FI20155095A - Mikromekaaninen kulmanopeusanturi - Google Patents

Mikromekaaninen kulmanopeusanturi

Info

Publication number: FI20155095A
Authority: FI; Finland
Prior art keywords: angular velocity; velocity sensor; micromechanical angular; micromechanical; sensor
Prior art date: 2015-02-11

Application number

FI20155095A

Other languages

English (en)

Swedish (sv)

Other versions

FI20155095A7 (fi

Inventor

Tommi Piirainen

Original Assignee

Murata Manufacturing Co

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2015-02-11

Filing date

2015-02-11

Publication date

2016-08-12

2015-02-11 Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co

2015-02-11 Priority to FI20155095A priority Critical patent/FI20155095A7/fi

2016-02-03 Priority to TW105103460A priority patent/TWI583923B/zh

2016-02-05 Priority to US15/016,751 priority patent/US10139228B2/en

2016-02-08 Priority to EP19189707.3A priority patent/EP3584535B1/en

2016-02-08 Priority to PCT/IB2016/050633 priority patent/WO2016128872A1/en

2016-02-08 Priority to EP16704707.5A priority patent/EP3256814B1/en

2016-02-08 Priority to JP2017542124A priority patent/JP6471805B2/ja

2016-08-12 Publication of FI20155095A publication Critical patent/FI20155095A/fi

2016-08-12 Publication of FI20155095A7 publication Critical patent/FI20155095A7/fi

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
- G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
- G01C19/5733—Structural details or topology
- G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
- G01C19/5747—Structural details or topology the devices having two sensing masses in anti-phase motion each sensing mass being connected to a driving mass, e.g. driving frames

Landscapes

Physics & Mathematics (AREA)
Engineering & Computer Science (AREA)
General Physics & Mathematics (AREA)
Radar, Positioning & Navigation (AREA)
Remote Sensing (AREA)
Gyroscopes (AREA)
Micromachines (AREA)
Pressure Sensors (AREA)

FI20155095A 2015-02-11 2015-02-11 Mikromekaaninen kulmanopeusanturi FI20155095A7 (fi)

Priority Applications (7)

Application Number	Priority Date	Filing Date	Title
FI20155095A FI20155095A7 (fi)	2015-02-11	2015-02-11	Mikromekaaninen kulmanopeusanturi
TW105103460A TWI583923B (zh)	2015-02-11	2016-02-03	偵測角速度的微機械感測器
US15/016,751 US10139228B2 (en)	2015-02-11	2016-02-05	Micromechanical sensor of angular velocity
EP19189707.3A EP3584535B1 (en)	2015-02-11	2016-02-08	Micromechanical sensor of angular velocity
PCT/IB2016/050633 WO2016128872A1 (en)	2015-02-11	2016-02-08	Micromechanical sensor of angular velocity
EP16704707.5A EP3256814B1 (en)	2015-02-11	2016-02-08	Micromechanical sensor of angular velocity
JP2017542124A JP6471805B2 (ja)	2015-02-11	2016-02-08	マイクロメカニカル角速度センサ

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
FI20155095A FI20155095A7 (fi)	2015-02-11	2015-02-11	Mikromekaaninen kulmanopeusanturi

Publications (2)

Publication Number	Publication Date
FI20155095A true FI20155095A (fi)	2016-08-12
FI20155095A7 FI20155095A7 (fi)	2016-08-12

Family

ID=55359558

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
FI20155095A FI20155095A7 (fi)	2015-02-11	2015-02-11	Mikromekaaninen kulmanopeusanturi

Country Status (6)

Country	Link
US (1)	US10139228B2 (fi)
EP (2)	EP3584535B1 (fi)
JP (1)	JP6471805B2 (fi)
FI (1)	FI20155095A7 (fi)
TW (1)	TWI583923B (fi)
WO (1)	WO2016128872A1 (fi)

