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FI20155454A - Menetelmä pld-pinnoitusmenetelmien laserpulssien säätelemiseksi pulssirintaman eri kohdissa - Google Patents

Menetelmä pld-pinnoitusmenetelmien laserpulssien säätelemiseksi pulssirintaman eri kohdissa

Info

Publication number
FI20155454A
FI20155454A FI20155454A FI20155454A FI20155454A FI 20155454 A FI20155454 A FI 20155454A FI 20155454 A FI20155454 A FI 20155454A FI 20155454 A FI20155454 A FI 20155454A FI 20155454 A FI20155454 A FI 20155454A
Authority
FI
Finland
Prior art keywords
adjusting
different positions
laser pulses
coating methods
pulse front
Prior art date
Application number
FI20155454A
Other languages
English (en)
Swedish (sv)
Other versions
FI20155454A7 (fi
Inventor
Juho Kaisto
Fergus Clarke
Jari Liimatainen
Original Assignee
Picodeon Ltd Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Picodeon Ltd Oy filed Critical Picodeon Ltd Oy
Priority to FI20155454A priority Critical patent/FI20155454A7/fi
Priority to PCT/FI2016/050413 priority patent/WO2016198746A1/en
Publication of FI20155454A publication Critical patent/FI20155454A/fi
Publication of FI20155454A7 publication Critical patent/FI20155454A7/fi

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/12—Scanning systems using multifaceted mirrors

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • General Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Physical Vapour Deposition (AREA)
  • Laser Beam Processing (AREA)
FI20155454A 2015-06-12 2015-06-12 Menetelmä pld-pinnoitusmenetelmien laserpulssien säätelemiseksi pulssirintaman eri kohdissa FI20155454A7 (fi)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FI20155454A FI20155454A7 (fi) 2015-06-12 2015-06-12 Menetelmä pld-pinnoitusmenetelmien laserpulssien säätelemiseksi pulssirintaman eri kohdissa
PCT/FI2016/050413 WO2016198746A1 (en) 2015-06-12 2016-06-09 Method for controlling laser pulses

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20155454A FI20155454A7 (fi) 2015-06-12 2015-06-12 Menetelmä pld-pinnoitusmenetelmien laserpulssien säätelemiseksi pulssirintaman eri kohdissa

Publications (2)

Publication Number Publication Date
FI20155454A true FI20155454A (fi) 2016-12-13
FI20155454A7 FI20155454A7 (fi) 2016-12-13

Family

ID=56740258

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20155454A FI20155454A7 (fi) 2015-06-12 2015-06-12 Menetelmä pld-pinnoitusmenetelmien laserpulssien säätelemiseksi pulssirintaman eri kohdissa

Country Status (2)

Country Link
FI (1) FI20155454A7 (fi)
WO (1) WO2016198746A1 (fi)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2294240B1 (en) * 2008-06-19 2017-03-08 Utilight Ltd. Light induced patterning

Also Published As

Publication number Publication date
FI20155454A7 (fi) 2016-12-13
WO2016198746A1 (en) 2016-12-15

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Legal Events

Date Code Title Description
MM Patent lapsed