc. Process control in electro-chemical mechanical polishing
US6962524B2 (en) 2000-02-17 2005-11-08 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US7303462B2 (en) 2000-02-17 2007-12-04 Applied Materials, Inc. Edge bead removal by an electro polishing process
US7678245B2 (en) 2000-02-17 2010-03-16 Applied Materials, Inc. Method and apparatus for electrochemical mechanical processing
US7303662B2 (en) 2000-02-17 2007-12-04 Applied Materials, Inc. Contacts for electrochemical processing
US6991528B2 (en) 2000-02-17 2006-01-31 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US6848970B2 (en) * 2002-09-16 2005-02-01 Applied Materials, Inc. Process control in electrochemically assisted planarization
US7077721B2 (en) 2000-02-17 2006-07-18 Applied Materials, Inc. Pad assembly for electrochemical mechanical processing
US7059948B2 (en) 2000-12-22 2006-06-13 Applied Materials Articles for polishing semiconductor substrates
US6537144B1 (en) * 2000-02-17 2003-03-25 Applied Materials, Inc. Method and apparatus for enhanced CMP using metals having reductive properties
US7029365B2 (en) 2000-02-17 2006-04-18 Applied Materials Inc. Pad assembly for electrochemical mechanical processing
US7066800B2 (en) 2000-02-17 2006-06-27 Applied Materials Inc. Conductive polishing article for electrochemical mechanical polishing
US6302775B1 (en) * 2000-03-22 2001-10-16 Motorola, Inc. Apparatus and method for cold cross-sectioning of soft materials
US6402591B1 (en) * 2000-03-31 2002-06-11 Lam Research Corporation Planarization system for chemical-mechanical polishing
DE10040966B4 (de) * 2000-08-22 2006-04-06 Uzin Tyro Ag Selbstklebefolie
US7377836B1 (en) 2000-10-10 2008-05-27 Beaver Creek Concepts Inc Versatile wafer refining
US6896776B2 (en) 2000-12-18 2005-05-24 Applied Materials Inc. Method and apparatus for electro-chemical processing
US7137879B2 (en) 2001-04-24 2006-11-21 Applied Materials, Inc. Conductive polishing article for electrochemical mechanical polishing
US7344432B2 (en) 2001-04-24 2008-03-18 Applied Materials, Inc. Conductive pad with ion exchange membrane for electrochemical mechanical polishing
US20030072639A1 (en) * 2001-10-17 2003-04-17 Applied Materials, Inc. Substrate support
US6837983B2 (en) * 2002-01-22 2005-01-04 Applied Materials, Inc. Endpoint detection for electro chemical mechanical polishing and electropolishing processes
US7112270B2 (en) * 2002-09-16 2006-09-26 Applied Materials, Inc. Algorithm for real-time process control of electro-polishing
US20050061674A1 (en) * 2002-09-16 2005-03-24 Yan Wang Endpoint compensation in electroprocessing
US7842169B2 (en) * 2003-03-04 2010-11-30 Applied Materials, Inc. Method and apparatus for local polishing control
JP2004315609A (ja) * 2003-04-14 2004-11-11 Rodel Nitta Co 粘着テープ
JP2007528794A (ja) * 2003-07-01 2007-10-18 アプライド　マテリアルズ　インコーポレイテッド 電気化学機械的処理のための方法および装置
US7186164B2 (en) * 2003-12-03 2007-03-06 Applied Materials, Inc. Processing pad assembly with zone control
DE102004001546A1 (de) * 2004-01-10 2005-08-04 August Rüggeberg Gmbh & Co. Kg Werkzeug
US7390744B2 (en) 2004-01-29 2008-06-24 Applied Materials, Inc. Method and composition for polishing a substrate
US7084064B2 (en) 2004-09-14 2006-08-01 Applied Materials, Inc. Full sequence metal and barrier layer electrochemical mechanical processing
US7520968B2 (en) 2004-10-05 2009-04-21 Applied Materials, Inc. Conductive pad design modification for better wafer-pad contact
US7655565B2 (en) * 2005-01-26 2010-02-02 Applied Materials, Inc. Electroprocessing profile control
US7427340B2 (en) 2005-04-08 2008-09-23 Applied Materials, Inc. Conductive pad
IL168588A (en) * 2005-05-15 2010-06-30 Sarin Polishing Technologies L Apparatus and article for polishing gemstones
DE502005001899D1 (de) 2005-07-05 2007-12-20 Rueggeberg August Gmbh & Co Kg Werkzeug
US7264542B1 (en) * 2006-02-28 2007-09-04 Ronald P. Leyva Knife sharpening method and system
US20070251832A1 (en) * 2006-04-27 2007-11-01 Applied Materials, Inc. Method and apparatus for electrochemical mechanical polishing of cu with higher liner velocity for better surface finish and higher removal rate during clearance
US7422982B2 (en) * 2006-07-07 2008-09-09 Applied Materials, Inc. Method and apparatus for electroprocessing a substrate with edge profile control
JP4680314B1 (ja) * 2010-02-04 2011-05-11 東邦エンジニアリング株式会社 研磨パッド用補助板およびそれを用いた研磨パッドの再生方法
US8517799B2 (en) * 2010-12-07 2013-08-27 The Boeing Company Robotic surface preparation by a random orbital device
CN102756340B (zh) * 2011-04-29 2015-04-22 中芯国际集成电路制造(上海)有限公司 化学机械抛光机及其抛光垫部件
DE102013203116A1 (de) * 2013-02-26 2014-08-28 Robert Bosch Gmbh Schleifmittelvorrichtung
DE102018121625A1 (de) * 2018-09-05 2020-03-05 Rud. Starcke Gmbh & Co. Kg Schleifeinrichtung
EP3736084B1 (fr) 2019-05-07 2021-03-10 Guido Valentini Outil électroportatif pour le ponçage ou le polissage d'une pièce à usiner
DE102021110382A1 (de) * 2021-04-23 2022-10-27 Multivac Sepp Haggenmüller Se & Co. Kg Siegelstation mit einer Produktschutzplatte