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ITUA20161498A1 (it) *	2016-03-09	2017-09-09	St Microelectronics Srl	Struttura di rilevamento micromeccanica di un dispositivo sensore mems, in particolare di un giroscopio mems, con migliorate caratteristiche di azionamento
US10126129B2 (en) *	2016-07-11	2018-11-13	Nxp Usa, Inc.	Vibration and shock robust gyroscope
US10466053B2 (en)	2017-04-04	2019-11-05	Invensense, Inc.	Out-of-plane sensing gyroscope robust to external acceleration and rotation
CN106940182B (zh) *	2017-05-04	2023-05-23	成都振芯科技股份有限公司	一种四质量块耦合微机电陀螺仪
US10760909B2 (en) *	2018-06-18	2020-09-01	Nxp Usa, Inc.	Angular rate sensor with in-phase drive and sense motion suppression
US11060866B2 (en) *	2019-02-15	2021-07-13	Murata Manufacturing Co., Ltd.	Balanced multiaxis gyroscope
EP3696503B1 (en) *	2019-02-15	2022-10-26	Murata Manufacturing Co., Ltd.	Vibration-robust multiaxis gyroscope
JP7188311B2 (ja) *	2019-07-31	2022-12-13	セイコーエプソン株式会社	ジャイロセンサー、電子機器、及び移動体
TWI770605B (zh) *	2019-09-10	2022-07-11	昇佳電子股份有限公司	微機電陀螺儀
DE102020202158A1 (de) *	2020-02-19	2021-08-19	Robert Bosch Gesellschaft mit beschränkter Haftung	Mikromechanische Drehraten-Sensoranordnung, Drehraten-Sensorarray und entsprechendes Herstellungsverfahren
US11525680B2 (en) *	2021-02-17	2022-12-13	Nxp Usa, Inc.	Angular rate sensor with centrally positioned coupling structures
CN113418517B (zh) *	2021-06-16	2025-07-18	瑞声开泰科技(武汉)有限公司	陀螺仪
DE102021212100A1 (de) *	2021-10-27	2023-04-27	Robert Bosch Gesellschaft mit beschränkter Haftung	Mikromechanisches Bauteil für einen Drehratensensor
CN116147599B (zh) *	2023-04-18	2023-06-23	华芯拓远(天津)科技有限公司	一种四质量全差分双轴mems陀螺仪
CN117537794B (zh) *	2024-01-09	2024-04-23	南京理工大学	一种带有驱动放大耦合结构的四质量微机械陀螺仪

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TW498169B (en)	2000-11-29	2002-08-11	American Gnc Corp	Interruption-free hand-held positioning method and system thereof
TW594016B (en) *	2003-04-29	2004-06-21	Chung Shan Inst Of Science	Z-axis solid state gyroscope and three-axis inertial measurement apparatus
US7421897B2 (en)	2005-04-14	2008-09-09	Analog Devices, Inc.	Cross-quad and vertically coupled inertial sensors
JP4887034B2 (ja) *	2005-12-05	2012-02-29	日立オートモティブシステムズ株式会社	慣性センサ
KR20090052832A (ko)	2006-03-10	2009-05-26	콘티넨탈 테베스 아게 운트 코. 오하게	커플링 바를 구비한 회전 속도 센서
DE102007030119A1 (de)	2007-06-29	2009-01-02	Litef Gmbh	Corioliskreisel
CN101363731B (zh) *	2008-09-25	2011-01-26	中国人民解放军国防科学技术大学	基于剪应力检测的石英微机械陀螺及其制作方法
EP2475959B1 (de)	2009-09-09	2015-07-08	Continental Teves AG & Co. oHG	Doppelaxialer, schockrobuster, drehratensensor mit linearen und rotatorischen seismischen elementen
ITTO20091042A1 (it)	2009-12-24	2011-06-25	St Microelectronics Srl	Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento
EP2584312B1 (en)	2010-06-16	2020-02-05	Toyota Jidosha Kabushiki Kaisha	Composite sensor
DE102010061755B4 (de)	2010-11-23	2025-01-30	Robert Bosch Gmbh	Drehratensensor und Verfahren zum Betrieb eines Drehratensensors
FR2974896B1 (fr)	2011-05-02	2013-11-22	Commissariat Energie Atomique	Centrale inertielle a plusieurs axes de detection
TWI453371B (zh) *	2011-12-30	2014-09-21	Ind Tech Res Inst	一種具振盪模組的微機電系統裝置

