[go: up one dir, main page]

FR2585730B1 - Procede de depot de metaux en couche mince sur un substrat non metallique, avec depot intermediaire d'hydrures par pulverisation cathodique reactive - Google Patents

Procede de depot de metaux en couche mince sur un substrat non metallique, avec depot intermediaire d'hydrures par pulverisation cathodique reactive

Info

Publication number
FR2585730B1
FR2585730B1 FR8511774A FR8511774A FR2585730B1 FR 2585730 B1 FR2585730 B1 FR 2585730B1 FR 8511774 A FR8511774 A FR 8511774A FR 8511774 A FR8511774 A FR 8511774A FR 2585730 B1 FR2585730 B1 FR 2585730B1
Authority
FR
France
Prior art keywords
hydrides
thin film
metallic substrate
depositing thin
reactive cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR8511774A
Other languages
English (en)
Other versions
FR2585730A1 (fr
Inventor
Georges Meunier
Jean-Pierre Manaud
Jean Michel Devalette
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Priority to FR8511774A priority Critical patent/FR2585730B1/fr
Publication of FR2585730A1 publication Critical patent/FR2585730A1/fr
Application granted granted Critical
Publication of FR2585730B1 publication Critical patent/FR2585730B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/18—Metallic material, boron or silicon on other inorganic substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR8511774A 1985-08-01 1985-08-01 Procede de depot de metaux en couche mince sur un substrat non metallique, avec depot intermediaire d'hydrures par pulverisation cathodique reactive Expired FR2585730B1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR8511774A FR2585730B1 (fr) 1985-08-01 1985-08-01 Procede de depot de metaux en couche mince sur un substrat non metallique, avec depot intermediaire d'hydrures par pulverisation cathodique reactive

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR8511774A FR2585730B1 (fr) 1985-08-01 1985-08-01 Procede de depot de metaux en couche mince sur un substrat non metallique, avec depot intermediaire d'hydrures par pulverisation cathodique reactive

Publications (2)

Publication Number Publication Date
FR2585730A1 FR2585730A1 (fr) 1987-02-06
FR2585730B1 true FR2585730B1 (fr) 1987-10-09

Family

ID=9321862

Family Applications (1)

Application Number Title Priority Date Filing Date
FR8511774A Expired FR2585730B1 (fr) 1985-08-01 1985-08-01 Procede de depot de metaux en couche mince sur un substrat non metallique, avec depot intermediaire d'hydrures par pulverisation cathodique reactive

Country Status (1)

Country Link
FR (1) FR2585730B1 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
IT1238695B (it) * 1990-02-16 1993-09-01 Eniricerche Spa Film di idruro di titanio
CN1447864A (zh) * 2000-08-15 2003-10-08 霍尼韦尔国际公司 溅射靶
US6833058B1 (en) 2000-10-24 2004-12-21 Honeywell International Inc. Titanium-based and zirconium-based mixed materials and sputtering targets
EP1470880B1 (fr) * 2002-01-31 2015-08-12 Mitsubishi Materials Corporation Element d'outil de coupe revetu a couche de revetement dure et procede de formation de la couche de revetement dure sur l'outil de coupe
FR2946433B1 (fr) 2009-06-05 2013-07-12 Ecole Polytechnique Dgar Utilisation d'une couche de silicium amorphe et procede d'analyse
DE102017126590A1 (de) * 2017-11-13 2019-05-16 Doduco Solutions Gmbh Verfahren zum Herstellen einer Bodenplatte für ein Elektronikmodul

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4125446A (en) * 1977-08-15 1978-11-14 Airco, Inc. Controlled reflectance of sputtered aluminum layers

Also Published As

Publication number Publication date
FR2585730A1 (fr) 1987-02-06

Similar Documents

Publication Publication Date Title
FR2457912B1 (fr) Procede d'electro-deposition d'un metal sur un substrat
GB2055403B (en) Method for depositing hard wear-resistant coatings on substrates
FR2636079B1 (fr) Procede de revetement de substrats par depot en phase vapeur
MY100824A (en) Method and apparatus for deposition metal oxide coating on float glass
EP0476652A3 (en) Method for depositing thin film on substrate by sputtering process
BE874614A (fr) Procede de depot d'un revetement sur du verre
AU6521486A (en) Continuous vapor deposition method for producing a coated glass article
FR2695943B1 (fr) Procédé de dépôt en phase vapeur d'un film en verre fluoré sur un substrat.
GB9019219D0 (en) Diamond-like carbon coatings
FR2655643B1 (fr) Procede pour realiser un depot metallique adherant sur le carbone, et miroir obtenu par ce procede.
FR2585730B1 (fr) Procede de depot de metaux en couche mince sur un substrat non metallique, avec depot intermediaire d'hydrures par pulverisation cathodique reactive
GB8905734D0 (en) Coating metallic substrates by the pvd process
FR2348982A1 (fr) Procede de depot chimique d'un metal a la surface d'un substrat dielectrique
JPS5558360A (en) Forming method for heat and abrasion resisting protective coating
DE3564291D1 (en) Steel article having a disordered silicon carboxynitride coating, and method of preparing the coating
FR2573441B1 (fr) Cathode-cible pour depot, par pulverisation, d'un materiau composite sur un substrat
JPS544968A (en) Production of molded plastic article having thin metallic film
DE2962966D1 (en) Heat-hardenable aqueous coating composition, application thereof to the electrodeposition and method for coating a conductive substrate by cathodic deposition
FR2643360B1 (fr) Procede de depot en phase vapeur d'un verre fluore sur un substrat, et composition vitreuse deposee ainsi obtenue
EP0152673A3 (fr) Revêtements composites adhérents et résistants à l'usure
FR2731370B1 (fr) Procede pour le depot assiste par plasma d'au moins une couche mince sur un substrat a deux faces, et reacteur correspondant
ES8700884A1 (es) Procedimiento y dispositivo para el control y regulacion delespesor de un revestimiento metalico delgado depositado so- bre un soporte
FR2616808B1 (fr) Dispositif pour le depot par chauffage sur un substrat d'un compose introduit par plasma
EP0387143A3 (fr) Procédé de dépôt électrolytique sur un substrat semiconducteur
FR2698380B1 (fr) Procédé de préparation d'un revêtement adhérent d'un polypyrrole sur un substrat métallique à base de zinc par électropolymérisation.

Legal Events

Date Code Title Description
ST Notification of lapse