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FR2752302B1 - Capteur de champ magnetique a pont de magnetoresistances - Google Patents

Capteur de champ magnetique a pont de magnetoresistances

Info

Publication number
FR2752302B1
FR2752302B1 FR9610004A FR9610004A FR2752302B1 FR 2752302 B1 FR2752302 B1 FR 2752302B1 FR 9610004 A FR9610004 A FR 9610004A FR 9610004 A FR9610004 A FR 9610004A FR 2752302 B1 FR2752302 B1 FR 2752302B1
Authority
FR
France
Prior art keywords
magnetic field
field sensor
magnetoresistance
bridge
magnetoresistance bridge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9610004A
Other languages
English (en)
Other versions
FR2752302A1 (fr
Inventor
Rochaz Line Vieux
Jean Marc Fedeli
Robert Cuchet
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR9610004A priority Critical patent/FR2752302B1/fr
Priority to JP10509450A priority patent/JPH11513128A/ja
Priority to EP97936752A priority patent/EP0853766A1/fr
Priority to PCT/FR1997/001465 priority patent/WO1998007042A1/fr
Priority to US09/043,907 priority patent/US6069476A/en
Publication of FR2752302A1 publication Critical patent/FR2752302A1/fr
Application granted granted Critical
Publication of FR2752302B1 publication Critical patent/FR2752302B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y25/00—Nanomagnetism, e.g. magnetoimpedance, anisotropic magnetoresistance, giant magnetoresistance or tunneling magnetoresistance

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Nanotechnology (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Measuring Magnetic Variables (AREA)
  • Hall/Mr Elements (AREA)
FR9610004A 1996-08-08 1996-08-08 Capteur de champ magnetique a pont de magnetoresistances Expired - Fee Related FR2752302B1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FR9610004A FR2752302B1 (fr) 1996-08-08 1996-08-08 Capteur de champ magnetique a pont de magnetoresistances
JP10509450A JPH11513128A (ja) 1996-08-08 1997-08-07 磁気抵抗ブリッジを有する磁場センサ
EP97936752A EP0853766A1 (fr) 1996-08-08 1997-08-07 Capteur de champ magnetique a pont de magnetoresistances
PCT/FR1997/001465 WO1998007042A1 (fr) 1996-08-08 1997-08-07 Capteur de champ magnetique a pont de magnetoresistances
US09/043,907 US6069476A (en) 1996-08-08 1997-08-07 Magnetic field sensor having a magnetoresistance bridge with a pair of magnetoresistive elements featuring a plateau effect in their resistance-magnetic field response

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9610004A FR2752302B1 (fr) 1996-08-08 1996-08-08 Capteur de champ magnetique a pont de magnetoresistances

Publications (2)

Publication Number Publication Date
FR2752302A1 FR2752302A1 (fr) 1998-02-13
FR2752302B1 true FR2752302B1 (fr) 1998-09-11

Family

ID=9494921

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9610004A Expired - Fee Related FR2752302B1 (fr) 1996-08-08 1996-08-08 Capteur de champ magnetique a pont de magnetoresistances

Country Status (5)

Country Link
US (1) US6069476A (fr)
EP (1) EP0853766A1 (fr)
JP (1) JPH11513128A (fr)
FR (1) FR2752302B1 (fr)
WO (1) WO1998007042A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9529060B2 (en) 2014-01-09 2016-12-27 Allegro Microsystems, Llc Magnetoresistance element with improved response to magnetic fields

