FR2616614B1 - Torche a plasma micro-onde, dispositif comportant une telle torche et procede pour la fabrication de poudre les mettant en oeuvre - Google Patents
Torche a plasma micro-onde, dispositif comportant une telle torche et procede pour la fabrication de poudre les mettant en oeuvreInfo
- Publication number
- FR2616614B1 FR2616614B1 FR8708096A FR8708096A FR2616614B1 FR 2616614 B1 FR2616614 B1 FR 2616614B1 FR 8708096 A FR8708096 A FR 8708096A FR 8708096 A FR8708096 A FR 8708096A FR 2616614 B1 FR2616614 B1 FR 2616614B1
- Authority
- FR
- France
- Prior art keywords
- torch
- same
- microwave plasma
- manufacturing powder
- plasma torch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000000843 powder Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/30—Plasma torches using applied electromagnetic fields, e.g. high frequency or microwave energy
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Plasma Technology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Manufacture Of Metal Powder And Suspensions Thereof (AREA)
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8708096A FR2616614B1 (fr) | 1987-06-10 | 1987-06-10 | Torche a plasma micro-onde, dispositif comportant une telle torche et procede pour la fabrication de poudre les mettant en oeuvre |
| JP63047673A JPS63312907A (ja) | 1987-06-10 | 1988-03-02 | マイクロ波プラズマトーチ、該トーチを使用する粉末製造装置および該装置を使用して粉末を製造する方法 |
| DK310088A DK310088A (da) | 1987-06-10 | 1988-06-08 | Mikroboelgebraender og et aggregat, der omfatter en saadan braender, samt en fremgangsmaade til ved hjaelp af aggregatet at fremstille pulver |
| EP88401405A EP0296921B1 (fr) | 1987-06-10 | 1988-06-09 | Torche à plasma micro-onde, dispositif comportant une telle torche et procédé pour la fabrication de poudre les mettant en oeuvre |
| DE8888401405T DE3873193T2 (de) | 1987-06-10 | 1988-06-09 | Mikrowellenplasmabrenner, einen solchen brenner aufweisende anlage und sie verwendendes puderproduktionsverfahren. |
| CA000569142A CA1311277C (fr) | 1987-06-10 | 1988-06-10 | Torche a plasma et micro-ondes et dispositif la comportant |
| US07/204,866 US4924061A (en) | 1987-06-10 | 1988-06-10 | Microwave plasma torch, device comprising such a torch and process for manufacturing powder by the use thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR8708096A FR2616614B1 (fr) | 1987-06-10 | 1987-06-10 | Torche a plasma micro-onde, dispositif comportant une telle torche et procede pour la fabrication de poudre les mettant en oeuvre |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| FR2616614A1 FR2616614A1 (fr) | 1988-12-16 |
| FR2616614B1 true FR2616614B1 (fr) | 1989-10-20 |
Family
ID=9351899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR8708096A Expired FR2616614B1 (fr) | 1987-06-10 | 1987-06-10 | Torche a plasma micro-onde, dispositif comportant une telle torche et procede pour la fabrication de poudre les mettant en oeuvre |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US4924061A (fr) |
| EP (1) | EP0296921B1 (fr) |
| JP (1) | JPS63312907A (fr) |
| CA (1) | CA1311277C (fr) |
| DE (1) | DE3873193T2 (fr) |
| DK (1) | DK310088A (fr) |
| FR (1) | FR2616614B1 (fr) |
