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FI981458A0 - Silicon micromechanical balance - Google Patents

Silicon micromechanical balance

Info

Publication number
FI981458A0
FI981458A0 FI981458A FI981458A FI981458A0 FI 981458 A0 FI981458 A0 FI 981458A0 FI 981458 A FI981458 A FI 981458A FI 981458 A FI981458 A FI 981458A FI 981458 A0 FI981458 A0 FI 981458A0
Authority
FI
Finland
Prior art keywords
balance
silicon micromechanical
micromechanical
silicon
micromechanical balance
Prior art date
Application number
FI981458A
Other languages
Finnish (fi)
Swedish (sv)
Original Assignee
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valtion Teknillinen filed Critical Valtion Teknillinen
Priority to FI981458A priority Critical patent/FI981458A0/en
Publication of FI981458A0 publication Critical patent/FI981458A0/en
Priority to FI982832A priority patent/FI105237B/en
Priority to PCT/FI1999/000538 priority patent/WO1999067605A1/en
Priority to US09/720,112 priority patent/US6513388B1/en

Links

FI981458A 1998-06-24 1998-06-24 Silicon micromechanical balance FI981458A0 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FI981458A FI981458A0 (en) 1998-06-24 1998-06-24 Silicon micromechanical balance
FI982832A FI105237B (en) 1998-06-24 1998-12-30 Silicon micro mechanical balance
PCT/FI1999/000538 WO1999067605A1 (en) 1998-06-24 1999-06-18 Micromechanical precision silicon scale
US09/720,112 US6513388B1 (en) 1998-06-24 1999-06-18 Micromechanical precision silicon scale

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI981458A FI981458A0 (en) 1998-06-24 1998-06-24 Silicon micromechanical balance

Publications (1)

Publication Number Publication Date
FI981458A0 true FI981458A0 (en) 1998-06-24

Family

ID=8552066

Family Applications (1)

Application Number Title Priority Date Filing Date
FI981458A FI981458A0 (en) 1998-06-24 1998-06-24 Silicon micromechanical balance

Country Status (1)

Country Link
FI (1) FI981458A0 (en)

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Legal Events

Date Code Title Description
FD Application lapsed