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US6529114B1 (en) * 1998-05-27 2003-03-04 Honeywell International Inc. Magnetic field sensing device
JP2002522866A (ja) * 1998-08-14 2002-07-23 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ スピントンネル接合素子を具える磁界センサ
FR2787197B1 (fr) * 1998-12-11 2001-02-23 Thomson Csf Capteur de champ magnetique a magnetoresistance geante
EP1074815A1 (fr) * 1999-08-04 2001-02-07 FESTO AG & Co Capteur magnétique biaxial de position
DE10122468C1 (de) * 2001-05-09 2003-03-20 Heusler Isabellenhuette Elektrischer Widerstand und Verfahren zu seiner Herstellung
JP3603872B2 (ja) * 2001-05-16 2004-12-22 松下電器産業株式会社 磁気センサとこれを用いた紙幣識別装置
US6949927B2 (en) 2001-08-27 2005-09-27 International Rectifier Corporation Magnetoresistive magnetic field sensors and motor control devices using same
US6771472B1 (en) 2001-12-07 2004-08-03 Seagate Technology Llc Structure to achieve thermally stable high sensitivity and linear range in bridge GMR sensor using SAF magnetic alignments
DE10213941A1 (de) * 2002-03-28 2003-10-30 Bosch Gmbh Robert Sensorelement und Gradiometeranordnung, deren Verwendung zum Messen von Magnetfeldgradienten und Verfahren hierzu
US7375516B2 (en) 2004-02-19 2008-05-20 Mitsubishi Electric Corporation Magnetic field detector, current detector, position detector and rotation detector employing it
DE102004047770B4 (de) * 2004-09-30 2014-08-21 Infineon Technologies Ag Sensor zum Erzeugen eines Ausgangssignals aufgrund eines Messmagnetfelds sowie Verfahren zum Abgleichen und zum Betrieb eines solchen
FR2880131B1 (fr) * 2004-12-23 2007-03-16 Thales Sa Procede de mesure d'un champ magnetique faible et capteur de champ magnetique a sensibilite amelioree
KR20070087628A (ko) * 2004-12-28 2007-08-28 코닌클리케 필립스 일렉트로닉스 엔.브이. 조정 가능한 특성을 지닌 브릿지-유형의 센서
DE102005047413B8 (de) * 2005-02-23 2012-05-10 Infineon Technologies Ag Magnetfeldsensorelement und Verfahren zum Durchführen eines On-Wafer-Funktionstests, sowie Verfahren zur Herstellung von Magnetfeldsensorelementen und Verfahren zur Herstellung von Magnetfeldsensorelementen mit On-Wafer-Funktionstest
JP4406632B2 (ja) * 2006-08-31 2010-02-03 アルプス電気株式会社 磁気検出装置およびその製造方法
KR101107668B1 (ko) * 2006-09-07 2012-01-25 알프스 덴키 가부시키가이샤 자기검출장치
JP4639216B2 (ja) * 2007-06-07 2011-02-23 アルプス電気株式会社 磁気センサ
WO2009031539A1 (fr) * 2007-09-03 2009-03-12 Alps Electric Co., Ltd. Dispositif de détection magnétique
DE102007044485A1 (de) * 2007-09-18 2009-04-02 Infineon Technologies Ag Magnetfeldsensor mit einem Sensorelement und Sensormodul mit einem Magnetfeldsensor
US7923987B2 (en) 2007-10-08 2011-04-12 Infineon Technologies Ag Magnetic sensor integrated circuit with test conductor
US8559139B2 (en) 2007-12-14 2013-10-15 Intel Mobile Communications GmbH Sensor module and method for manufacturing a sensor module
US8080993B2 (en) * 2008-03-27 2011-12-20 Infineon Technologies Ag Sensor module with mold encapsulation for applying a bias magnetic field
US7724566B1 (en) 2008-08-27 2010-05-25 The United States Of America As Represented By The Secretary Of The Navy Magnetoresistive resistor memory cell
WO2013085547A1 (fr) 2011-12-05 2013-06-13 Advanced Microsensors Corporation Appareil de détection de champ magnétique et procédés associés
DE102014205949A1 (de) * 2014-03-31 2015-10-01 Siemens Aktiengesellschaft Durchflusskammer für einen Durchflusszytometer sowie Durchflusszytometer
US9812637B2 (en) 2015-06-05 2017-11-07 Allegro Microsystems, Llc Spin valve magnetoresistance element with improved response to magnetic fields
CN106597326B (zh) * 2015-10-16 2020-01-07 爱盛科技股份有限公司 磁场感测装置
US11022661B2 (en) 2017-05-19 2021-06-01 Allegro Microsystems, Llc Magnetoresistance element with increased operational range
US10620279B2 (en) 2017-05-19 2020-04-14 Allegro Microsystems, Llc Magnetoresistance element with increased operational range
JP2019087688A (ja) 2017-11-09 2019-06-06 Tdk株式会社 磁気センサ
US11175353B2 (en) 2018-02-16 2021-11-16 Analog Devices International Unlimited Company Position sensor with compensation for magnet movement and related position sensing method
US11719771B1 (en) 2022-06-02 2023-08-08 Allegro Microsystems, Llc Magnetoresistive sensor having seed layer hysteresis suppression
US12320870B2 (en) 2022-07-19 2025-06-03 Allegro Microsystems, Llc Controlling out-of-plane anisotropy in an MR sensor with free layer dusting
US12359904B2 (en) 2023-01-26 2025-07-15 Allegro Microsystems, Llc Method of manufacturing angle sensors including magnetoresistance elements including different types of antiferromagnetic materials
US12352832B2 (en) 2023-01-30 2025-07-08 Allegro Microsystems, Llc Reducing angle error in angle sensor due to orthogonality drift over magnetic-field

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS576962Y2 (fr) * 1974-07-26 1982-02-09
US4447781A (en) * 1981-10-13 1984-05-08 Honeywell Inc. Magnetoresistive transducer apparatus
US4533872A (en) * 1982-06-14 1985-08-06 Honeywell Inc. Magnetic field sensor element capable of measuring magnetic field components in two directions
US5287238A (en) * 1992-11-06 1994-02-15 International Business Machines Corporation Dual spin valve magnetoresistive sensor
US5569544A (en) * 1992-11-16 1996-10-29 Nonvolatile Electronics, Incorporated Magnetoresistive structure comprising ferromagnetic thin films and intermediate layers of less than 30 angstroms formed of alloys having immiscible components
US5617071A (en) * 1992-11-16 1997-04-01 Nonvolatile Electronics, Incorporated Magnetoresistive structure comprising ferromagnetic thin films and intermediate alloy layer having magnetic concentrator and shielding permeable masses
US5351005A (en) * 1992-12-31 1994-09-27 Honeywell Inc. Resetting closed-loop magnetoresistive magnetic sensor
FR2715507B1 (fr) * 1994-01-25 1996-04-05 Commissariat Energie Atomique Magnétorésistance multicouche polarisée.
JPH08511873A (ja) * 1994-04-15 1996-12-10 フィリップス エレクトロニクス ネムローゼ フェンノートシャップ 磁界センサ、そんなセンサを具えた装置及びそんなセンサを製造する方法
US5561368A (en) * 1994-11-04 1996-10-01 International Business Machines Corporation Bridge circuit magnetic field sensor having spin valve magnetoresistive elements formed on common substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9529060B2 (en) 2014-01-09 2016-12-27 Allegro Microsystems, Llc Magnetoresistance element with improved response to magnetic fields

Also Published As

Publication number Publication date
WO1998007042A1 (fr) 1998-02-19
FR2752302A1 (fr) 1998-02-13
EP0853766A1 (fr) 1998-07-22
JPH11513128A (ja) 1999-11-09
US6069476A (en) 2000-05-30

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20060428