FI20041106L - Mikromekanisk omkopplare och däri integrerad komponent - Google Patents
Mikromekanisk omkopplare och däri integrerad komponent Download PDFInfo
- Publication number
- FI20041106L FI20041106L FI20041106A FI20041106A FI20041106L FI 20041106 L FI20041106 L FI 20041106L FI 20041106 A FI20041106 A FI 20041106A FI 20041106 A FI20041106 A FI 20041106A FI 20041106 L FI20041106 L FI 20041106L
- Authority
- FI
- Finland
- Prior art keywords
- clutch
- built
- change
- integrated component
- integrated
- Prior art date
Links
- 239000004065 semiconductor Substances 0.000 abstract 2
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
Landscapes
- Arrangement And Mounting Of Devices That Control Transmission Of Motive Force (AREA)
- Micromachines (AREA)
- Hydraulic Clutches, Magnetic Clutches, Fluid Clutches, And Fluid Joints (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI20041106A FI20041106L (sv) | 2004-08-24 | 2004-08-24 | Mikromekanisk omkopplare och däri integrerad komponent |
| PCT/FI2005/000363 WO2006021612A1 (en) | 2004-08-24 | 2005-08-24 | Micro mechanical clutch and a component integrated thereto |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FI20041106A FI20041106L (sv) | 2004-08-24 | 2004-08-24 | Mikromekanisk omkopplare och däri integrerad komponent |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| FI20041106A0 FI20041106A0 (sv) | 2004-08-24 |
| FI20041106A7 FI20041106A7 (sv) | 2006-02-25 |
| FI20041106L true FI20041106L (sv) | 2006-02-25 |
Family
ID=32922127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FI20041106A FI20041106L (sv) | 2004-08-24 | 2004-08-24 | Mikromekanisk omkopplare och däri integrerad komponent |
Country Status (2)
| Country | Link |
|---|---|
| FI (1) | FI20041106L (sv) |
| WO (1) | WO2006021612A1 (sv) |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6277666B1 (en) * | 1999-06-24 | 2001-08-21 | Honeywell Inc. | Precisely defined microelectromechanical structures and associated fabrication methods |
| US6466102B1 (en) * | 1999-10-05 | 2002-10-15 | National Research Council Of Canada | High isolation micro mechanical switch |
| US6621387B1 (en) * | 2001-02-23 | 2003-09-16 | Analatom Incorporated | Micro-electro-mechanical systems switch |
| US6750078B2 (en) * | 2001-11-02 | 2004-06-15 | Intel Corporation | MEMS switch having hexsil beam and method of integrating MEMS switch with a chip |
| US6621392B1 (en) * | 2002-04-25 | 2003-09-16 | International Business Machines Corporation | Micro electromechanical switch having self-aligned spacers |
| KR100485787B1 (ko) * | 2002-08-20 | 2005-04-28 | 삼성전자주식회사 | 마이크로 스위치 |
| EP1535297B1 (en) * | 2002-08-26 | 2008-03-05 | International Business Machines Corporation | Diaphragm activated micro-electromechanical switch |
| FR2845075B1 (fr) * | 2002-09-27 | 2005-08-05 | Thales Sa | Microcommutateurs a actuation electrostatique a faible temps de reponse et commutation de puissance et procede de realisation associe |
-
2004
- 2004-08-24 FI FI20041106A patent/FI20041106L/sv not_active Application Discontinuation
-
2005
- 2005-08-24 WO PCT/FI2005/000363 patent/WO2006021612A1/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| FI20041106A7 (sv) | 2006-02-25 |
| FI20041106A0 (sv) | 2004-08-24 |
| WO2006021612A1 (en) | 2006-03-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FD | Application lapsed |