Families Citing this family (59)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4126216B4 (de) * | 1991-08-08 | 2004-03-11 | Unaxis Deutschland Holding Gmbh | Vorrichtung für Dünnschichtverfahren zur Behandlung großflächiger Substrate |
| US5349154A (en) * | 1991-10-16 | 1994-09-20 | Rockwell International Corporation | Diamond growth by microwave generated plasma flame |
| NO174180C (no) * | 1991-12-12 | 1994-03-23 | Kvaerner Eng | Innföringsrör for brenner for kjemiske prosesser |
| US5565118A (en) * | 1994-04-04 | 1996-10-15 | Asquith; Joseph G. | Self starting plasma plume igniter for aircraft jet engine |
| JP2001504753A (ja) * | 1996-11-04 | 2001-04-10 | マテリアルズ モディフィケーション,インコーポレイティド | 超微粉のマイクロ波プラズマ化学合成 |
| FR2773299B1 (fr) * | 1997-12-29 | 2000-01-21 | Air Liquide | Torche a plasma a injecteur reglable et installation d'analyse d'un gaz utilisant une telle torche |
| EP0930810A1 (fr) * | 1997-12-29 | 1999-07-21 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Torche à plasma à injecteur réglable et installation d'analyse d'un gaz utilisant une telle torche |
| DE19814812C2 (de) * | 1998-04-02 | 2000-05-11 | Mut Mikrowellen Umwelt Technol | Plasmabrenner mit einem Mikrowellensender |
| DE19829760B4 (de) * | 1998-07-03 | 2006-10-12 | Institut für Oberflächenmodifizierung e.V. | Koaxialer Mikrowellenapplikator zur Erzeugung eines Plasmas mit automatischer oder manueller Anpassung |
| JP2000133494A (ja) | 1998-10-23 | 2000-05-12 | Mitsubishi Heavy Ind Ltd | マイクロ波プラズマ発生装置及び方法 |
| DE19856307C1 (de) * | 1998-12-07 | 2000-01-13 | Bosch Gmbh Robert | Vorrichtung zur Erzeugung eines freien kalten Plasmastrahles |
| RU2149521C1 (ru) * | 1999-02-02 | 2000-05-20 | Аозт "Дигазкрон" | Свч-плазмохимический реактор |
| KR19990068381A (ko) | 1999-05-11 | 1999-09-06 | 허방욱 | 마이크로웨이브플라즈마버너 |
| DE19925790A1 (de) * | 1999-06-05 | 2000-12-07 | Inst Oberflaechenmodifizierung | Verfahren und Vorrichtung zur Bearbeitung von optischen und anderen Oberflächen mittels Hochrate-Plasmaprozessen |
| US7510664B2 (en) * | 2001-01-30 | 2009-03-31 | Rapt Industries, Inc. | Apparatus and method for atmospheric pressure reactive atom plasma processing for shaping of damage free surfaces |
| US7591957B2 (en) | 2001-01-30 | 2009-09-22 | Rapt Industries, Inc. | Method for atmospheric pressure reactive atom plasma processing for surface modification |
| US6660177B2 (en) * | 2001-11-07 | 2003-12-09 | Rapt Industries Inc. | Apparatus and method for reactive atom plasma processing for material deposition |
| EP1361437A1 (fr) * | 2002-05-07 | 2003-11-12 | Centre National De La Recherche Scientifique (Cnrs) | Un nouveau marqueur biologique pour des tumeurs et des méthodes pour la détection de phénotype cancéreux ou non-cancéreux de cellules |
| US20060233682A1 (en) * | 2002-05-08 | 2006-10-19 | Cherian Kuruvilla A | Plasma-assisted engine exhaust treatment |
| US7432470B2 (en) | 2002-05-08 | 2008-10-07 | Btu International, Inc. | Surface cleaning and sterilization |
| US20060062930A1 (en) * | 2002-05-08 | 2006-03-23 | Devendra Kumar | Plasma-assisted carburizing |
| US7445817B2 (en) * | 2002-05-08 | 2008-11-04 | Btu International Inc. | Plasma-assisted formation of carbon structures |
| JP5209174B2 (ja) | 2002-05-08 | 2013-06-12 | ビーティーユー インターナショナル,インコーポレーテッド | 複数の放射供給源を有した放射装置およびプラズマ装置 |
