FI20106360L - Menetelmä ultraäänianturin valmistamiseksi - Google Patents
Menetelmä ultraäänianturin valmistamiseksi Download PDFInfo
- Publication number
- FI20106360L FI20106360L FI20106360A FI20106360A FI20106360L FI 20106360 L FI20106360 L FI 20106360L FI 20106360 A FI20106360 A FI 20106360A FI 20106360 A FI20106360 A FI 20106360A FI 20106360 L FI20106360 L FI 20106360L
- Authority
- FI
- Finland
- Prior art keywords
- manufacturing
- sensor
- ultrasound
- ultrasonic sensor
- ultrasound transmitter
- Prior art date
Links
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title 1
- 238000002604 ultrasonography Methods 0.000 abstract 6
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2437—Piezoelectric probes
- G01N29/245—Ceramic probes, e.g. lead zirconate titanate [PZT] probes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/02—Microstructural systems; Auxiliary parts of microstructural devices or systems containing distinct electrical or optical devices of particular relevance for their function, e.g. microelectro-mechanical systems [MEMS]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H15/00—Measuring mechanical or acoustic impedance
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H3/00—Measuring characteristics of vibrations by using a detector in a fluid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H9/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means
- G01H9/008—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by using radiation-sensitive means, e.g. optical means by using ultrasonic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/04—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by acoustic means
- G01L11/06—Ultrasonic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/036—Analysing fluids by measuring frequency or resonance of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/028—Electrodynamic magnetometers
- G01R33/0286—Electrodynamic magnetometers comprising microelectromechanical systems [MEMS]
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
- H04R17/02—Microphones
- H04R17/025—Microphones using a piezoelectric polymer
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Computer Hardware Design (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Ceramic Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Mechanical Engineering (AREA)
- Signal Processing (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI20106360A FI20106360A7 (fi) | 2010-12-21 | 2010-12-21 | Menetelmä ultraäänianturin valmistamiseksi |
| PCT/FI2011/051082 WO2012085334A1 (en) | 2010-12-21 | 2011-12-07 | Method for manufacturing an ultrasonic sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI20106360A FI20106360A7 (fi) | 2010-12-21 | 2010-12-21 | Menetelmä ultraäänianturin valmistamiseksi |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| FI20106360A0 FI20106360A0 (fi) | 2010-12-21 |
| FI20106360L true FI20106360L (fi) | 2012-06-22 |
| FI20106360A7 FI20106360A7 (fi) | 2012-06-22 |
Family
ID=43415050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FI20106360A FI20106360A7 (fi) | 2010-12-21 | 2010-12-21 | Menetelmä ultraäänianturin valmistamiseksi |
Country Status (2)
| Country | Link |
|---|---|
| FI (1) | FI20106360A7 (fi) |
| WO (1) | WO2012085334A1 (fi) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI470190B (zh) * | 2012-11-22 | 2015-01-21 | Tung Thih Electronic Co Ltd | Assembly equipment, automatic assembly system and automatic assembly of ultrasonic sensors |
| FI20165896A (fi) * | 2016-11-24 | 2018-05-25 | Teknologian Tutkimuskeskus Vtt Oy | Anturi |
| CN109954526B (zh) * | 2019-04-22 | 2021-12-03 | 京东方科技集团股份有限公司 | 一种微流控器件及其制作方法 |
| CN110681560B (zh) * | 2019-09-10 | 2020-11-03 | 武汉大学 | 具有亥姆霍兹谐振腔的mems超声定位传感器 |
| CN112097968A (zh) * | 2020-08-24 | 2020-12-18 | 电子科技大学 | 一种光纤压力和加速度传感器及其安装标定方法 |
| CN112683428B (zh) * | 2020-11-26 | 2022-07-01 | 南京高华科技股份有限公司 | 一种mems电感式压力传感器及其制备方法 |
| CN112786775B (zh) * | 2021-01-04 | 2022-11-11 | 国网内蒙古东部电力有限公司电力科学研究院 | 无源自供能用压电纳米阵列传感器及其制备方法 |
| CN115073169A (zh) * | 2022-06-24 | 2022-09-20 | 西安理工大学 | 一种高能量低损耗的(1-x)NBT-SBT-xBKT无铅陶瓷材料及其制备方法 |
| CN118624067B (zh) * | 2024-06-25 | 2025-06-20 | 复远芯(上海)科技有限公司 | 压电谐振式压力传感器、补偿系统及制备方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6216538B1 (en) * | 1992-12-02 | 2001-04-17 | Hitachi, Ltd. | Particle handling apparatus for handling particles in fluid by acoustic radiation pressure |
| DE102005037086A1 (de) * | 2005-08-03 | 2007-02-08 | Hauni Maschinenbau Ag | Überwachung eines Leimbilds auf einem Umhüllungsstreifen |
| FI20075879A0 (fi) * | 2007-12-05 | 2007-12-05 | Valtion Teknillinen | Laite paineen, äänenpaineen vaihtelun, magneettikentän, kiihtyvyyden, tärinän ja kaasun koostumuksen mittaamiseksi |
-
2010
- 2010-12-21 FI FI20106360A patent/FI20106360A7/fi not_active Application Discontinuation
-
2011
- 2011-12-07 WO PCT/FI2011/051082 patent/WO2012085334A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| FI20106360A7 (fi) | 2012-06-22 |
| FI20106360A0 (fi) | 2010-12-21 |
| WO2012085334A1 (en) | 2012-06-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PC | Transfer of assignment of patent |
Owner name: TEKNOLOGIAN TUTKIMUSKESKUS VTT Free format text: TEKNOLOGIAN TUTKIMUSKESKUS VTT |
|
| FD | Application lapsed |