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FI20106063A7 - Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin - Google Patents

Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin Download PDF

Info

Publication number
FI20106063A7
FI20106063A7 FI20106063A FI20106063A FI20106063A7 FI 20106063 A7 FI20106063 A7 FI 20106063A7 FI 20106063 A FI20106063 A FI 20106063A FI 20106063 A FI20106063 A FI 20106063A FI 20106063 A7 FI20106063 A7 FI 20106063A7
Authority
FI
Finland
Prior art keywords
acoustically coupled
wide
baw filter
coupled thin
film baw
Prior art date
Application number
FI20106063A
Other languages
English (en)
Swedish (sv)
Other versions
FI20106063L (fi
FI20106063A0 (fi
Inventor
Tuomas Pensala
Johanna Meltaus
Original Assignee
Valtion Teknillinen Tutkimuskeskus
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Valtion Teknillinen Tutkimuskeskus filed Critical Valtion Teknillinen Tutkimuskeskus
Priority to FI20106063A priority Critical patent/FI20106063A7/fi
Publication of FI20106063A0 publication Critical patent/FI20106063A0/fi
Priority to US13/879,028 priority patent/US9893712B2/en
Priority to CN201810521377.XA priority patent/CN108988819A/zh
Priority to EP11832194.2A priority patent/EP2628246B1/en
Priority to JP2013533251A priority patent/JP5926735B2/ja
Priority to PCT/FI2011/050891 priority patent/WO2012049372A1/en
Priority to CN2011800498577A priority patent/CN103222191A/zh
Publication of FI20106063L publication Critical patent/FI20106063L/fi
Publication of FI20106063A7 publication Critical patent/FI20106063A7/fi
Priority to US15/893,717 priority patent/US10778186B2/en
Priority to US17/008,077 priority patent/US11374551B2/en
Priority to US17/849,744 priority patent/US12191843B2/en

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/547—Notch filters, e.g. notch BAW or thin film resonator filters
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H3/00—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators
    • H03H3/007—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks
    • H03H3/02—Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators for the manufacture of electromechanical resonators or networks for the manufacture of piezoelectric or electrostrictive resonators or networks
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/564—Monolithic crystal filters implemented with thin-film techniques
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46—Filters
    • H03H9/54—Filters comprising resonators of piezoelectric or electrostrictive material
    • H03H9/56—Monolithic crystal filters
    • H03H9/566—Electric coupling means therefor
    • H03H9/568—Electric coupling means therefor consisting of a ladder configuration

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

Keksintö koskee akustisesti kytkettyä ohutkalvo-BAW-suodatinta, joka käsittää pietsosähköisen kerroksen (1), tuloportin (2) pietsosähköiselä kerroksella (1) sähköisen signaalin muuttamiseksi akustiseksi aalloksi (SAW, BAW) ja lähtöportin (3) pietsosähköisellä kerroksella (1) akustisen signaalin muuttamiseksi sähköiseksi signaaliksi. Keksinnön mukaisesti portit (2, 3) sisältävät elektrodit (5, 6), jotka on sijoitettu lähelle toisiaan, ja suodatin on suunniteltu toimimaan ensimmäisen kertaluokan paksuusulottuvassa TE1-muodossa.
FI20106063A 2010-10-14 2010-10-14 Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin FI20106063A7 (fi)

Priority Applications (10)

Application Number Priority Date Filing Date Title
FI20106063A FI20106063A7 (fi) 2010-10-14 2010-10-14 Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin
CN2011800498577A CN103222191A (zh) 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器
JP2013533251A JP5926735B2 (ja) 2010-10-14 2011-10-14 広帯域音響結合薄膜ｂａｗフィルタ
CN201810521377.XA CN108988819A (zh) 2010-10-14 2011-10-14 宽带声耦合薄膜baw滤波器
EP11832194.2A EP2628246B1 (en) 2010-10-14 2011-10-14 Wide-band acoustically coupled thin-film baw filter
US13/879,028 US9893712B2 (en) 2010-10-14 2011-10-14 Wide-band acoustically coupled thin-film BAW filter
PCT/FI2011/050891 WO2012049372A1 (en) 2010-10-14 2011-10-14 Wide-band acoustically coupled thin-film baw filter
US15/893,717 US10778186B2 (en) 2010-10-14 2018-02-12 Wide-band acoustically coupled thin-film BAW filter
US17/008,077 US11374551B2 (en) 2010-10-14 2020-08-31 Wide-band acoustically coupled thin-film BAW filter
US17/849,744 US12191843B2 (en) 2010-10-14 2022-06-27 Wide-band acoustically coupled thin-film BAW filter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20106063A FI20106063A7 (fi) 2010-10-14 2010-10-14 Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin

Publications (3)

Publication Number Publication Date
FI20106063A0 FI20106063A0 (fi) 2010-10-14
FI20106063L FI20106063L (fi) 2012-06-08
FI20106063A7 true FI20106063A7 (fi) 2012-06-08

Family

ID=43064221

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20106063A FI20106063A7 (fi) 2010-10-14 2010-10-14 Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin

Country Status (6)

Country Link
US (4) US9893712B2 (fi)
EP (1) EP2628246B1 (fi)
JP (1) JP5926735B2 (fi)
CN (2) CN103222191A (fi)
FI (1) FI20106063A7 (fi)
WO (1) WO2012049372A1 (fi)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI20106063A7 (fi) 2010-10-14 2012-06-08 Valtion Teknillinen Tutkimuskeskus Akustisesti kytketty laajakaistainen ohutkalvo-BAW-suodatin
FI124732B (fi) * 2011-11-11 2014-12-31 Teknologian Tutkimuskeskus Vtt Lateraalisesti kytketty bulkkiaaltosuodatin, jolla on parannetut päästökaistan ominaisuudet
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Also Published As

Publication number Publication date
EP2628246A1 (en) 2013-08-21
EP2628246B1 (en) 2023-05-10
FI20106063L (fi) 2012-06-08
US20130278356A1 (en) 2013-10-24
JP2013539946A (ja) 2013-10-28
US20180212589A1 (en) 2018-07-26
US12191843B2 (en) 2025-01-07
FI20106063A0 (fi) 2010-10-14
US20220407500A1 (en) 2022-12-22
US20210058066A1 (en) 2021-02-25
US9893712B2 (en) 2018-02-13
JP5926735B2 (ja) 2016-05-25
WO2012049372A1 (en) 2012-04-19
US10778186B2 (en) 2020-09-15
US11374551B2 (en) 2022-06-28
CN103222191A (zh) 2013-07-24
CN108988819A (zh) 2018-12-11
EP2628246A4 (en) 2014-06-18

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