| US20050233091A1 (en) * | 2002-05-08 | 2005-10-20 | Devendra Kumar | Plasma-assisted coating |
| US7465362B2 (en) * | 2002-05-08 | 2008-12-16 | Btu International, Inc. | Plasma-assisted nitrogen surface-treatment |
| US20060057016A1 (en) * | 2002-05-08 | 2006-03-16 | Devendra Kumar | Plasma-assisted sintering |
| US20060228497A1 (en) * | 2002-05-08 | 2006-10-12 | Satyendra Kumar | Plasma-assisted coating |
| US7497922B2 (en) * | 2002-05-08 | 2009-03-03 | Btu International, Inc. | Plasma-assisted gas production |
| US7498066B2 (en) * | 2002-05-08 | 2009-03-03 | Btu International Inc. | Plasma-assisted enhanced coating |
| US7504061B2 (en) * | 2002-05-08 | 2009-03-17 | Leonhard Kurz Gmbh & Co., Kg | Method of decorating large plastic 3D objects |
| US7638727B2 (en) * | 2002-05-08 | 2009-12-29 | Btu International Inc. | Plasma-assisted heat treatment |
| US7494904B2 (en) * | 2002-05-08 | 2009-02-24 | Btu International, Inc. | Plasma-assisted doping |
| US7560657B2 (en) * | 2002-05-08 | 2009-07-14 | Btu International Inc. | Plasma-assisted processing in a manufacturing line |
| US20060237398A1 (en) * | 2002-05-08 | 2006-10-26 | Dougherty Mike L Sr | Plasma-assisted processing in a manufacturing line |
| FR2847893B1 (fr) * | 2002-12-02 | 2006-05-05 | Cit Alcatel | Procede et dispositif de recharge par plasma d'une preforme pour fibre optique, a oxydes d'azote reduits |
| US7189940B2 (en) | 2002-12-04 | 2007-03-13 | Btu International Inc. | Plasma-assisted melting |
| US20040173316A1 (en) * | 2003-03-07 | 2004-09-09 | Carr Jeffrey W. | Apparatus and method using a microwave source for reactive atom plasma processing |
| US7371992B2 (en) | 2003-03-07 | 2008-05-13 | Rapt Industries, Inc. | Method for non-contact cleaning of a surface |
| US20040216845A1 (en) * | 2003-05-02 | 2004-11-04 | Czeslaw Golkowski | Non-thermal plasma generator device |
| US20060027539A1 (en) * | 2003-05-02 | 2006-02-09 | Czeslaw Golkowski | Non-thermal plasma generator device |
| DE10335720B4 (de) * | 2003-08-05 | 2018-05-09 | Andreas Stihl Ag & Co. Kg | Antivibrationselement |
| US7304263B2 (en) * | 2003-08-14 | 2007-12-04 | Rapt Industries, Inc. | Systems and methods utilizing an aperture with a reactive atom plasma torch |
| US7297892B2 (en) * | 2003-08-14 | 2007-11-20 | Rapt Industries, Inc. | Systems and methods for laser-assisted plasma processing |
| DE102004029466A1 (de) * | 2004-06-18 | 2006-01-05 | Leybold Optics Gmbh | Medieninjektor |
| WO2006127037A2 (fr) * | 2004-11-05 | 2006-11-30 | Dana Corporation | Traitement atmospherique effectue au moyen de plasmas generes par des micro-ondes |
| JP4489680B2 (ja) * | 2005-10-03 | 2010-06-23 | 株式会社アドテック プラズマ テクノロジー | マイクロ波プラズマ発生方法および装置 |
| US7619178B2 (en) * | 2006-02-06 | 2009-11-17 | Peschel William P | Directly connected magnetron powered self starting plasma plume igniter |
| KR101012345B1 (ko) * | 2008-08-26 | 2011-02-09 | 포항공과대학교 산학협력단 | 저 전력 휴대용 마이크로파 플라즈마 발생기 |
| US9505076B2 (en) * | 2012-01-25 | 2016-11-29 | Illinois Tool Works Inc. | Auxiliary shielding gas filter for a welding apparatus |
| CN205166151U (zh) * | 2012-07-13 | 2016-04-20 | 魄金莱默保健科学有限公司 | 火炬和用于维持原子化源的系统 |