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2226068A5 (en) * 1972-12-14 1974-11-08 Escil Polishing disc assembly for metallurgical samples - has sandwich constructed support plate for embedded abrasive
FR2302461A1 (fr) * 1975-02-27 1976-09-24 Semt Dispositif de lubrification d'un systeme de guidage de soupape pour un moteur a combustion intern
AT359387B (de) * 1978-05-05 1980-11-10 Marton Miksa Mit einem schleifblatt belegter, rotierend angetriebener schleifteller
CA1078620A (fr) * 1978-05-05 1980-06-03 Miksa Marton Disque auto-collant pour poncage
US4222204A (en) * 1979-06-18 1980-09-16 Benner Robert L Holder for an abrasive plate
US4667447A (en) * 1983-08-31 1987-05-26 Minnesota Mining And Manufacturing Company Coated abrasive sheet material magnetically attached to a support surface on an abrading tool
US4607464A (en) * 1984-11-13 1986-08-26 Minnesota Mining And Manufacturing Company Coated abrasive back up pad
US6019672A (en) * 1994-09-08 2000-02-01 Struers A/S Grinding/polishing cover sheet for placing on a rotatable grinding/polishing disc
US5573816A (en) * 1995-06-06 1996-11-12 Norton Company Friction coating for film backings

Also Published As

Publication number Publication date
DE69804632T2 (de) 2002-11-28
WO1998030359A1 (fr) 1998-07-16
JP2001508365A (ja) 2001-06-26
FR2758285A3 (fr) 1998-07-17
EP1007282A1 (fr) 2000-06-14
DE69804632D1 (de) 2002-05-08
EP1007282B1 (fr) 2002-04-03
US6116998A (en) 2000-09-12

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Legal Events

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ST Notification of lapse