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FR2327699A1 - DEVICE FOR HEATING A SPECIMEN, FOR AN ELECTRONIC MICROSCOPE - Google Patents

DEVICE FOR HEATING A SPECIMEN, FOR AN ELECTRONIC MICROSCOPE

Info

Publication number
FR2327699A1
FR2327699A1 FR7344579A FR7344579A FR2327699A1 FR 2327699 A1 FR2327699 A1 FR 2327699A1 FR 7344579 A FR7344579 A FR 7344579A FR 7344579 A FR7344579 A FR 7344579A FR 2327699 A1 FR2327699 A1 FR 2327699A1
Authority
FR
France
Prior art keywords
specimen
heating
electronic microscope
microscope
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7344579A
Other languages
French (fr)
Other versions
FR2327699B1 (en
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of FR2327699A1 publication Critical patent/FR2327699A1/en
Application granted granted Critical
Publication of FR2327699B1 publication Critical patent/FR2327699B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
FR7344579A 1972-12-14 1973-12-13 DEVICE FOR HEATING A SPECIMEN, FOR AN ELECTRONIC MICROSCOPE Granted FR2327699A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14372672 1972-12-14

Publications (2)

Publication Number Publication Date
FR2327699A1 true FR2327699A1 (en) 1977-05-06
FR2327699B1 FR2327699B1 (en) 1978-03-24

Family

ID=15345561

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7344579A Granted FR2327699A1 (en) 1972-12-14 1973-12-13 DEVICE FOR HEATING A SPECIMEN, FOR AN ELECTRONIC MICROSCOPE

Country Status (4)

Country Link
US (1) US3896314A (en)
DE (1) DE2362249C3 (en)
FR (1) FR2327699A1 (en)
GB (1) GB1443478A (en)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6054151A (en) * 1983-09-02 1985-03-28 Internatl Precision Inc Sample moving device for electron beam equipment
DE3546095A1 (en) * 1985-12-24 1987-06-25 Zeiss Carl Fa GONIOMETER TABLE
US4703181A (en) * 1986-04-07 1987-10-27 Gatan Inc. Anti-drift device for side entry electron microscope specimen holders
JPH0614460B2 (en) * 1987-05-22 1994-02-23 日本電子株式会社 Sample equipment for electron microscopes, etc.
JP2561699B2 (en) * 1988-04-28 1996-12-11 日本電子株式会社 Electron microscope sample device
FR2639473A1 (en) * 1988-11-18 1990-05-25 Chaixmeca Sarl DEVICE FOR THE TRANSFER UNDER A CONTROLLED ATMOSPHERE OF SAMPLES FOR EXAMINATION IN TRANSMISSION ELECTRON MICROSCOPY
NL8902727A (en) * 1989-11-06 1991-06-03 Philips Nv OBJECT HOLDER FOR SUPPORTING AN OBJECT IN A LOADED PARTICLE BUNDLE SYSTEM.
US5225683A (en) * 1990-11-30 1993-07-06 Jeol Ltd. Detachable specimen holder for transmission electron microscope
US5124645A (en) * 1991-04-24 1992-06-23 The United States Of America As Represented By The Secretary Of The Air Force Transmission electron microscope (TEM) power probe for in-situ viewing of electromigration and operation of an integrated circuit or microprocessor
DE69229432T2 (en) * 1991-10-24 2000-02-17 Hitachi, Ltd. Sample holder for electron microscope
US5289005A (en) * 1992-05-29 1994-02-22 Jeol Ltd. Electron microscope
US5635836A (en) * 1994-10-21 1997-06-03 International Business Machines Corporation Mechanical apparatus with rod, pivot, and translation means for positioning a sample for use with a scanning microscope
US6025592A (en) * 1995-08-11 2000-02-15 Philips Electronics North America High temperature specimen stage and detector for an environmental scanning electron microscope
US5898177A (en) * 1996-08-08 1999-04-27 Hitachi, Ltd. Electron microscope
NL1020936C2 (en) 2002-06-25 2003-12-30 Univ Delft Tech Specimen holder for an electron microscope, assembly of a specimen holder and an electron microscope and method for reducing thermal drift in an electron microscope.
JP4616701B2 (en) * 2005-05-30 2011-01-19 日本電子株式会社 Sample holder for electron microscope
JP5094788B2 (en) * 2009-06-18 2012-12-12 株式会社日立製作所 Electron microscope and its sample holder
WO2011066018A1 (en) 2009-11-27 2011-06-03 Hysitron, Inc. Micro electro-mechanical heater
US8631687B2 (en) 2010-04-19 2014-01-21 Hysitron, Inc. Indenter assembly
EP2780689B1 (en) 2011-11-14 2017-01-04 Hysitron, Inc. Probe tip heating assembly
WO2013082145A1 (en) 2011-11-28 2013-06-06 Yunje Oh High temperature heating system
EP2861934B1 (en) 2012-06-13 2017-05-03 Hysitron, Inc. Environmental conditioning assembly for use in mechanical testing at micron or nano-scales
NL2011876C2 (en) 2013-12-02 2015-06-03 Univ Delft Tech Low specimen drift holder and cooler for use in microscopy.
US10168261B2 (en) 2015-03-23 2019-01-01 Kla-Tencor Corporation Structure for achieving dimensional stability during temperature changes
JP6796541B2 (en) * 2017-04-26 2020-12-09 日本電子株式会社 Holder and charged particle beam device
WO2019042905A1 (en) 2017-08-31 2019-03-07 Asml Netherlands B.V. Electron beam inspection tool
JP6471254B1 (en) * 2018-04-10 2019-02-13 株式会社メルビル Sample holder

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2753458A (en) * 1954-04-12 1956-07-03 Kazato Kenji Electron microscope
US3778621A (en) * 1972-06-13 1973-12-11 Jeol Ltd Specimen tilting device for an electron optical device

Also Published As

Publication number Publication date
FR2327699B1 (en) 1978-03-24
DE2362249B2 (en) 1978-07-06
US3896314A (en) 1975-07-22
GB1443478A (en) 1976-07-21
DE2362249A1 (en) 1974-07-04
DE2362249C3 (en) 1979-03-22

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