| KR101359320B1 (ko) * | 2012-12-27 | 2014-02-10 | 한국기초과학지원연구원 | 전자파-고주파 혼성 플라즈마 토치 |
| CN105072793B (zh) * | 2015-07-24 | 2017-11-14 | 浙江全世科技有限公司 | 一种微波等离子体炬装置 |
| CN105898975B (zh) * | 2016-06-12 | 2018-07-17 | 浙江大学 | 一种大功率微波等离子体谐振腔 |
| EP3747241A1 (fr) * | 2018-02-02 | 2020-12-09 | Ionics SA | Jet de plasma atmosphérique à tube de canule droit |
| IT201800020206A1 (it) * | 2018-12-19 | 2020-06-19 | Directa Plus Spa | Apparecchiatura per il trattamento di materiali con plasma. |
| EP3890449A1 (fr) * | 2020-04-02 | 2021-10-06 | Tofwerk AG | Source d'ions à plasma commandée par micro-ondes |
| PL3996472T3 (pl) * | 2020-11-06 | 2023-10-23 | Fundació Eurecat | Aparatura i metoda sferoidyzacji proszku przez plazmę indukowaną mikrofalami |
| DE102021004675B4 (de) | 2021-09-17 | 2024-02-01 | Technische Universität Bergakademie Freiberg, Körperschaft des öffentlichen Rechts | Hybrid-Verfahren und Hybrid-Vorrichtung für CO2-ärmere bzw. CO2-freie Hochtemperaturtechnologien zur thermischen Behandlung bzw. Herstellung von anorganischen Werkstoffen |
| DE102022122280A1 (de) | 2022-09-02 | 2024-03-07 | Technische Universität Bergakademie Freiberg, Körperschaft des öffentlichen Rechts | Kombination elektrischer Heizelemente, enthalten einen Verbundwerkstoff, mit Mikrowellen-Plasmabrennern für Hochtemperaturanwendungen in der Metallurgie, in der chemischen Industrie und in der Zementindustrie |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5211175A (en) * | 1975-07-18 | 1977-01-27 | Toshiba Corp | Activated gas reacting apparatus |
| GB1523267A (en) * | 1976-04-15 | 1978-08-31 | Hitachi Ltd | Plasma etching apparatus |
| JPS5939178B2 (ja) * | 1977-04-25 | 1984-09-21 | 株式会社東芝 | 活性化ガス発生装置 |
| US4208806A (en) * | 1978-07-30 | 1980-06-24 | Gebrueder Buehler Ag | Process for treatment of pourable materials with microwaves |
| US4423303A (en) * | 1980-05-06 | 1983-12-27 | Tokyo Shibaura Denki Kabushiki Kaisha | Apparatus for treating powdery materials utilizing microwave plasma |
| DE3134501A1 (de) * | 1981-09-01 | 1983-08-11 | Nikolaj Ivanovič Čebankov | Ultrahochfrequenzplasmatron und anlage zur erhaltung feinst verteilter pulver |
| US4711983A (en) * | 1986-07-07 | 1987-12-08 | Gerling John E | Frequency stabilized microwave power system and method |
-
1987
- 1987-06-10 FR FR8708096A patent/FR2616614B1/fr not_active Expired
-
1988
- 1988-03-02 JP JP63047673A patent/JPS63312907A/ja active Pending
- 1988-06-08 DK DK310088A patent/DK310088A/da not_active Application Discontinuation
- 1988-06-09 EP EP88401405A patent/EP0296921B1/fr not_active Expired - Lifetime
- 1988-06-09 DE DE8888401405T patent/DE3873193T2/de not_active Expired - Fee Related
- 1988-06-10 CA CA000569142A patent/CA1311277C/fr not_active Expired - Lifetime
- 1988-06-10 US US07/204,866 patent/US4924061A/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| DE3873193D1 (de) | 1992-09-03 |
| DK310088D0 (da) | 1988-06-08 |
| US4924061A (en) | 1990-05-08 |
| FR2616614A1 (fr) | 1988-12-16 |
| EP0296921A1 (fr) | 1988-12-28 |
| DK310088A (da) | 1988-12-11 |
| EP0296921B1 (fr) | 1992-07-29 |
| JPS63312907A (ja) | 1988-12-21 |
| DE3873193T2 (de) | 1993-02-18 |
| CA1311277C (fr) | 1992-12-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |