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FI20041107L - Liquid-filled micromechanical actuator - Google Patents

Liquid-filled micromechanical actuator Download PDF

Info

Publication number
FI20041107L
FI20041107L FI20041107A FI20041107A FI20041107L FI 20041107 L FI20041107 L FI 20041107L FI 20041107 A FI20041107 A FI 20041107A FI 20041107 A FI20041107 A FI 20041107A FI 20041107 L FI20041107 L FI 20041107L
Authority
FI
Finland
Prior art keywords
actuator
liquid
filled
built
semiconductor layer
Prior art date
Application number
FI20041107A
Other languages
Finnish (fi)
Swedish (sv)
Other versions
FI20041107A0 (en
FI20041107A7 (en
Inventor
Eero Ristolainen
Sami Myllymaeki
Original Assignee
Zipic Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zipic Oy filed Critical Zipic Oy
Priority to FI20041107A priority Critical patent/FI20041107A7/en
Publication of FI20041107A0 publication Critical patent/FI20041107A0/en
Priority to PCT/FI2005/000364 priority patent/WO2006021613A1/en
Publication of FI20041107L publication Critical patent/FI20041107L/en
Publication of FI20041107A7 publication Critical patent/FI20041107A7/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Micromachines (AREA)

Abstract

A micro-mechanical actuator filled with liquid. The actuator comprises an actuator built on a semiconductor layer (104), the oxide coating under which is replaced by liquid or gas. To the area caused by the actuator motion a voltage signal is fed resulting in change of actuator position and causing liquid-transmitting motion on the actuator second film (104). The actuator can be used for transmission of power and heat. The actuator can be built on the same semiconductor layer as the SOI-microcircuits.
FI20041107A 2004-08-24 2004-08-24 Liquid-filled micromechanical actuator FI20041107A7 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
FI20041107A FI20041107A7 (en) 2004-08-24 2004-08-24 Liquid-filled micromechanical actuator
PCT/FI2005/000364 WO2006021613A1 (en) 2004-08-24 2005-08-24 Liquid filled micro-mechanical actuator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20041107A FI20041107A7 (en) 2004-08-24 2004-08-24 Liquid-filled micromechanical actuator

Publications (3)

Publication Number Publication Date
FI20041107A0 FI20041107A0 (en) 2004-08-24
FI20041107L true FI20041107L (en) 2006-02-25
FI20041107A7 FI20041107A7 (en) 2006-02-25

Family

ID=32922128

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20041107A FI20041107A7 (en) 2004-08-24 2004-08-24 Liquid-filled micromechanical actuator

Country Status (2)

Country Link
FI (1) FI20041107A7 (en)
WO (1) WO2006021613A1 (en)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6168395B1 (en) * 1996-02-10 2001-01-02 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Bistable microactuator with coupled membranes
US6662448B2 (en) * 1998-10-15 2003-12-16 Xerox Corporation Method of fabricating a micro-electro-mechanical fluid ejector
US6334761B1 (en) * 2000-03-02 2002-01-01 California Institute Of Technology Check-valved silicon diaphragm pump and method of fabricating the same
SG105459A1 (en) * 2000-07-24 2004-08-27 Micron Technology Inc Mems heat pumps for integrated circuit heat dissipation
US6811133B2 (en) * 2002-04-30 2004-11-02 The Regents Of The University Of California Hydraulically amplified PZT mems actuator
WO2004063090A2 (en) * 2003-01-13 2004-07-29 Triad Sensors Inc. High displacement bistable micro actuator

Also Published As

Publication number Publication date
FI20041107A0 (en) 2004-08-24
WO2006021613A1 (en) 2006-03-02
FI20041107A7 (en) 2006-02-25

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Legal Events

Date Code Title Description
FD Application lapsed