2015
- 2015-02-11 FI FI20155095A patent/FI20155095A7/fi not_active Application Discontinuation
2016
- 2016-02-03 TW TW105103460A patent/TWI583923B/zh active
- 2016-02-05 US US15/016,751 patent/US10139228B2/en active Active
- 2016-02-08 EP EP19189707.3A patent/EP3584535B1/en active Active
- 2016-02-08 JP JP2017542124A patent/JP6471805B2/ja active Active
- 2016-02-08 EP EP16704707.5A patent/EP3256814B1/en active Active
- 2016-02-08 WO PCT/IB2016/050633 patent/WO2016128872A1/en not_active Ceased

Also Published As

Publication number	Publication date
JP2018512568A (ja)	2018-05-17
US20160231115A1 (en)	2016-08-11
EP3256814A1 (en)	2017-12-20
US10139228B2 (en)	2018-11-27
EP3584535A1 (en)	2019-12-25
EP3584535B1 (en)	2021-08-18
JP6471805B2 (ja)	2019-02-20
WO2016128872A1 (en)	2016-08-18
TWI583923B (zh)	2017-05-21
FI20155095A7 (fi)	2016-08-12
TW201631297A (zh)	2016-09-01
EP3256814B1 (en)	2020-08-05

Publication	Publication Date	Title
FI20155095A (fi)	2016-08-12	Mikromekaaninen kulmanopeusanturi
FI20155094A (fi)	2016-08-12	Mikromekaaninen kulmanopeusanturi
LT3667475T (lt)	2022-11-10	Lenktas jutiklinis aparatas
EP3564638A4 (en)	2020-01-01	TORQUE SENSOR
EP3553485A4 (en)	2020-08-19	TORQUE SENSOR
DK3338105T3 (da)	2022-01-24	Fremgangsmåde til accelerometerunderstøttet navigation
EP3359930A4 (en)	2019-08-14	MULTISENSOR
FI20155354L (fi)	2016-11-16	Värähtelevä mikromekaaninen sensori kulmanopeudelle
IL271047B (en)	2022-04-01	Sensor system
FR3022996B1 (fr)	2017-12-01	Capteur inertiel angulaire mems fonctionnant en mode diapason
FI20155508A7 (fi)	2016-12-27	MEMS anturi
EP3619526A4 (en)	2021-03-03	MULTIPLE GAS DETECTION SYSTEM
DE112016004840A5 (de)	2018-08-09	Optischer sensor
EP3112804A4 (en)	2017-11-01	Vibration-type angular velocity sensor
DK3367886T3 (da)	2021-06-21	Sensoranordning
EP3497115A4 (en)	2020-07-29	MOLECULAR SENSOR SYSTEMS
DE112017005112A5 (de)	2019-06-27	Sensor
EP3731896C0 (en)	2024-02-28	SENSOR SYSTEM
GB201601031D0 (en)	2016-03-02	Velocity based pedestrian sensing
GB201514114D0 (en)	2015-09-23	Angular velocity sensors
EP3665481C0 (en)	2023-10-11	CARBON HYDRATE SENSORS
DK3329265T3 (da)	2023-06-26	Sensoranordning
EP3580552A4 (en)	2020-12-23	SENSOR
EP3553484A4 (en)	2020-07-29	TORQUE SENSOR
EP3619911C0 (en)	2025-01-01	SUPPLY OF SENSORS

Legal Events

Date	Code	Title	Description
2018-10-05	FD	Application lapsed